Minimal thickness, low switching voltage magnetic free layers using an oxidation control layer and magnetic moment tuning layer for spintronic applications

Patent metadata

Field	Value
Publication number	US-11264560-B2
Application number	US-201916448362-A
Country	US
Kind code	B2
Filing date	Jun 21, 2019
Priority date	Jun 21, 2019
Publication date	Mar 1, 2022
Grant date	Mar 1, 2022

Abstract

A perpendicular magnetic tunnel junction is disclosed wherein first and second interfaces of a free layer (FL) with a first metal oxide (Hk enhancing layer) and second metal oxide (tunnel barrier), respectively, produce perpendicular magnetic anisotropy (PMA) to provide thermal stability to 400° C. Insertion of an oxidation control layer (OCL) such as Mg and a magnetic moment tuning layer (MMTL) like Mo or W enables FL thickness to be reduced below 10 Angstroms while providing sufficient PMA for a switching voltage substantially less than 500 mV at a 10 ns pulse width and 1 ppm defect rate. Magnetoresistive ratio is ≥1, and resistance×area (RA) product is below 5 ohm-μm 2 . Embodiments are provided where MMTL and OCL materials interface with each other, or do not contact each other. Each of the MMTL and OCL materials may be deposited separately, or at least one is co-deposited with the FL.

First claim

We claim:

1. A perpendicular magnetic tunnel junction (p-MTJ), comprising:
(a) a tunnel barrier layer that is a first metal oxide layer;
(b) a Hk enhancing layer that is a second metal oxide layer or a metal oxynitride layer;
(c) a free layer (FL) with a first surface that forms a first interface with the tunnel barrier layer, a second surface that forms a second interface with the Hk enhancing layer, wherein the FL consists of:
(1) one or more unoxidized magnetic materials;
(2) an oxidation control layer (OCL) material that is a metal or Mg alloy that getters oxygen; and
(3) a magnetic moment tuning layer (MMTL) material that is one or more metals where the OCL and MMTL materials form a third interface with each other; and

(d) a capping layer.

2. The p-MTJ of claim 1 wherein the OCL material is one of Mg, a Mg alloy, Ba, or Ca, and has a thickness of about 0.5 Angstrom to 10 Angstroms.

3. The p-MTJ of claim 1 wherein each of the OCL material and MMTL material form a continuous layer, a discontinuous layer, metal particles, or metal clusters.

4. The p-MTJ of claim 1 wherein the MMTL material is one or more of Nb, Mo, W, Re, Zr, Ru, Rh, Os, Ir, Zn, Pt, Pd, Ga, and Ge, and has a thickness from 0.25 Angstrom to 1.0 Angstrom.

5. The p-MTJ of claim 1 wherein the free layer is a single layer or a multilayer of one or more of Co, Fe, CoFe, CoFeB, CoB, FeB, CoFeNi, and CoFeNiB.

6. The p-MTJ of claim 1 wherein the free layer is comprised of a high Ku material having inherent PMA, which is a Heusler alloy that is Ni 2 MnZ, Pd 2 MnZ, Co 2 MnZ, Fe 2 MnZ, Co 2 FeZ, Mn 3 Ge, or Mn 2 Ga where Z is one of Si, Ge, Al, Ga, In, Sn, and Sb, or an ordered L1 0 or L1 1 material with a composition that is one of MnAl, MnGa, or RT wherein R is Rh, Pd, Pt, Ir, or an alloy thereof, and T is Fe, Co, Ni, or an alloy thereof, or a rare-earth alloy with a TbFeCo, GdCoFe, FeNdB, or SmCo composition.

7. The p-MTJ of claim 1 wherein the free layer has a first sub-layer (FL 1 ) with a thickness t 1 that forms the first interface, and a second sub-layer (FL 2 ) with a thickness t 2 that forms the second interface, and where a sum (t 1 +t 2 ) is from 5 Angstroms to 12 Angstroms.

8. The p-MTJ of claim 1 further comprising a seed layer formed on a substrate, and a pinned layer (PL) on the seed layer to yield a seed layer/PL/tunnel barrier layer/FL/Hk enhancing layer/capping layer configuration.

9. The p-MTJ of claim 1 further comprising a seed layer formed on a substrate, and a pinned layer (PL) on the tunnel barrier layer to yield a seed layer/Hk enhancing layer/FL/tunnel barrier layer/PL/capping layer configuration.

10. The p-MTJ of claim 1 wherein the Hk enhancing layer is a single layer or a laminate comprised of an oxide or oxynitride of one or more of Si, Sr, Ti, Ba, Ca, La, Al, Mn, V, and Hf, and has a resistance×area (RA) product less than a RA product of the tunnel barrier layer.

11. The p-MTJ of claim 1 wherein the capping layer is comprised of a metal nitride (MN) or metal oxynitride (MON) where M is one or more of Ti, V, Cr, Zr, Nb, Mo, Hf, Ta, W, and Si.

12. The p-MTJ of claim 7 wherein the OCL material and MMTL material form a stack of layers having an OCL 1 /MMTL/OCL 2 configuration on the FL 1 where the first OCL (OCL 1 ) contacts a top surface of the FL 1 , and the second OCL (OCL 2 ) adjoins a bottom surface of the FL 2 .

13. The p-MTJ of claim 7 wherein the OCL material and MMTL material form a stack of layers having an OCL/MMTL or MMTL/OCL configuration on the FL 1 where one of the OCL and MMTL materials contacts a top surface of the FL 1 , and the other of the OCL and MMTL materials adjoins a bottom surface of the FL 2 .

14. The p-MTJ of claim 7 wherein the OCL material is formed within each of the FL 1 and FL 2 , and the MMTL material is formed between the FL 1 and FL 2 .

15. The p-MTJ of claim 7 wherein both of the OCL and MMTL materials are formed within each of the FL 1 and FL 2 , and the OCL material is also formed between the FL 1 and FL 2 .

16. The p-MTJ of claim 7 wherein the OCL material is formed between the FL 1 and FL 2 , and the MMTL material is formed within each of the FL 2 and the OCL material.

17. The p-MTJ of claim 1 wherein the p-MTJ is incorporated in a magnetic random access memory (MRAM), spin transfer torque (STT)-MRAM, spin orbit torque (SOT)-MRAM, spin torque oscillator, Spin Hall Effect device, magnetic sensor, or a biosensor.

Assignees

• Headway Tech Inc

Inventors

• IWATA Jodi Mari
• Jan Guenole
• Guisan Santiago Serrano
• Thomas Luc
• Tong Ru-Ying

Classifications

• H10N50/85

  Materials of the active region · CPC title

• H01F10/3268

  the exchange coupling being asymmetric, e.g. by use of additional pinning, by using antiferromagnetic or ferromagnetic coupling interface, i.e. so-called spin-valve [SV] structure, e.g. NiFe/Cu/NiFe/FeMn · CPC title

• H01F10/3254 Primary

  the spacer being semiconducting or insulating, e.g. for spin tunnel junction [STJ] · CPC title

• H01F41/303

  with exchange coupling adjustment of magnetic film pairs, e.g. interface modifications by reduction, oxidation · CPC title

• H01F10/329

  Spin-exchange coupled multilayers wherein the magnetisation of the free layer is switched by a spin-polarised current, e.g. spin torque effect · CPC title