Extreme ultraviolet photoresist and method
US-11003076-B2 · May 11, 2021 · US
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Patent family 62190813
This patent family groups 6 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 62190813 |
| Family type | — |
| Earliest priority | Nov 30, 2016 |
| First filing country | US |
| Member publications | 6 |
| Countries | US |
| Representative publication | US11003076B2 — Extreme ultraviolet photoresist and method |
Representative publication
Best representative member for this family based on priority and filing country.
US11003076B2 — Extreme ultraviolet photoresist and method (published May 11, 2021)
Member publications
Related publications in this family.
Extreme Ultraviolet Photoresist and Method
US-2019384172-A1 · Dec 19, 2019 · US
Extreme ultraviolet photoresist and method
US-10401728-B2 · Sep 3, 2019 · US
Extreme Ultraviolet Photoresist and Method
US-2018341175-A1 · Nov 29, 2018 · US
Extreme ultraviolet photoresist and method
US-10042252-B2 · Aug 7, 2018 · US
Extreme Ultraviolet Photoresist and Method
US-2018149971-A1 · May 31, 2018 · US