Material for lithography, production method therefor, composition for lithography, pattern formation method, compound, resin, and method for purifying the compound or the resin
US-11852970-B2 · Dec 26, 2023 · US
US10689336B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10689336-B2 |
| Application number | US-201916439109-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 12, 2019 |
| Priority date | Nov 27, 2013 |
| Publication date | Jun 23, 2020 |
| Grant date | Jun 23, 2020 |
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The present invention involves a radical polymerization initiator comprising an organotellurium compound represented by a formula (1), wherein R 1 represents an alkyl group or the like, each of R 2 and R 3 independently represents a hydrogen atom or the like, and each of R 4 , R 5 , and R 6 independently represents a hydrogen atom or the like. The present invention provides: a radical polymerization initiator that is useful for producing a polymer that includes a double bond at the molecular terminal; and a method for producing a polymer that utilizes the radical polymerization initiator.
Opening claim text (preview).
The invention claimed is: 1. A method for producing a polymer comprising subjecting a radically polymerizable monomer to radical polymerization in a state in which a radical polymerization initiator is present in a polymerization system, wherein the radical polymerization initiator is an organotellurium compound represented by the following formula (1), wherein R 1 represents a group selected from: an alkyl group having 1 to 10 carbon atoms; a cycloalkyl group having 3 to 10 carbon atoms which is unsubstituted, or substituted with a substituent selected from a halogen atom, an alkyl group having 1 to 8 carbon atoms, an alkoxy group having 1 to 8 carbon atoms, an amino group, a nitro group, a cyano group, and —CORa (wherein Ra represents an alkyl group having 1 to 8 carbon atoms, a cycloalkyl group having 3 to 8 carbon atoms, an aryl group having 6 to 10 carbon atoms, an alkoxy group having 1 to 8 carbon atoms, an aryloxy group having 6 to 10 carbon atoms, or a haloalkyl group having 1 to 8 carbon atoms); an aryl group having 6 to 20 carbon atoms which is unsubstituted, or substituted with a substituent selected from a halogen atom, an alkyl group having 1 to 8 carbon atoms, an alkoxy group having 1 to 8 carbon atoms, an amino group, a nitro group, a cyano group, and —CORa (wherein Ra represents an alkyl group having 1 to 8 carbon atoms, a cycloalkyl group having 3 to 8 carbon atoms, an aryl group having 6 to 10 carbon atoms, an alkoxy group having 1 to 8 carbon atoms, an aryloxy group having 6 to 10 carbon atoms, or a haloalkyl group having 1 to 8 carbon atoms); and an aromatic heterocyclic group which is unsubstituted, or substituted with a substituent selected from a halogen atom, an alkyl group having 1 to 8 carbon atoms, an alkoxy group having 1 to 8 carbon atoms, an amino group, a nitro group, a cyano group, and —CORa (wherein Ra represents an alkyl group having 1 to 8 carbon atoms, a cycloalkyl group having 3 to 8 carbon atoms, an aryl group having 6 to 20 carbon atoms, an alkoxy group having 1 to 8 carbon atoms, an aryloxy group having 6 to 10 carbon atoms, or a haloalkyl group having 1 to 8 carbon atoms), each of R 2 and R 3 independently represents a group selected from: a hydrogen atom; an aliphatic hydrocarbon group having 1 to 10 carbon atoms; an aryl group having 6 to 20 carbon atoms which is unsubstituted, or substituted with a substituent selected from a halogen atom, an alkyl group having 1 to 8 carbon atoms, an alkoxy group having 1 to 8 carbon atoms, an amino group, a nitro group, a cyano group, and —CORa (wherein Ra represents an alkyl group having 1 to 8 carbon atoms, a cycloalkyl group having 3 to 8 carbon atoms, an aryl group having 6 to 10 carbon atoms, an alkoxy group having 1 to 8 carbon atoms, an aryloxy group having 6 to 10 carbon atoms, or a haloalkyl group having 1 to 8 carbon atoms); an aromatic heterocyclic group which is unsubstituted, or substituted with a substituent selected from a halogen atom, an alkyl group having 1 to 8 carbon atoms, an alkoxy group having 1 to 8 carbon atoms, an amino group, a nitro group, a cyano group, and —CORa (wherein Ra represents an alkyl group having 1 to 8 carbon atoms, a cycloalkyl group having 3 to 8 carbon atoms, an aryl group