Anisotropic conductive adhesive bond in a piezoelectric micro-electro-mechanical system scanning mirror system

Patent metadata

Field	Value
Publication number	US-11163151-B2
Application number	US-201916415917-A
Country	US
Kind code	B2
Filing date	May 17, 2019
Priority date	May 17, 2019
Publication date	Nov 2, 2021
Grant date	Nov 2, 2021

Abstract

A piezoelectric MEMS scanning mirror system is provided. In particular, the efficiency and life of the system are improved by use of new bonding methods. Mechanical and electrical connections between the actuator frame of a piezoelectric MEMS scanning mirror system and the piezoelectric actuators in the system may be created using an anisotropic conductive adhesive. An anisotropic conductive adhesive only conducts electricity across the bond line between a lower portion of the piezoelectric actuator and a top of the metal frame. One way this is done is to provide a sparse loading of conductive particles. When the piezoelectric element is compressed against the frame, the conductive particles only form a conductive path across the bond line. Grit blasting, sanding, or chemical etching may be used to roughen the metal surface prior to bonding. A surface roughness between 2 RMS and 6 RMS may be created on the metal frame.

First claim

The invention claimed is:

1. A piezoelectric micro-electro-mechanical system (MEMS) scanning mirror system comprising:
an actuator frame comprising an electrically conductive material;
a piezoelectric actuator having a top electrode on a top surface of the piezoelectric actuator and a bottom electrode on a bottom surface of the piezoelectric actuator;
an anisotropic conductive adhesive layer between the bottom electrode of the piezoelectric actuator and a top surface of the actuator frame, wherein a conductive layer on the bottom surface of the piezoelectric actuator is electrically connected to the top surface of the actuator frame by the anisotropic conductive adhesive, and wherein the anisotropic conductive adhesive only conducts electricity in a direction perpendicular to the top surface of the actuator frame; and
a mirror assembly extending across a gap in a central mounting member of the actuator frame and attached with a structural adhesive via anchor portions of the mirror assembly to the top surface of the actuator frame.

2. The system of claim 1 , wherein the top surface of the actuator frame has a surface roughness greater than 2.2 RMS.

3. The system of claim 1 , wherein the top surface of the actuator frame has a surface roughness greater than 3 RMS.

4. The system of claim 1 , wherein the top surface of the actuator frame has a surface roughness greater than 5 RMS.

5. The system of claim 1 , wherein the top surface of the actuator frame has a surface roughness between 2 RMS and 6 RMS.

6. The system of claim 1 , wherein the top surface of the actuator frame comprises a material with a surface roughness less than 1 RMS when untreated.

7. The system of claim 1 , wherein the anisotropic conductive adhesive extends beyond a perimeter of the bottom electrode's actuator-frame facing surface.

8. The system of claim 1 , wherein the anisotropic conductive adhesive layer is greater than 100 microns thick.

9. A piezoelectric micro-electro-mechanical system (MEMS) scanning mirror system comprising:
an actuator frame comprising electrically conductive material;
a piezoelectric actuator;
an anisotropic conductive adhesive layer between a bottom of the piezoelectric actuator and a top surface of the actuator frame, wherein the anisotropic conductive adhesive only conducts electricity in a direction perpendicular to the top surface of the actuator frame; and
a mirror extending across a gap in a central mounting member of the actuator frame and coupled to the top surface of the actuator frame.

10. The system of claim 9 , wherein the anisotropic conductive adhesive extends beyond a perimeter of the bottom electrode's actuator-frame facing surface.

11. The system of claim 9 , wherein the anisotropic conductive adhesive layer is greater than 100 microns thick.

12. The system of claim 9 , wherein the top surface of the actuator frame comprises a material with a surface roughness less than 1 RMS when untreated.

13. The system of claim 9 , wherein a top surface of the actuator frame has a surface roughness between 2 RMS and 6 RMS after roughening.

14. A piezoelectric micro-electro-mechanical system (MEMS) scanning mirror system, the system comprising:
an actuator frame comprising electrically conductive material;
a piezoelectric actuator;
a conductive adhesive layer between a bottom of the piezoelectric actuator and a top surface of the actuator frame, wherein the anisotropic conductive adhesive only conducts electricity in a direction perpendicular to the top surface of the actuator frame; and
a mirror extending across a gap in a central mounting member of the actuator frame and coupled to the top surface of the actuator frame.

15. The system of claim 14 , wherein the conductive adhesive layer is an anisotropic conductive adhesive.

16. The system of claim 15 , wherein the anisotropic conductive adhesive layer is greater than 100 microns thick.

17. The system of claim 16 , wherein a top surface of the actuator frame has a surface roughness between 2 RMS and 6 RMS.

18. The system of claim 14 , wherein the top surface of the actuator frame comprises a material with a surface roughness less than 1 RMS when untreated.

Assignees

• Microsoft Technology Licensing Llc

Inventors

• Luizzi Joseph Michael
• Nystrom Michael James

Classifications

• G02B26/101

  with both horizontal and vertical deflecting means, e.g. raster or XY scanners (colour television using laser beams scanning a display screen H04N9/3129) · CPC title

• G02B26/105

  with one or more pivoting mirrors or galvano-mirrors (G02B26/101 takes precedence) · CPC title

• B81C3/001

  Bonding of two components · CPC title

• C09J9/02

  Electrically-conducting adhesives · CPC title

• G02B26/0858 Primary

  the reflecting means being moved or deformed by piezoelectric means · CPC title