Characterizing a height profile of a sample by side view imaging

Patent metadata

Field	Value
Publication number	US-10488434-B2
Application number	US-201816047316-A
Country	US
Kind code	B2
Filing date	Jul 27, 2018
Priority date	Aug 11, 2017
Publication date	Nov 26, 2019
Grant date	Nov 26, 2019

Abstract

A scanning probe microscope, in particular an atomic force microscope, for analyzing a sample by moving a probe and the sample relative to one another, wherein the scanning probe microscope includes a detection unit with a side view camera arranged and configured for detecting an image of the sample in a substantially horizontal side view, and a determining unit for determining information indicative of a profile of at least part of a surface of the sample based on the detected image.

First claim

We claim:

1. A scanning probe microscope, in particular an atomic force microscope, for analysing a sample by moving a probe and the sample relative to one another, the scanning probe microscope comprising:
a detection unit which comprises a side view camera arranged and configured for detecting an image of the sample in a substantially horizontal side view,
wherein the side view camera is arranged and configured for additionally monitoring a gap between the sample and the probe in a substantially horizontal side view;
a determining unit for determining information indicative of a profile of at least part of a surface of the sample based on the detected image,
wherein the determining unit is configured for determining information of at least one of the group consisting of determining multiple height values from a shadow image of the sample, and determining a three dimensional surface function of at least part of the sample.

2. The scanning probe microscope according to claim 1 , wherein the determining unit is configured for determining information indicative of the profile by combining, in particular by correlating, multiple images of the sample detected by the detection unit from different positions and/or orientations relative to the sample.

3. The scanning probe microscope according to claim 2 , wherein the detection unit is configured for detecting the multiple images of the sample by:
multiple cameras of the detection unit arranged at different spatial positions and/or in different spatial orientations relative to the sample; and/or
configuring at least one camera of the detection unit and the sample for being moved relative to one another to different positions and/or different spatial orientations.

4. The scanning probe microscope according to claim 1 , wherein the determining unit is configured for determining the information by at least one of the group consisting of:
determining information indicative of the profile from a detected image of the sample on which a predefined light pattern is projected;
determining information indicative of the profile from a detected image of the sample by carrying out at least one of pattern recognition and object recognition;
analyzing multiple detected images of the sample in terms of a three-dimensional reconstruction of a height profile of at least part of the sample.

5. The scanning probe microscope according to claim 1 , further comprising:
a processing unit configured for processing the determined information to thereby determine at least one of:
at least one non-reachable region of the sample being not reachable by the probe in view of the profile of the sample;
control information for controlling the probe and the sample to move relative to one another to an initial profile-related position for subsequently analyzing the sample;
control information for controlling the probe and the sample to move relative to one another along a profile-adapted trajectory during analyzing the sample.

6. The scanning probe microscope according to claim 1 , wherein the image in the substantially horizontal side view is detected at an angle of less than 5° to a horizontal axis.

7. The scanning probe microscope according to claim 1 , further comprising:
an optical system arranged at least partially between the sample and the detection unit.

8. The scanning probe microscope according to claim 7 , comprising at least one of the following features:
wherein the optical system is a telecentric optical system, in particular a telecentric optical system providing a magnification independent of a distance between a measurement point of interest of the sample and the side view camera;
wherein the optical system is a telecentric optical system, in particular a telecentric optical system providing a magnification independent of a distance between a gap between the sample and the probe on the one hand and the side view camera on the other hand.

9. The scanning probe microscope according to claim 1 , further comprising:
an illumination unit configured for illuminating at least one of a side projection of the sample, and a gap between the sample and the probe with electromagnetic radiation from a substantially horizontal side position.

10. The scanning probe microscope according to claim 1 , wherein the detection unit comprises a wide view camera arranged and configured for detecting a wide view image of at least part of the sample from a top position or from an oblique position.

11. The scanning probe microscope according to claim 1 , wherein the detection unit comprises a microscope arranged and configured for detecting a subportion of the sample from a top position or from an oblique position.

12. The scanning probe microscope according to claim 1 , wherein the determining unit is configured for reconstructing the profile of the sample by combining at least one image captured by the side view camera and corresponding to a projection of the sample on a vertical plane with at least one further image captured by at least one further camera and corresponding to a projection of the sample on another plane.

13. A method of analyzing a sample by a scanning probe microscope, in particular an atomic force microscope, the method comprising:
detecting an image of the sample using a side view camera in a substantially horizontal side view, wherein the side view camera is arranged and configured for additionally monitoring a gap between the sample and the probe in the substantially horizontal side view;
determining information indicative of a profile of at least part of a surface of the sample based on the detected image,
hereby determining information of at least one of the group consisting of determining multiple height values from a shadow image of the sample, and determining a three dimensional surface function of at least part of the sample;
analyzing the sample by moving the probe and the sample relative to one another taking into account the determined information.

Assignees

• Anton Paar Gmbh

Inventors

• Godec-Schönbacher Martin
• Gomez-Casado Alberto
• Koller Daniel
• Brandner Markus

Classifications

• G01Q60/38

  Probes, their manufacture, or their related instrumentation, e.g. holders · CPC title

• G01Q10/06

  Circuits or algorithms therefor · CPC title

• G01B11/24 Primary

  for measuring contours or curvatures · CPC title

• G01B11/0608

  Height gauges · CPC title

• G01Q20/02 Primary

  by optical means · CPC title