Film forming apparatus and film forming method
US-11047044-B2 · Jun 29, 2021 · US
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Patent family 62625845
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 62625845 |
| Family type | — |
| Earliest priority | Dec 22, 2016 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US11047044B2 — Film forming apparatus and film forming method |
Representative publication
Best representative member for this family based on priority and filing country.
US11047044B2 — Film forming apparatus and film forming method (published Jun 29, 2021)
Member publications
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Film forming apparatus and film forming method
US-2018179630-A1 · Jun 28, 2018 · US