Switchable metal insulator metal capacitor

Patent metadata

Field	Value
Publication number	US-11276748-B2
Application number	US-201916527830-A
Country	US
Kind code	B2
Filing date	Jul 31, 2019
Priority date	Jul 31, 2019
Publication date	Mar 15, 2022
Grant date	Mar 15, 2022

Abstract

A switchable metal insulator metal capacitor (MIMcap) and a method for fabricating the MIMcap. In another aspect of the invention operating the MIMcap is also described. A first capacitor plate and a second capacitor plate are separated by a capacitor dielectric and disposed over a substrate. A first via is electrically connected to the first capacitor plate and comprised of phase change material (PCM). The PCM is deposited in an electrically conductive state and convertible by application of heat to an insulating state. A first heater is proximate to and electrically isolated from the PCM in the first via. When the first heater is activated it converts the PCM in the first via to the insulating state. This isolates the first capacitor plate from an integrated circuit.

First claim

Having described our invention, what we now claim is as follows:

1. A switchable metal insulator metal capacitor (MIMcap) comprising:
a first capacitor plate;
a second capacitor plate;
a first capacitor dielectric separating the first and second capacitor plates;
a first via electrically connected to and contacting the first capacitor plate comprised of phase change material (PCM) layer in an electrically conductive state, the PCM layer in the first via having a top surface coplanar or higher than a top surface of the first capacitor plate and convertible by application of heat to an insulating state; and
a first heater proximate to and electrically isolated from the PCM layer in the first via;
wherein the first heater is capable of converting the PCM layer to the insulating state, thereby isolating the first capacitor plate.

2. The MIMcap as recited in claim 1 further comprising;
a second via electrically connected to and contacting the second capacitor plate comprised of phase change material (PCM) layer in an electrically conductive state, the PCM layer in the second via having a top surface coplanar or higher than a top surface of the second capacitor plate and convertible by application of heat to an insulating state; and
a second heater proximate to and electrically isolated from the PCM layer in the second via;
wherein the second heater is capable of converting the PCM layer to the insulating state, thereby isolating the second capacitor plate.

3. The MIMcap as recited in claim 2 , further comprising:
a third capacitor plate disposed between the first capacitor plate and the second capacitor plate;
a second capacitor dielectric layer separating the first capacitor plate and the third capacitor plate and the third capacitor plate and the second capacitor plate.

4. The MIMcap as recited in claim 3 , further comprising:
a third via electrically connected to and contacting the third capacitor plate comprised of phase change material (PCM) layer in an electrically conductive state, the PCM layer in the third via having a top surface coplanar or higher than a top surface of the third capacitor plate and convertible by application of heat to an insulating state; and
a third heater proximate to and electrically isolated from the PCM layer in the third via;
wherein the third heater is capable of converting the PCM layer in the third via to the insulating state, thereby isolating the third capacitor plate.

5. The MIMcap as recited in claim 1 , wherein the first heater is disposed beneath the first via and a thermally conductive, electrically non-conductive layer is disposed on top of the first heater and the PCM layer is disposed on the thermally conductive, electrically non-conductive layer in the first via.

6. The MIMcap as recited in claim 1 , further comprising:
a conductive layer on the PCM layer in the first via, the conductive layer comprised of a material selected from the group of a metal and a metal alloy; and
a contact on the conductive layer.

7. The MIMcap as recited in claim 1 , further comprising:
a sensing circuit for detecting a short or current leakage between the first capacitor plate and the second capacitor plate;
wherein the sensing circuit is used to activate the first heater.

8. The MIMcap as recited in claim 3 , wherein a thickness of the PCM layer in the first via is different than a thickness of the PCM layer in the second via.

9. The MIMcap as recited in claim 3 , wherein a thickness of the PCM layer in the first via is the same as a thickness of the PCM layer in the second via.

10. A switchable metal insulator metal capacitor (MIMcap) comprising:
a first capacitor plate;
a second capacitor plate;
a first capacitor dielectric separating the first and second capacitor plates;
a first via electrically connected to the first capacitor plate comprised of phase change material (PCM) layer in an electrically conductive state, the PCM convertible by application of heat to an insulating state;
a first heater proximate to and electrically isolated from the PCM layer in the first via, wherein the first heater is capable of converting the PCM layer in the first to the insulating state, thereby isolating the first capacitor plate;
second via electrically connected to the second capacitor plate comprised of phase change material (PCM) layer in an electrically conductive state, the PCM layer convertible by application of heat to an insulating state; and
a second heater proximate to and electrically isolated from the PCM layer in the second via, wherein the second heater is capable of converting the PCM layer in the second via to the insulating state, thereby isolating the second capacitor plate.

11. The MIMcap as recited in claim 10 , further comprising:
a third capacitor plate disposed between the first capacitor plate and the second capacitor plate;
a third via electrically connected to the third capacitor plate comprised of phase change material (PCM) layer in an electrically conductive state, the PCM layer convertible by application of heat to an insulating state; and
a third heater proximate to and electrically isolated from the PCM layer in the third via, wherein the third heater is capable of converting the PCM layer in the third via to the insulating state, thereby isolating the third capacitor plate.

12. The MIMcap as recited in claim 10 , wherein the first heater is disposed beneath the first via and a thermally conductive, electrically non-conductive layer is disposed on top of the first heater and the PCM layer is disposed on the thermally conductive, electrically non-conductive layer in the first via.

13. The MIMcap as recited in claim 10 , further comprising:
a sensing circuit for detecting a short or current leakage between the first capacitor plate and the second capacitor plate;
wherein the sensing circuit is used to activate the first heater.

14. The MIMcap as recited in claim 10 , wherein a top surface of the PCM layer in the first via is coplanar or higher than a top surface of the first capacitor plate and a top surface of the PCM layer in the second via is coplanar or higher than a top surface of the second capacitor plate.

15. The MIMcap as recited in claim 10 , wherein a thickness of the PCM layer in the first via is different than a thickness of the PCM layer in the second via.

16. A switchable metal insulator metal capacitor (MIMcap) comprising:
a first capacitor plate;
a second capacitor plate;
a first capacitor dielectric separating the first and second capacitor plates;
a first via electrically connected to the first capacitor plate comprised of phase change material (PCM) layer in an electrically conductive state, the PCM layer convertible by application of heat to an insulating state; and
a first heater proximate to and electrically isolated from the PCM layer in the first via;
a sensing circuit for detecting a short or current leakage between the first capacitor plate and the second capacitor plate;
wherein the sensing circuit is used to activate the first heater and the first heater is capable of converting the PCM layer to the insulating state, thereby isolating the first capacitor plate.

17. The MIMcap as recited in claim 16 further comprising;
a second via electrically connected to the second capacitor plate comprised of phase change material (PCM) layer in an electrically conductive state, the PCM layer convertible by application of heat to an insulating state; and
a second heater proximate to and electrically isolated from the PCM layer in the second via;
wherein the sec

Assignees

• IBM

Inventors

• Li Baozhen
• Yang Chih-Chao
• Kim Andrew Tae
• Linder Barry

Classifications

• H10W20/42

  Vias, e.g. via plugs · CPC title

• H10W20/496

  Capacitor integral with wiring layers · CPC title

• H10D1/68 Primary

  Capacitors having no potential barriers · CPC title

• H10D1/692 Primary

  Electrodes · CPC title

• H01G4/008

  Selection of materials · CPC title