Method for creating separation start portion for layered bodies, device for creating separation start portion, and electronic device manufacturing method
US-10173408-B2 · Jan 8, 2019 · US
US11001044B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11001044-B2 |
| Application number | US-201916704047-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 5, 2019 |
| Priority date | Jan 30, 2019 |
| Publication date | May 11, 2021 |
| Grant date | May 11, 2021 |
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A blade includes an edge to be pressed against an end portion of a carrier film to fold the end portion upwards from a sheet. A clamp mechanism peels the carrier film off from the sheet by moving while clamping the upwardly folded end portion of the carrier film.
Opening claim text (preview).
The invention claimed is: 1. A peel-off device comprising: a sheet table configured to suction a lamination sheet, the lamination sheet including a sheet laminated with a carrier film, the carrier film being a base layer, a surface of the sheet being a suction surface of the lamination sheet, and a surface of the carrier film being an exposed surface of the lamination sheet, the sheet table including a suction generating surface extending in a first direction and a chamfer portion with a tilted surface extending in a second direction different from the first direction so as to create a gap between the suction generating surface and the tilted surface of the chamfer portion; a blade including an edge configured to press against an end portion of the carrier film to fold the end portion upwards from the sheet at a position between the blade and the chamfer portion of the sheet table; and a clamp mechanism configured to peel the carrier film off of the sheet by moving while clamping the end portion of the upwardly folded carrier film. 2. The peel-off device according to claim 1 , further comprising: an elevator configured to lower the blade toward the exposed surface. 3. The peel-off device according to claim 1 , wherein an edge angle of the blade is within a range of 25° to 60°. 4. The peel-off device according to claim 1 , further comprising a controller configured to control the clamp mechanism, the controller being configured to perform: a parallel movement control operation including controlling the clamp mechanism to move in parallel to the exposed surface of the lamination sheet after the end portion of the carrier film is clamped by the clamp mechanism, and an oblique movement control operation including controlling the clamp mechanism to move away from the exposed surface in a tilted direction with respect to the exposed surface after performing the parallel movement control operation. 5. The peel-off device according to claim 4 , wherein: the clamp mechanism includes: a raising claw including a protrusion protruding in parallel to the exposed surface of the lamination sheet, and a clamping claw facing the raising claw and moveable relative to the raising claw, the controller is configured to perform a film raising control operation that causes peeling off of the carrier film from the sheet before performing the parallel movement control operation, and during the film raising control operation, the controller (i) positions the protrusion of the raising claw in a gap between the end portion of the carrier film and the sheet when the raising claw is spaced apart from the clamping claw, and (ii) reciprocates the raising claw in a parallel direction to the exposed surface of the lamination sheet. 6. The peel-off device according to claim 5 , further comprising an air nozzle configured to jet air into the gap between the end portion of the carrier film and the sheet during the film raising control operation. 7. The peel-off device according to claim 1 , wherein the blade is configured to fold the end portion upwards from the sheet with a force applied in a direction normal to the exposed surface and into the carrier film.
using vacuum or suction, e.g. Bernoulli chucks · CPC title
Apparatus for placing on an insulating substrate, e.g. tape · CPC title
Angles · CPC title
Cutting · CPC title
Using vacuum directly against work during delaminating · CPC title
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