Extreme ultraviolet light source

Patent metadata

Field	Value
Publication number	US-9357625-B2
Application number	US-201414325153-A
Country	US
Kind code	B2
Filing date	Jul 7, 2014
Priority date	Jul 7, 2014
Publication date	May 31, 2016
Grant date	May 31, 2016

Abstract

An initial pulse of radiation is generated; a section of the initial pulse of radiation is extracted to form a modified pulse of radiation, the modified pulse of radiation including a first portion and a second portion, the first portion being temporally connected to the second portion, and the first portion having a maximum energy that is less than a maximum energy of the second portion; the first portion of the modified pulse of radiation is interacted with a target material to form a modified target; and the second portion of the modified pulse of radiation is interacted with the modified target to generate plasma that emits extreme ultraviolet (EUV) light.

First claim

What is claimed is:

1. A method comprising:
generating an initial pulse of radiation comprising a first profile over a first time period, the first profile representing an energy of the initial pulse of radiation over the first time period;
extracting a section of the initial pulse of radiation, the extracted section of the initial pulse of radiation comprising a second profile over a second time period, the second profile representing an energy of the extracted section over the second time period, the second time period being within the first time period, the first profile being substantially the same as the second profile over the second time period and different from the second profile otherwise;
forming a modified pulse of radiation based on the extracted section of the initial pulse of radiation, the modified pulse of radiation comprising a first portion and a second portion, the first portion being temporally connected to the second portion, and the first portion having a maximum energy that is less than a maximum energy of the second portion;
interacting the first portion of the modified pulse of radiation with a target material to form a modified target; and
interacting the second portion of the modified pulse of radiation with the modified target to generate plasma that emits extreme ultraviolet (EUV) light.

2. The method of claim 1 , wherein forming a modified pulse of radiation comprises:
passing the modified pulse of radiation through a gain medium to form an amplified modified pulse of radiation, the gain medium amplifying the first portion of the modified pulse of radiation by a greater amount than the second portion of the modified pulse of radiation.

3. The method of claim 2 , wherein the gain medium comprises a small signal gain and a saturated gain, and the first portion of the modified pulse of radiation is amplified by the small signal gain, and the second portion of the modified pulse of radiation is amplified by the saturation gain.

4. The method of claim 1 , wherein extracting a section of the initial pulse of radiation comprises passing the initial pulse of radiation through a gating module that is configured to switch between at least a state that passes the initial pulse of radiation through the module and a state that blocks the initial pulse of radiation.

5. The method of claim 4 , wherein the gating module comprises an electro-optic gating module.

6. The method of claim 5 , wherein the electro-optic gating module comprises an electro-optic modulator comprising one or more polarizers.

7. The method of claim 1 , wherein the initial pulse of radiation comprises a pulse of light.

8. The method of claim 1 , wherein the initial pulse of radiation comprises a pulse carbon dioxide (CO 2 ) laser light.

9. The method of claim 1 , wherein the energy of the first portion of the modified pulse of radiation increases with time.

10. The method of claim 1 , wherein the first portion of the modified pulse of radiation has a duration of 50 nanoseconds (ns) or less.

11. The method of claim 1 , further comprising interacting a target with a first pulse of radiation to form the target material prior to interacting the first portion of the modified pulse of radiation with the target material.

12. The method of claim 11 , wherein the first pulse of radiation has a wavelength of 1 micron (μm).

13. A method of generating extreme ultraviolet (EUV) light, the method comprising:
generating an initial pulse of radiation, the initial pulse of radiation comprising a first profile over a first time period, the first profile representing an energy of the initial pulse of radiation over the first time period;
extracting a section of the initial pulse of radiation, the extracted section of the initial pulse of radiation comprising a second profile over a second time period, the second profile representing an energy of the extracted section over the second time period, the second time period being within the first time period;
forming a modified pulse of radiation based on the extracted section of the initial pulse of radiation, the modified pulse of radiation comprising a first portion and a second portion, the first portion being temporally connected to the second portion, and the first portion having a maximum energy that is less than a maximum energy of the second portion;
providing a target to a target location;
directing the modified pulse of radiation toward the target location;
interacting the first portion of the pulse of radiation with the target to form a modified target having a different absorption than the target; and
interacting the second portion of the pulse of radiation with the modified target to generate plasma that emits EUV light.

14. The method of claim 13 , wherein the modified target having a different absorption than the target comprises the modified target absorbing a greater amount of radiation than the target.

15. The method of claim 13 , wherein the target comprises a pre-expanded target, a spatial extent of the target being expanded in one dimension and reduced in a second dimension prior to being provided to the target location.

16. An extreme ultraviolet (EUV) system comprising:
a light source configured to emit a beam of light, the beam of light comprising a first profile that represents an energy of the beam of light over a first time period;
a modulator configured to receive the beam of light emitted from the light source and to extract a portion of the beam of light to form a modified beam of radiation based on the extracted portion of the beam of light, the extracted portion of the initial pulse of radiation comprising a second profile, the second profile representing an energy of the extracted portion over a second time period, the second time period being within the first time period, the first profile being substantially the same as the second profile over the second time period and different from the second profile otherwise; and
an amplifier comprising a gain medium, the amplifier configured to receive the extracted portion of the beam of light and to amplify the extracted portion with the gain medium into a pulse comprising a first portion and a second portion, the first portion and second portion being temporally connected, the first portion being amplified by a greater amount than the second portion, and the second portion comprising an energy sufficient to convert target material that emits EUV light when in a plasma state to the plasma state.

17. The EUV system of claim 16 , wherein the light source comprises a source that produces laser light.

18. The EUV system of claim 17 , wherein the light source comprises a pulsed carbon dioxide (CO 2 ) laser.

19. The EUV system of claim 16 , further comprising a second light source configured to produce a pulse of radiation comprising an energy sufficient to spatially expand a target material droplet to form the target that is positionable in the target location.

20. The EUV system of claim 16 , wherein the second light source emits a pulse of laser light that comprises light having a wavelength of 1.06 microns (μm).

21. The EUV system of claim 16 , wherein the light source configured to emit the beam of light is further configured to emit a pulse of laser light before emitting the beam of light, the pulse of laser light comprising an energy sufficient to spatially expand a target material droplet to form the target that is positionable in the target location.

22. The method of claim 1 ,

Assignees

• Asml Netherlands Bv

Inventors

• Tao Yezheng
• Stewart Iv John Tom
• Jur Jordan
• Laforge Andrew
• Brown Daniel
• Arcand Jason M
• Schafgans Alexander A
• Purvis Michael A

Classifications

• G03F7/70041

  by pulsed sources, e.g. multiplexing, pulse duration, interval control or intensity control · CPC title

• G03F7/70033

  by plasma extreme ultraviolet [EUV] sources · CPC title

• H05G2/003

  the plasma being generated from a material in a liquid or gas state · CPC title

• H05G2/008 Primary

  involving an energy-carrying beam in the process of plasma generation · CPC title

• H05G2/0088 Primary

  for preconditioning the plasma generating material · CPC title