Method of advancing a probe tip of a scanning microscopy device towards a sample surface, and device therefore

Patent metadata

Field	Value
Publication number	US-9766266-B2
Application number	US-201515306742-A
Country	US
Kind code	B2
Filing date	Apr 28, 2015
Priority date	Apr 28, 2014
Publication date	Sep 19, 2017
Grant date	Sep 19, 2017

Abstract

The invention is directed at a method of advancing a probe tip of a probe of a scanning microscopy device towards a sample surface. The scanning microscopy device comprises the probe for scanning the sample surface for mapping nanostructures on the sample surface. The probe tip of the probe is mounted on a cantilever arranged for bringing the probe tip in contact with the sample surface. The method comprises controlling, by a controller, an actuator system of the device for moving the probe to the sample surface, and receiving, by the controller, a sensor signal indicative of at least one operational parameter of the probe for providing feedback to perform said controlling. The method further comprises maintaining, during said controlling, an electric field between the sample surface and the probe tip, and evaluating the sensor signal indicative of the at least one operational parameter for determining an influence on said probe by said electric field, for determining proximity of the sample surface relative to the probe tip. The invention is further directed at a scanning microscopy device comprising a probe for scanning a sample surface for mapping nanostructures thereon.

First claim

The invention claimed is:

1. A method of advancing a probe tip of a probe of a scanning microscopy device towards a sample surface, the device comprising the probe for scanning the sample surface for mapping nanostructures on the sample surface, wherein the probe tip of the probe is mounted on a cantilever arranged for bringing the probe tip in contact with the sample surface, the method comprising:
controlling, by a controller, an actuator system of the device for moving the probe to the sample surface;
receiving, by the controller, a sensor signal indicative of at least one operational parameter of the probe for providing feedback to perform said controlling;
wherein the method further comprises:
maintaining, during said controlling, an electric field between the sample surface and the probe tip; and
evaluating the sensor signal indicative of the at least one operational parameter for determining an influence on said probe by said electric field, for determining proximity of the sample surface relative to the probe tip; and
wherein said step of evaluating further comprises comparing the sensor signal with a reference value and controlling said actuator system dependent on said comparison, further comprising a step of adjusting an electric field strength of the electric field dependent on said step of evaluating while the probe tip advances the substrate surface.

2. The method according to claim 1 , wherein the step of maintaining an electric field comprises maintaining a bias voltage difference V between the sample surface and the probe tip.

3. The method according to claim 1 , wherein the sensor signal comprises at least one of a group comprising: a probe tip deflection signal indicative of a deflection w of the probe tip from a reference position a 0 ; quality factor, damping, phase lag, phase, curvature measurement, interference, piezoresistivity, wavelength change of a ring resonator or waveguide integrated in the cantilever, and capacitive changes.

4. The method according to claim 3 , wherein the step of maintaining an electric field comprises maintaining a bias voltage difference V 0 between the sample surface and the probe tip, and wherein the sensor signal comprises the probe tip deflection signal, and wherein the step of evaluating comprises comparing the deflection w of the probe tip with a calculated deflection w c .

5. The method according to claim 4 , wherein the calculated deflection w c is obtained by solving and/or estimating a differential equation:

C
(

∂
4

⁢
w

∂

x
4

)

=

-

V
0
2

2
⁢

(

a
0

-
w

)

2

wherein C is a constant, said constant C including at least one or more properties of the probe.

6. The method according to claim 1 , wherein the step of controlling further comprises:
controlling, by the controller during said moving of the probe, the actuator system for applying an oscillator motion to the probe tip such as to oscillate the probe tip in a direction transverse to the sample surface; and
wherein the sensor signal is at least indicative of a parameter of said oscillator motion.

7. The method according to claim 6 , wherein the sensor signal comprises at least one of a group comprising: a probe amplitude signal, quality factor, damping, phase lag, phase, curvature measurement, interference, piezoresistivity, wavelength change of a ring resonator or waveguide integrated in the cantilever, and capacitive changes.

8. The method according to claim 6 , wherein the step of evaluating comprises determining said parameter of the oscillating motion from the sensor signal and comparing the determined parameter with a reference value for determining a deviation from the reference value.

9. The method according to claim 8 , wherein the method comprises, upon determining said deviation, reducing said bias voltage such as to diminish the deviation, and repeating the steps of controlling of the actuator system and receiving and evaluating of the sensor signal.

10. The method according to claim 9 , wherein the steps of reducing the bias voltage, controlling the actuator system, and receiving and evaluating the sensor signal are repeated until the bias voltage is reduced to zero.

11. The method of operating a scanning microscopy device for scanning of the sample surface for mapping of the nanostructures thereon, the method comprising a method of advancing a probe tip of a probe towards a sample surface in accordance with claim 1 .

12. A scanning microscopy device for mapping nanostructures on a sample surface of a sample, comprising at least one probe for scanning the sample surface, and an actuator system for moving the probe to and from the sample for approaching the sample surface, wherein the probe comprises a probe tip mounted on a cantilever arranged for bringing the probe tip in contact with the sample surface for enabling the scanning of the sample surface, the device further comprising:
a controller for controlling the actuator system of the device for moving the probe to the sample surface, said controller comprising input means communicatively connected to a sensor for receiving a sensor signal indicative of at least one operational parameter of the probe for providing feedback to perform said controlling; and
one or more electrodes for establishing and maintaining an electric field between the sample surface and the probe tip;
wherein the controller is further arranged for evaluating the sensor signal indicative of the at least one operational parameter for determining an influence on said probe by said electric field, for determining proximity of the sample surface relative to the probe tip;

the controller being arranged for performing said evaluating by comparing the sensor signal with a reference value and controlling said actuator system dependent on said comparison; and
wherein the controller is further arranged for adjusting an electric field strength of the electric field dependent on said step of evaluating while the probe tip advances the substrate surface.

13. The scanning microscopy device according to claim 12 , wherein the actuator system further comprises an oscillator stage, and wherein the controller is arranged for controlling, during moving of the probe towards the sample surface, the oscillator stage of the actuator system for applying an oscillator motion to the probe tip such as to oscillate the probe tip in a direction transverse to the sample surface, and wherein the sensor is arranged for providing a sen

Assignees

• Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno

Inventors

• Sadeghian Marnani Hamed
• Kramer Geerten Frans Ijsbrand
• Van Den Dool Teunis Cornelis

Classifications

• G01Q10/06 Primary

  Circuits or algorithms therefor · CPC title

• B82Y35/00

  Methods or apparatus for measurement or analysis of nanostructures · CPC title