Sputtering apparatus, film deposition method, and control device

Patent metadata

Field	Value
Publication number	US-10636634-B2
Application number	US-201815971479-A
Country	US
Kind code	B2
Filing date	May 4, 2018
Priority date	Jun 25, 2010
Publication date	Apr 28, 2020
Grant date	Apr 28, 2020

Abstract

A sputtering apparatus according to one embodiment of the present invention includes a substrate holder, a cathode unit arranged at a position diagonally opposite to the substrate holder, a position sensor for detecting a rotational position of the substrate, and a holder rotation controller for adjusting a rotation speed of the substrate according to the detected rotational position. The holder rotation controller controls the rotation speed so that the rotation speed of the substrate when the cathode unit is located on a side in a first direction as an extending direction of a process target surface of the relief structure is lower than the rotation speed of the substrate when the cathode unit is located on a side in a second direction which is perpendicular to the first direction along the rotation of the substrate.

First claim

The invention claimed is:

1. A film deposition method using sputtering comprising the steps of:
placing a substrate having a plurality of relief structures, each relief structure having four side surfaces that include two side surfaces parallel to a first direction, formed thereon, on a rotatable substrate holder; and
forming a film on the two side surfaces of the relief structure by sputtering a sputtering target arranged at a position diagonally opposite to the substrate holder, while rotating the substrate,
wherein the step of forming includes the steps of:
detecting a rotational position of the two side surfaces of the relief structure of the substrate held on the substrate holder; and
adjusting a rotation speed of the substrate according to the detected rotational position, and

wherein the step of adjusting includes controlling the rotation speed of the substrate so that the rotation speed of the substrate when the sputtering target is located on a side in the first direction which is parallel to the two side surfaces of the relief structure and is parallel to an in-plane direction of the substrate is lower than the rotation speed of the substrate when the sputtering target is located on a side in a second direction which is perpendicular to the first direction and is parallel to the in-plane direction of the substrate.

2. A film deposition method using sputtering comprising the steps of:
placing a substrate having a plurality of relief structures, each relief structure having four side surfaces that include two side surfaces parallel to a first direction, formed thereon, on a rotatable substrate holder; and
forming a film on the two side surfaces of the relief structure by sputtering a sputtering target arranged at a position diagonally opposite to the substrate holder, while discontinuously rotating the substrate,
wherein the step of forming includes the steps of:
detecting a rotational position of the two side surfaces of the relief structure of the substrate held on the substrate holder; and
adjusting rotation stop time for the substrate according to the detected rotational position, and

wherein the step of adjusting includes controlling the rotation stop time for the substrate so that the rotation stop time for the substrate when the sputtering target is located on a side in the first direction which is parallel to the two side surfaces of the relief structure and is parallel to an in-plane direction of the substrate is longer than the rotation stop time for the substrate when the sputtering target is located on a side in a second direction which is perpendicular to the first direction and is parallel to the in-plane direction of the substrate.

3. A film deposition method using sputtering comprising the steps of:
placing a substrate having a plurality of relief structures, each relief structure having four side surfaces that include two side surfaces parallel to a first direction, formed thereon, on a rotatable substrate holder; and
forming a film on the two side surfaces of the relief structure by sputtering a sputtering target arranged at a position diagonally opposite to the substrate holder with plasma generated by supplying power to a cathode unit, while rotating the substrate,
wherein the step of forming includes the steps of:
detecting a rotational position of the two side surfaces of the relief structure of the substrate held on the substrate holder; and
adjusting the power supplied to the cathode according to the detected rotational position, and

wherein the step of adjusting includes adjusting the power supplied to the cathode unit so that the power supplied to the cathode unit when the sputtering target is located on a side in the first direction which is parallel to the two side surfaces of the relief structure and is parallel to an in-plane direction of the substrate is greater than the power supplied to the cathode unit when the sputtering target is located on a side in a second direction which is perpendicular to the first direction and is parallel to the in-plane direction of the substrate.

Assignees

• Canon Anelva Corp

Inventors

• Tsunekawa Koji
• Suenaga Masahiro
• Konno Takeo

Classifications

• C23C14/505

  for rotation of the substrates · CPC title

• C23C14/54

  Controlling or regulating the coating process · CPC title

• H01J37/3435

  Target holders (includes backing plates and endblocks) · CPC title

• G11B5/3906

  Details related to the use of magnetic thin film layers or to their effects · CPC title

• C23C14/542

  Controlling the film thickness or evaporation rate · CPC title