Scanning probe microscope

Patent metadata

Field	Value
Publication number	US-10697997-B2
Application number	US-201616302759-A
Country	US
Kind code	B2
Filing date	Jun 2, 2016
Priority date	Jun 2, 2016
Publication date	Jun 30, 2020
Grant date	Jun 30, 2020

Abstract

When trace image data is obtained while a probe is used to scan a region on a sample in a forward direction and retrace image data is obtained while the same region is scanned in the reverse direction, a deviation information storage unit stores deviation detected by a deviation detection unit. This deviation is an indication of the difference between the distance between the probe and the sample and a target value for the distance at a given point in time. An image data selection unit compares the deviation during forward scanning and the deviation during reverse scanning for each measurement point, selects the image data obtained during scanning that has the smaller deviation, and stores the same to a storage region of an image data storage unit as selected image data.

First claim

The invention claimed is:

1. A scanning probe microscope comprising: a cantilever provided with a probe; and
a displacement detection unit for detecting displacement of the cantilever,
the scanning probe microscope configured to, in a state in which the probe is brought close to a surface of a sample, scan a measurement object region on the sample with the probe while performing feedback control of a spacing distance between the probe and the sample so that an interaction between the probe and the sample is kept constant based on the displacement detected by the displacement detection unit, to obtain a surface shape image of the region,
wherein the scanning probe microscope comprises:

a) a data obtaining unit for obtaining image data in a forward scanning and image data in a reverse scanning by moving a relative position of the probe and the sample so as to scan a predetermined one-dimensional region in the measurement object region on the sample in a forward direction and in a reverse direction, respectively;
b) a reference information obtaining unit for obtaining, as reference information, at least one of a deviation between a displacement amount obtained based on the displacement detection unit and a target value, and a signal value reflecting physical property information of the sample surface obtained based on the displacement amount in a control loop of the feedback control in obtaining the image data by the data obtaining unit; and
c) an image data selection processing unit for determining the image data corresponding to the measurement object region by executing, at each of measurement points in the measurement object region, a process of comparing the reference information obtained during the forward scanning and the reference information obtained during the reverse scanning at each measurement point, and selecting the image data obtained during scanning in which a reference value indicated by the reference information is the smaller between the forward scanning image data and the reverse scanning image data.

2. The scanning probe microscope according to claim 1 , wherein the reference information obtaining unit obtains, as the reference information, the deviation between the displacement amount obtained based on the displacement detection unit and the target value of the displacement amount.

3. The scanning probe microscope according to claim 1 , wherein sample surface shape observation is made by a dynamic mode, and
the reference information obtaining unit obtains, as the reference information, a deviation between a vibration amplitude of a detection signal obtained based on the displacement detection unit and a target value of the amplitude when the cantilever is vibrated at a predetermined frequency.

4. The scanning probe microscope according to claim 1 , wherein physical property information of the sample surface is obtained by a phase mode, and
the reference information obtaining unit obtains, as the reference information, a phase delay amount of a detection signal obtained based on the displacement detection unit relative to a vibration signal when the cantilever is vibrated at a predetermined frequency.

5. The scanning probe microscope according to claim 1 , wherein physical property information of the sample surface is obtained by a horizontal force mode, and the reference information obtaining unit obtains, as the reference information, displacement amount reflecting a degree of torsion of the cantilever obtained based on the displacement detection unit when the cantilever and the sample are relatively moved in a direction orthogonal to a longitudinal direction of the cantilever.

Assignees

• Shimadzu Corp

Inventors

• Arai Hiroshi

Classifications

• G01Q30/18

  Means for protecting or isolating the interior of a sample chamber from external environmental conditions or influences, e.g. vibrations or electromagnetic fields · CPC title

• G01Q20/02

  by optical means · CPC title

• G01Q10/06 Primary

  Circuits or algorithms therefor · CPC title

• G01Q30/06 Primary

  for error compensation · CPC title

• G01B5/20

  for measuring contours or curvatures · CPC title