Sputtering apparatus, film deposition method, and control device
US-10636634-B2 · Apr 28, 2020 · US
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Patent family 45371237
This patent family groups 4 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 45371237 |
| Family type | — |
| Earliest priority | Jun 25, 2010 |
| First filing country | US |
| Member publications | 4 |
| Countries | US |
| Representative publication | US10636634B2 — Sputtering apparatus, film deposition method, and control device |
Representative publication
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US10636634B2 — Sputtering apparatus, film deposition method, and control device (published Apr 28, 2020)
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