Joined structural body of members, joining method of members, and package for containing an electronic component
US-9357644-B2 · May 31, 2016 · US
US11032914B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11032914-B2 |
| Application number | US-201716466817-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 22, 2017 |
| Priority date | Dec 23, 2016 |
| Publication date | Jun 8, 2021 |
| Grant date | Jun 8, 2021 |
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A method of forming a solderable solder deposit on a contact pad, comprising the steps of providing an organic, non-conductive substrate which exposes said contact pad under an opening of a first non-conductive resist layer, depositing a conductive layer inside and outside the opening such that an activated surface results, thereby forming an activated opening, electrolytically depositing nickel or nickel alloy into the activated opening such that nickel/nickel alloy is deposited onto the activated surface, electrolytically depositing tin or tin alloy onto the nickel/nickel alloy, with the proviso that the electrolytic deposition of later steps results in an entirely filled activated opening, wherein the entirely filled activated opening is completely filled with said nickel/nickel alloy, or in the entirely filled activated opening the total volume of nickel/nickel alloy is higher than the total volume of tin and tin alloy, based on the total volume of the entirely filled activated opening.
Opening claim text (preview).
The invention claimed is: 1. A method of forming a solderable solder deposit on a contact pad (B), comprising the steps of (i) providing an organic, non-conductive substrate (A) which exposes a first contact pad under a first opening in a first non-conductive resist layer (C), the first opening having a first maximum width, and at least a second contact pad under at least a second opening in the first non-conductive resist layer (C), the at least second opening having a second maximum width which is different from the first maximum width, (ii) depositing a conductive layer (G) inside (G″) and outside (G′) the first opening and the at least second opening such that an activated surface results, thereby forming an activated first opening and an activated at least second opening, (iii) electrolytically depositing nickel (D) or a nickel alloy (D) into the activated first opening and into the activated at least second opening such that a nickel or nickel alloy is deposited onto the activated surface, (iv) electrolytically depositing tin (E) or a tin alloy (E) onto the nickel or nickel alloy deposited in step (iii), with the proviso that the electrolytic deposition of steps (iii) or (iv) results in an entirely filled activated first opening and an entirely filled activated at least second opening, wherein the entirely filled activated first opening and the entirely filled activated at least second opening are completely filled with said nickel or nickel alloy, or in the entirely filled activated first opening and the entirely filled activated at least second opening the total volume of nickel or nickel alloy is higher than the total volume of tin and tin alloy, based on the total volume of the entirely filled activated first opening and the entirely filled activated at least second opening, and wherein the nickel or nickel alloy in step (iii) is deposited into the first opening and the at least second opening in a single step. 2. The method of claim 1 , wherein the organic, non-conductive substrate is a circuit board. 3. The method of claim 1 , wherein the first non-conductive resist layer exhibiting the first opening and the at least second opening has a layer thickness of 200 μm or less. 4. The method of claim 1 , wherein the first maximum width in step (i) is 1000 μm or less and the second maximum width is in the range from 5 μm to 80 μm. 5. The method of claim 1 , wherein the conductive layer has a layer thickness in the range of 200 nm to 2500 nm. 6. The method of claim 1 , wherein in step (iii) said nickel or nickel alloy is non-conformally deposited into the activated first opening and the activated at least second opening such that non-conformal nickel or nickel alloy is deposited onto the activated surface. 7. The method of claim 1 , wherein the nickel or nickel alloy in step (iii) is deposited through a nickel or nickel alloy plating bath comprising nickel ions in a total amount from 1 g/L to 160 g/L, based on the total volume of the nickel or nickel alloy plating bath. 8. The method of claim 7 , wherein the nickel or nickel alloy plating bath further comprises one or more than one leveler compound-selected from the group consisting of pyridine and substituted pyridine. 9. The method of claim 1 , wherein step (iv) is carried out directly after step (iii). 10. The method of claim 1 , wherein in step (iv) the tin (E) or tin alloy (E), respectively, is conformally deposited onto the nickel or nickel alloy deposited in step (iii). 11. The method of claim 1 , wherein in step (iv) the tin (E) or tin alloy (E) is electrolytically deposited through a deposition bath not containing a levelling compound. 12. The method of claim 1 of forming a solderable solder deposit on a contact pad, further comprising the steps of (iia) following step (ii) and before step (iii), forming outside the activated opening a second non-conductive resist layer, which is patterned, onto the activated surface such that an extended activated opening results, (iii) electrolytically, non-conformally depositing the nickel or nickel alloy into the extended activated opening such that the non-conformal nickel or nickel alloy is deposited onto the activated surface, (iv) electrolytically, conformally depositing the tin or tin alloy onto the non-conformal nickel or nickel alloy deposited in step (iii), with the proviso that the electrolytic deposition of step (iii) results in an entirely filled activated opening being completely filled with said nickel or nickel alloy, and said nickel or nickel alloy is additionally deposited onto the activated surface outside the activated opening. 13. The method of claim 1 , wherein after step (iv) no gold is deposited onto the tin or tin alloy. 14. The method of claim 7 , wherein the nickel or nickel alloy plating bath further comprises one or more than one leveler compound, selected from the group of leveler compounds consisting of compounds of Formula (II) wherein R 1 independently is hydrogen, substituted or unsubstituted alkyl, or substituted or unsubstituted alkenyl, R 2 independently is —(CH 2 ) n —SO 3 − , wherein n is 1, 2, 3, 4, 5, or 6, or —(CH 2 ) n —SO 3 − , wherein n is 1, 2, 3, 4, 5, or 6, and one or more than one hydrogen atom in —(CH 2 ) n —SO 3 − is substituted by a substituent. 15. The method of claim 7 , wherein the nickel or nickel alloy plating bath further comprises one or more than one leveler compound, selected from the group of leveler compounds consisting of compounds of Formula (IIa) wherein R 1 independently is —(CH 2 ) m —CH═CH 2 , wherein m is 0, 1, 2, 3, or 4, and R 2 independently is (CH 2 ) n —SO 3 − , wherein n is 1, 2, 3, or 4. 16. The method of claim 7 , wherein the nickel or nickel alloy plating bath further comprises one or more than one leveler compound of Formula (IIb) 17. The method of claim 7 , wherein the temperature of the nickel or nickel alloy plating bath is in the range from 15° C. to 50° C.
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