Film forming apparatus and film forming method

Patent metadata

Field	Value
Publication number	US-11047044-B2
Application number	US-201715841084-A
Country	US
Kind code	B2
Filing date	Dec 13, 2017
Priority date	Dec 22, 2016
Publication date	Jun 29, 2021
Grant date	Jun 29, 2021

Abstract

A film forming apparatus includes: a substrate holding member for vertically holding target substrates at predetermined intervals in multiple stages; a process vessel for accommodating the substrate holding member; a processing gas introduction member each having gas discharge holes which discharge a processing gas for film formation in a direction parallel to each target substrate and introduce the processing gas into the process vessel; an exhaust mechanism for exhausting the interior of the process vessel; and a plurality of gas flow adjustment members installed to face the target substrates, respectively. Each of the gas flow adjustment members adjusts a gas flow of the processing gas discharged horizontally above each of the target substrates from the gas discharge holes of the processing gas introduction member, to be directed from above the respective target substrate located below the respective gas flow adjustment member toward the surface of the respective target substrate.

First claim

What is claimed is:

1. A film forming apparatus for forming a film on a surface of a target substrate, comprising:
a substrate holding member configured to hold a plurality of target substrates at predetermined intervals in multiple stages along a vertical direction;
a process vessel configured to accommodate the substrate holding member which holds the plurality of target substrates;
a processing gas introduction member each having a plurality of gas discharge holes configured to discharge a processing gas for film formation in a direction parallel to each of the plurality of target substrates accommodated in the process vessel and configured to introduce the processing gas into the process vessel;
an exhaust mechanism configured to exhaust the interior of the process vessel; and
a plurality of gas flow adjustment members alternately arranged with the plurality of target substrates held by the substrate holding member along the vertical direction to face the plurality of target substrates, respectively,
wherein each of the plurality of gas flow adjustment members is configured to adjust a gas flow of the processing gas discharged horizontally above each of the plurality of target substrates from the plurality of gas discharge holes of the processing gas introduction member, to be directed from above the respective target substrate located below the respective gas flow adjustment member toward the surface of the respective target substrate, and
wherein each of the plurality of gas flow adjustment members includes a ring-shaped member fit into a groove formed in the substrate holding member, a plate-like member mounted on the ring-shaped member to close an upper surface of the ring-shaped member, and a slit formed in the ring-shaped member so that the gas flow is directed to the surface of the target substrate located below the respective gas flow adjustment member through the slit.

2. The apparatus of claim 1 , further comprising a heater installed around the process vessel and configured to heat an interior of the process vessel to a predetermined temperature.

3. The apparatus of claim 1 , wherein the processing gas includes a raw material gas containing constituent elements of the film to be formed, and a reaction gas reacting with the raw material gas, and
the processing gas introduction member includes a first gas introduction member configured to introduce the raw material gas therethrough and a second gas introduction member configured to introduce the reaction gas therethrough.

4. The apparatus of claim 3 , wherein the film is formed by an ALD method that sequentially supplies the raw material gas and the reaction gas.

5. The apparatus of claim 4 , wherein the film is a high-k film.

6. The apparatus of claim 5 , wherein the film is an HfO 2 film.

7. A film forming method of forming a film on a surface of a target substrate using a film forming apparatus which includes a substrate holding member configured to hold a plurality of target substrates at predetermined intervals in multiple stages along a vertical direction, a process vessel configured to accommodate the substrate holding member that holds the plurality of target substrates, a processing gas introduction member having a plurality of gas discharge holes formed therein and for discharging a processing gas for film formation in parallel with the plurality of target substrates accommodated in the process vessel and configured to introduce the processing gas into the process vessel, an exhaust mechanism configured to exhaust an interior of the process vessel, and a plurality of gas flow adjustment members alternately arranged with the plurality of target substrates held by the substrate holding member along the vertical direction to face the plurality of target substrates, respectively, each of the plurality of gas flow adjustment members including a ring-shaped member fit into a groove formed in the substrate holding member, a plate-like member mounted on the ring-shaped member to close an upper surface of the ring-shaped member, and a slit formed in the ring-shaped member, the film forming method comprising,
adjusting a gas flow of the processing gas discharged horizontally above each of the plurality of target substrates from the plurality of gas discharge holes of the processing gas introduction member to be directed from above the respective target substrate located below the processing gas introduction member toward the surface of the respective target substrate; and
supplying the gas flow from the slit to the surface of the target substrate located below the respective gas flow adjustment member.

8. The method of claim 7 , wherein the processing gas includes a raw material gas containing constituent elements of the film to be formed and a reaction gas reacting with the raw material gas, and the film is formed on the surface of the target substrate by the reaction of the raw material gas with the reaction gas.

9. The method of claim 8 , wherein the film is formed by an ALD method that sequentially supplies the raw material gas and the reaction gas.

10. The method of claim 9 , wherein the film is a high-k film.

11. The method of claim 10 , wherein the film is an HfO 2 film.

Assignees

• Tokyo Electron Ltd

Inventors

• Takezawa Yoshihiro
• Sakashita Kuniyasu
• Nakajima Shigeru

Classifications

• H10P72/0434

  mainly by convection · CPC title

• H10P72/0402

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• H10P72/127

  characterised by the substrate support · CPC title

• H10P72/12

  Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements · CPC title

• H10P14/69392

  the material containing hafnium, e.g. HfO2 · CPC title