having 6 to 10 carbon atoms, an alkoxy group having 1 to 8 carbon atoms, an aryloxy group having 6 to 10 carbon atoms or a haloalkyl group having 1 to 8 carbon atoms); a halogen atom; a carboxyl group; a hydrocarbyl oxycarbonyl group having 2 to 10 carbon atoms; a cyano group; and an amide group, and each of R 4 , R 5 and R 6 independently represents a group selected from: a hydrogen atom; an aliphatic hydrocarbon group having 1 to 10 carbon atoms; an aryl group having 6 to 20 carbon atoms which is unsubstituted, or substituted with a substituent selected from a halogen atom, an alkyl group having 1 to 8 carbon atoms, an alkoxy group having 1 to 8 carbon atoms, an amino group, a nitro group, a cyano group, and —CORa (wherein Ra represents an alkyl group having 1 to 8 carbon atoms, a cycloalkyl group having 3 to 8 carbon atoms, an aryl group having 6 to 10 carbon atoms, an alkoxy group having 1 to 8 carbon atoms, an aryloxy group having 6 to 10 carbon atoms, or a haloalkyl group having 1 to 8 carbon atoms); an aromatic heterocyclic group which is unsubstituted, or substituted with a substituent selected from a halogen atom, an alkyl group having 1 to 8 carbon atoms, an alkoxy group having 1 to 8 carbon atoms, an amino group, a nitro group, a cyano group, and —CORa (wherein Ra represents an alkyl group having 1 to 8 carbon atoms, a cycloalkyl group having 3 to 8 carbon atoms, an aryl group having 6 to 10 carbon atoms, an alkoxy group having 1 to 8 carbon atoms, an aryloxy group having 6 to 10 carbon atoms, or a haloalkyl group having 1 to 8 carbon atoms); a halogen atom; a carboxyl group; a hydrocarbyl oxycarbonyl group having 2 to 10 carbon atoms; a cyano group; and an amide group, and a group represented by the following formula (2), wherein 2 groups selected from R 2 to R 6 may bond together to form a ring other than an aromatic ring, wherein R 7 represents a group selected from: an alkyl group having 1 to 10 carbon atoms; a cycloalkyl group having 3 to 10 carbon atoms which is unsubstituted, or substituted with a substituent selected from a halogen atom, an alkyl group having 1 to 8 carbon atoms, an alkoxy group having 1 to 8 carbon atoms, an amino group, a nitro group, a cyano group, and —CORa (wherein Ra represents an alkyl group having 1 to 8 carbon atoms, a cycloalkyl group having 3 to 8 carbon atoms, an aryl group having 6 to 10 carbon atoms, an alkoxy group having 1 to 8 carbon atoms, an aryloxy group having 6 to 10 carbon atoms, or a haloalkyl group having 1 to 8 carbon atoms); an aryl group having 6 to 20 carbon atoms which is unsubstituted, or substituted with a substituent selected from a halogen atom, an alkyl group having 1 to 8 carbon atoms, an alkoxy group having 1 to 8 carbon atoms, an amino group, a nitro group, a cyano group, and —CORa (wherein Ra represents an alkyl group having 1 to 8 carbon atoms, a cycloalkyl group having 3 to 8 carbon atoms, an aryl group having 6 to 10 carbon atoms, an alkoxy group having 1 to 8 carbon atoms, an aryloxy group having 6 to 10 carbon atoms, or a haloalkyl group having 1 to 8 carbon atoms); and an aromatic heterocyclic group which is unsubstituted, or substituted with a substituent selected from a halogen atom, an alkyl group having 1 to 8 carbon atoms, an alkoxy group having 1 to 8 carbon atoms, an amino group, a nitro group, a cyano group, and —CORa (wherein Ra represents an alkyl group having 1 to 8 carbon atoms, a cycloalkyl group having 3 to 8 carbon atoms, an aryl group having 6 to 20 carbon atoms, an alkoxy group having 1 to 8 carbon atoms, an aryloxy group having 6 to 10 carbon atoms, or a haloalkyl group having 1 to 8 carbon atoms), and each of R 8 and R 9 independently represents a group selected from: a hydrogen atom; an aliphatic hydrocarbon group having 1 to 10 carbon atoms; an aryl group having 6 to 20 carbon atoms which is unsubstituted, or substituted with a substituent selected from a halogen atom, an alkyl group having 1 to 8 carbon atoms, an alkoxy group having 1 to 8 carbon atoms, an amino group, a nitro group, a cyano group, and —CORa (wherein Ra represents an alkyl group having 1 to 8 carbon atoms, a cycloalkyl group having 3 to 8 carbon atoms, an aryl group having 6 to 10 carbon atoms, an alkoxy group having 1 to 8 carbon atoms, an aryloxy group having 6 to 10 carbon atoms, or a haloalkyl group having 1 to 8 ca
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