System for monitoring a plasma

Patent metadata

Field	Value
Publication number	US-11266002-B2
Application number	US-201816756185-A
Country	US
Kind code	B2
Filing date	Oct 19, 2018
Priority date	Oct 26, 2017
Publication date	Mar 1, 2022
Grant date	Mar 1, 2022

Abstract

An amplified optical beam is provided to a region that receives a target including target material, an interaction between the amplified optical beam and the target converting at least some of the target material from a first form to a second form to form a light-emitting plasma; first data comprising information related to the amplified optical beam is accessed; second data comprising information related to the light-emitting plasma is accessed; and an amount of the target material converted from the first form to the second form is determined. The determination is based on at least the first data and the second data, and the second form of the target material is less dense than the first form of the target material.

First claim

What is claimed is:

1. A method of monitoring an amount of target material converted to a light-emitting plasma, the method comprising:
providing an amplified optical beam to a region that receives a target comprising target material, an interaction between the amplified optical beam and the target converting at least some of the target material to the light-emitting plasma, wherein the light-emitting plasma is less dense than the target material;
accessing first data comprising information related to the amplified optical beam;
accessing second data comprising information related to the light-emitting plasma; and
determining an amount of the target material converted to the light-emitting plasma, wherein the determining is based on at least the first data and the second data.

2. The method of claim 1 , wherein the target material comprises a metal in a molten form.

3. The method of claim 1 , further comprising adjusting either or both of a property of the amplified optical beam and a property of at least one subsequent target based on the determined amount of converted target material, the at least one subsequent target being received at the region after the target.

4. The method of claim 3 , wherein the amplified optical beam comprises a pulsed amplified optical beam, the pulsed amplified optical beam comprises a plurality of pulses of light, and the light-emitting plasma is formed by an interaction between one of the plurality of pulses of light and the target material.

5. The method of claim 4 , wherein the one of the plurality of pulses of light has a temporal duration, and the light-emitting plasma formed by the interaction between the one of the plurality of pulses of light and the target emits light during a light-emission period.

6. A method of monitoring an amount of target material converted to a light-emitting plasma, the method comprising:
providing a pulsed amplified optical beam comprising a plurality of pulses of light to a region that receives a target comprising target material, wherein an interaction between one of the pulses of light and the target converts at least some of the target material from a first form to a second form to form the light-emitting plasma that emits light during a light-emission period and wherein the second form of the target material is less dense than the first form of the target material;
accessing first data comprising information representing a temporal duration of the one of the pulses of light;
accessing second data comprising information representing a temporal duration of the light-emission period; and
determining an amount of the target material converted from the first form to the second form, wherein determining is based on at least the first and the second data.

7. The method of claim 6 , wherein determining an amount of conversion of the target material comprises:
comparing the temporal duration of one of the plurality of pulses of light and the temporal duration of the light-emission period to determine a ratio of the temporal duration of the light-emission period to the temporal duration of one of the plurality of pulses;
comparing the ratio to a threshold ratio, the threshold ratio being a value above which production of target debris is unacceptable; and
determining whether the ratio is greater than the threshold ratio based on the comparison.

8. The method of claim 7 , further comprising, if the ratio is greater than the threshold ratio, adjusting a property of a subsequent pulse in the amplified optical beam or deactivating a source that produces the amplified optical beam.

9. The method of claim 8 , wherein the property of the subsequent pulse includes one or more of a temporal duration, a temporal profile, an energy, and a focus location.

10. The method of claim 8 , wherein the subsequent pulse is the pulse that immediately follows the one of the plurality of pulses.

11. The method of claim 7 , further comprising, if the ratio is greater than the threshold ratio, adjusting a property of a subsequent target, the subsequent target being received at the region after the target, or deactivating a source that produces the amplified optical beam.

12. The method of claim 11 , wherein the property of the subsequent target comprises one or more of a shape, a density, a thickness, and a size.

13. The method of claim 1 , wherein
the information related to the amplified optical beam comprises information representing a property of the one of the plurality of pulses of light,
the information related to the light-emitting plasma comprises information representing a property of the light-emission period,
determining an amount of conversion of the target material comprises comparing the property of the one of the plurality of pulses of light and the property of the light- emission period, and
the property of the one of the plurality of pulses of light and the property of the light-emitting plasma comprises a rise time, a peak energy value, a total energy content, and/or an average energy content.

14. The method of claim 1 , wherein
the first data comprises data from a first sensor, the first sensor being configured to measure a property of the amplified optical beam and to generate the information related to the amplified optical beam based on the measured property of the amplified optical beam, and
the second data comprises data from a second sensor, the second sensor being configured to measure a property of the light-emitting plasma and to generate the information related to the light-emitting plasma based on the measured property of the light-emitting plasma.

15. The method of claim 1 , further comprising presenting diagnostic data based on the on the determined amount of conversion of the target material.

16. The method of claim 1 , further comprising controlling a source of the amplified optical beam based on the determined amount of conversion of the target material, wherein controlling the source of the amplified optical beam comprises (a) deactivating the source, (b) changing an operating mode of the source, or (c) triggering an optimization routine in the source.

17. The method of claim 1 , wherein the second data comprises information about extreme ultraviolet (EUV) light emitted from the light-emitting plasma.

18. The method of claim 1 , wherein determining the amount of target material converted comprises determining production of target debris and/or particulate debris, the target debris comprising particles or pieces of the target material and the particulate debris comprising vaporized, atomized, and/or ionized particles of the target material.

19. A system comprising:
an optical source configured to emit an amplified optical beam;
a vacuum chamber positioned to receive the amplified optical beam at a plasma formation location in an interior of the vacuum chamber;
a target material supply system configured to provide a target comprising target material to the plasma formation location, wherein an interaction between the target and the amplified optical beam converts at least some of the target material to a light-emitting plasma;
a sensor system comprising:
a first sensor configured to detect least one wavelength of the amplified optical beam and to produce a first signal, the first signal comprising information related to the amplified optical beam;
a second sensor configured to detect at least some of the light emitted from the light-emitting plasma and to produce a second signal, the second signal comprising information related to the light-emitting

Assignees

• Asml Netherlands Bv

Inventors

• Purvis Michael Anthony
• Hummler Klaus Martin
• Ding Chengyuan
• Rafac Robert Jay
• Fomenkov Igor Vladimirovich

Classifications

• H05G2/0027 Primary

  Arrangements for controlling the supply; Arrangements for measurements · CPC title

• G03F7/70033 Primary

  by plasma extreme ultraviolet [EUV] sources · CPC title

• G03F7/7085

  Detection arrangement, e.g. detectors of apparatus alignment possibly mounted on wafers, exposure dose, photo-cleaning flux, stray light, thermal load · CPC title

• G03F7/70916

  Pollution mitigation, i.e. mitigating effect of contamination or debris, e.g. foil traps · CPC title

• G03F7/70525

  Controlling normal operating mode, e.g. matching different apparatus, remote control or prediction of failure · CPC title