Extreme ultraviolet photoresist and method

Patent metadata

Field	Value
Publication number	US-11003076-B2
Application number	US-201916556435-A
Country	US
Kind code	B2
Filing date	Aug 30, 2019
Priority date	Nov 30, 2016
Publication date	May 11, 2021
Grant date	May 11, 2021

Abstract

Resist materials having enhanced sensitivity to radiation are disclosed herein, along with methods for lithography patterning that implement such resist materials. An exemplary resist material includes a polymer, a sensitizer, and a photo-acid generator (PAG). The sensitizer is configured to generate a secondary radiation in response to the radiation. The PAG is configured to generate acid in response to the radiation and the secondary radiation. The PAG includes a sulfonium cation having a first phenyl ring and a second phenyl ring, where the first phenyl ring is chemically bonded to the second phenyl ring.

First claim

What is claimed is:

1. A method comprising:
forming a resist material over a material layer, wherein the resist material includes a polymer, a sensitizer, and a photo-acid generator (PAG) that includes a cation and an anion, wherein the cation of the PAG includes a sulfur chemically bonded to a first phenyl ring and a second phenyl ring, and further wherein the cation of the PAG further includes an additional chemical group that is chemically bonded to the first phenyl ring and the second phenyl ring;
exposing the resist material to radiation and developing the resist material after the exposing to form a patterned resist material over the material layer; and
performing a fabrication process on the material layer using the patterned resist material as a mask.

2. The method of claim 1 , wherein the performing the fabrication process on the material layer includes etching the material layer using the patterned resist material as an etch mask.

3. The method of claim 2 , wherein the material layer is a hard mask layer and the etching the material layer using the patterned resist material as an etch mask forms a patterned hard mask, the method further comprising etching another material layer using the patterned hard mask as an etch mask.

4. The method of claim 1 , wherein the performing the fabrication process on the material layer includes performing an implantation process on the material layer using the patterned resist material as an implant mask.

5. The method of claim 1 , wherein the exposing the resist material to radiation implements an exposure dose less than about 20 mJ/cm 2 .

6. The method of claim 1 , wherein the polymer includes polyhydroxystyrene.

7. The method of claim 6 , wherein the resist material further includes at least one hydroxyl (OH) group chemically bonded to the polyhydroxystyrene.

8. The method of claim 1 , wherein the first phenyl ring includes a first carbon and a second carbon adjacent to the first carbon and the second phenyl ring includes a third carbon and a fourth carbon adjacent to the third carbon, the first carbon of the first phenyl ring and the third carbon of the second phenyl ring are chemically bonded to the sulfur, and the second carbon of the first phenyl ring and the fourth carbon of the second phenyl ring are chemically bonded to the additional chemical group.

9. The method of claim 1 , wherein the anion is sulfonyl hydroxide or fluoroalkyl sulfonyl hydroxide.

10. The method of claim 1 , further comprising performing a baking process on the resist material after the exposing and before the developing, wherein the baking process implements a temperature of about 120° C. to about 160° C.

11. A method comprising:
performing a spin-on coating process to form a resist material with enhanced sensitivity to extreme ultraviolet (EUV) radiation over a material layer, wherein the resist material includes a polymer, a sensitizer configured to generate a secondary radiation in response to the EUV radiation, and a photo-acid generator (PAG) configured to generate acid in response to the EUV radiation and the secondary radiation, wherein the PAG includes a sulfonium cation having a first phenyl ring and a second phenyl ring bonded to a sulfonium sulfur, wherein the first phenyl ring is further connected to the second phenyl ring through a chemical group separate from the sulfonium sulfur;
patterning the resist material to include a resist pattern that corresponds with an integrated circuit (IC) pattern, wherein the patterning includes exposing the resist material to EUV radiation, baking the resist material, and developing the resist material; and
performing a fabrication process on the material layer using the patterned resist material as a mask, wherein the material layer includes a material pattern that corresponds with the IC pattern after the fabrication process.

12. The method of claim 11 , wherein a first carbon of the first phenyl ring is directly chemically bonded to a second carbon of the second phenyl ring.

13. The method of claim 11 , wherein the first phenyl ring includes a first carbon, the second phenyl ring includes a second carbon, and the sulfonium cation further includes a third carbon that is chemically bonded to the first carbon and the second carbon, such that the third carbon connects the first phenyl ring to the second phenyl ring.

14. The method of claim 13 , wherein the sulfonium cation further includes at least one carbon chemically bonded to the third carbon.

15. The method of claim 11 , wherein the first phenyl ring includes a first carbon, the second phenyl ring includes a second carbon, and the sulfonium cation further includes a third carbon chemically bonded to the first carbon and a fourth carbon chemically bonded to the second carbon, wherein the third carbon is chemically bonded to the fourth carbon, such that the third carbon and the fourth carbon connect the first phenyl ring to the second phenyl ring.

16. The method of claim 15 , wherein the sulfonium cation further includes at least one carbon chemically bonded to the third carbon, at least one carbon chemically bonded to the fourth carbon, or both.

17. The method of claim 11 , wherein the fabrication process includes etching the material layer or implanting a dopant in the material layer.

18. A method comprising:
forming an extreme ultraviolet (EUV) resist material with enhanced sensitivity to EUV radiation over a material layer, the EUV resist material including a polymer, a sensitizer configured to generate electrons upon absorbing the EUV radiation, and a photo-acid generator (PAG) configured to generate acid upon absorbing the electrons, wherein the PAG includes a sulfur-comprising cation and a sulfur-comprising anion, wherein the sulfur-comprising cation includes a sulfur chemically bonded to a first phenyl ring and a second phenyl ring, and wherein the sulfur-comprising cation further includes a chemical group separate from the sulfur that is chemically bonded to the first phenyl ring and the second phenyl ring;
exposing the EUV resist material to patterned radiation, such that the EUV resist material includes exposed portions and unexposed portions;
baking the exposed EUV resist material; and
developing the exposed and baked EUV resist material, wherein the developing removes the exposed portions of the EUV resist material.

19. The method of claim 18 , wherein:
the polymer includes a poly(norbornene)-co-maleic anhydride (COMA) polymer, a polyhydroxystyrene (PHS) polymer, or an acrylate-based polymer;
the sensitizer includes PHS, poly-fluorostyrene, or poly-chlorostyrene;
the sulfur-comprising cation includes triphenylsulfonium; and
the sulfur-comprising anion includes sulfonyl hydroxide or a fluoroalkyl sulfonyl hydroxide.

20. The method of claim 18 , wherein:
the exposing implements an exposure dose less than about 20 mJ/cm 2 ;
the baking implements a temperature of about 120° C. to about 160° C.; and
the developing implements a tetramethyl ammonium hydroxide (TMAH) solution.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Chen Yen-Hao
• Lai Wei-Han
• Wang Chien-Wei
• Lin Chin-Hsiang

Classifications

• H10P76/2041

  Photolithographic processes · CPC title

• C07D337/10

  condensed with two six-membered rings · CPC title

• G03F7/16

  Coating processes; Apparatus therefor (applying coatings to base materials in general B05; applying photosensitive compositions to base for photographic purposes G03C1/74) · CPC title

• C07D337/16

  Eight-membered rings · CPC title

• C07C381/12

  Sulfonium compounds · CPC title