Substrate processing apparatus

Patent metadata

Field	Value
Publication number	US-11273464-B2
Application number	US-202016986412-A
Country	US
Kind code	B2
Filing date	Aug 6, 2020
Priority date	Aug 7, 2019
Publication date	Mar 15, 2022
Grant date	Mar 15, 2022

Abstract

A substrate processing apparatus includes a cover member placed to surround a substrate held by a rotary holder; a collecting member placed in an exhaust path formed between the cover member and the rotary holder; and a solvent supply placed above the collecting member and configured to supply a solvent to the collecting member. The solvent supply includes an inner storage space surrounding the substrate; an outer storage space surrounding the inner storage space; and a partition wall extending along a circumferential direction to partition the inner storage space and the outer storage space. Multiple communication holes are extended to penetrate the partition wall such that the solvent introduced into the outer storage space flows to the inner storage space. Multiple dripping holes are extended to penetrate a bottom wall of the inner storage space such that the solvent within the inner storage space drops toward the collecting member.

First claim

We claim:

1. A substrate processing apparatus, comprising:
a rotary holder configured to hold and rotate a substrate;
a coating liquid supply configured to supply a coating liquid to the substrate;
a cover member placed to surround the substrate held by the rotary holder;
a collecting member placed in an exhaust path formed between the cover member and the rotary holder; and
a solvent supply placed above the collecting member and configured to supply a solvent to the collecting member,
wherein the solvent supply includes:
an inner storage space configured to surround the substrate as viewed from above;
an outer storage space configured to surround the inner storage space as viewed from above; and
a partition wall extending along a circumferential direction of the substrate to partition the inner storage space and the outer storage space, and
wherein the inner storage space includes multiple dripping holes arranged at a predetermined interval along the circumferential direction,
the outer storage space includes an inlet hole through which the solvent is introduced,
the partition wall includes multiple communication holes arranged at a predetermined interval along the circumferential direction,
the multiple communication holes are extended to penetrate the partition wall such that the solvent introduced into the outer storage space flows to the inner storage space, and
the multiple dripping holes are extended to penetrate a bottom wall of the inner storage space such that the solvent within the inner storage space drops toward the collecting member.

2. The substrate processing apparatus of claim 1 ,
wherein the solvent supply further includes a protrusion member protruding from a lower surface of a bottom wall of the solvent supply toward the collecting member located under the bottom wall.

3. The substrate processing apparatus of claim 1 ,
wherein the multiple communication holes include a communication hole whose diameter is increased as it goes from the outer storage space to the inner storage space.

4. The substrate processing apparatus of claim 1 ,
wherein the inlet hole is disposed not to overlap the multiple communication holes in a diametrical direction of the substrate as viewed from above.

5. The substrate processing apparatus of claim 4 ,
wherein the inlet hole is disposed to diametrically overlap a region of the partition wall corresponding to an approximately middle of two adjacent communication holes of the multiple communication holes in the circumferential direction as viewed from above.

6. The substrate processing apparatus of claim 1 ,
wherein the solvent supply further includes an additional inner storage space located above the inner storage space and configured to surround the substrate as viewed from above,
the partition wall partitions the inner storage space, the additional inner storage space and the outer storage space,
the additional inner storage space includes multiple additional dripping holes arranged at a predetermined interval along the circumferential direction,
the partition wall includes multiple additional communication holes arranged at a predetermined interval along the circumferential direction,
the multiple additional communication holes are extended to penetrate the partition wall such that the solvent introduced into the outer storage space flows to the additional inner storage space, and
the multiple additional dripping holes are extended to penetrate a bottom wall of the additional inner storage space such that the solvent within the additional inner storage space drops downwards.

7. The substrate processing apparatus of claim 1 ,
wherein the solvent supply further includes:
additional inner storage space located above the inner storage space and configured to surround the substrate as viewed from above; and
additional outer storage space located above the outer storage space and configured to surround the additional inner storage space as viewed from above, and
wherein the partition wall partitions the inner storage space, the outer storage space, the additional inner storage space and the additional outer storage space,
the additional inner storage space includes multiple additional dripping holes arranged at a predetermined interval along the circumferential direction,
the additional outer storage space includes an additional inlet hole through which the solvent is introduced,
the partition wall includes multiple additional communication holes arranged at a predetermined interval along the circumferential direction,
the multiple additional communication holes are extended to penetrate the partition wall such that the solvent introduced into the additional outer storage space flows to the additional inner storage space, and
the multiple additional dripping holes are extended to penetrate a bottom wall of the additional inner storage space such that the solvent within the additional inner storage space drops downwards.

8. The substrate processing apparatus of claim 6 ,
wherein the solvent supply further includes a protrusion member protruding downwards from a lower surface of the bottom wall of the additional inner storage space, and
the multiple additional dripping holes include an additional dripping hole which is extended to penetrate the additional inner storage space and the protrusion member.

9. The substrate processing apparatus of claim 1 , further comprising:
a controller configured to control the solvent supply,
wherein the controller controls the solvent supply to drop the solvent from the multiple dripping holes when the collecting member is in a dry state.

10. The substrate processing apparatus of claim 9 , further comprising:
additional solvent supply configured to supply a solvent to the substrate,
wherein the controller controls the solvent supply to drop the solvent from the multiple dripping holes when a new solvent is not supplied from the additional solvent supply while a predetermined time period elapses after the solvent is supplied from the solvent supply or the additional solvent supply.

11. The substrate processing apparatus of claim 9 , further comprising:
a sensor configured to detect the dry state of the collecting member,
wherein the controller controls the solvent supply to drop the solvent from the multiple dripping holes when the sensor detects the dry state of the collecting member.

12. The substrate processing apparatus of claim 1 ,
wherein the coating liquid has a viscosity of 100 cP or more.

Assignees

• Tokyo Electron Ltd

Inventors

• Shimmura Satoshi
• Sakai Yuji
• Shibasaki Kenta
• Takayanagi Koji
• Yada Kenji
• Inada Hiroichi
• Seki Shinichi
• OGATA Kento

Classifications

• H10P72/7618

  characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel · CPC title

• H10P72/06

  Apparatus for monitoring, sorting, marking, testing or measuring · CPC title

• H10P72/0402

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• H10P72/0448 Primary

  Apparatus for applying a liquid, a resin, an ink or the like · CPC title

• B05C11/10 Primary

  Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material {(B05C1/0813, B05C5/0225, B05C17/002 and B05C19/06 take precedence)} · CPC title