Automation for rotary sorters

Patent metadata

Field	Value
Publication number	US-10406562-B2
Application number	US-201715708943-A
Country	US
Kind code	B2
Filing date	Sep 19, 2017
Priority date	Jul 21, 2017
Publication date	Sep 10, 2019
Grant date	Sep 10, 2019

Abstract

In one example, a sorting unit includes a sorting system and a plurality of bins into which substrates are sorted. The sorting unit includes a bin handler having a first end effector for receiving one bin of the plurality of bins, and second end effector for disposing an empty bin in the previous location of the received bin. In one example, a method of operating a sorting unit is also provided.

First claim

What is claimed is:

1. A sorting unit, comprising:
a sorting system;
a plurality of bins arranged in a circular configuration into which substrates are sorted by the sorting system; and
a bin handler having a first end effector for receiving one bin of the plurality of bins, and second end effector for disposing an empty bin in the previous location of the received bin, wherein the bin handler is configured to move the first end effector and the second end effector in an arcuate path.

2. The sorting unit of claim 1 , wherein the arcuate path of the first end effector and the second end effector is radially outward of the circular configuration of the plurality of bins.

3. The sorting unit of claim 2 , wherein the first end effector and the second end effector are configured to move simultaneously around the arcuate path.

4. A sorting unit, comprising:
a sorting system;
a plurality of bins into which substrates are sorted by the sorting system; and
a bin handler having a first end effector for receiving one bin of the plurality of bins, and second end effector for disposing an empty bin in the previous location of the received bin, wherein the bin handler includes a rotating horizontal cross bar and a vertical coupling member extending from the horizontal cross bar, the first end effector and the second end effector coupled to a distal end of the vertical coupling member.

5. The sorting unit of claim 4 , wherein the sorting system comprises a rotatable support having a plurality of substrate grippers coupled thereto, the substrate grippers positioned vertically above the plurality of bins.

6. The sorting unit of claim 5 , further comprising a linear conveyor positioned beneath the rotatable support.

7. An inspecting system, comprising:
a loading unit;
a modular unit including one or more metrology stations; and
a sorting unit, comprising:
a sorting system;
a plurality of bins arranged in a circular configuration into which substrates are sorted by the sorting system; and
a bin handler having a first end effector for receiving one bin of the plurality of bins, and second end effector for disposing an empty bin in the previous location of the received bin wherein the bin handler is configured to move the first end effector and the second end effector in an arcuate path.

8. The inspection system of claim 7 , further comprising a linear conveyor extending from the loading unit, through the modular unit, and to the sorting unit.

9. The inspection system of claim 7 , wherein the arcuate path of the first end effector and the second end effector is radially outward of the circular configuration of the plurality of bins.

10. The inspection system of claim 9 , wherein the first end effector and the second end effector are configured to move simultaneously around the arcuate path.

11. An inspecting system, comprising:
a loading unit;
a modular unit including one or more metrology stations; and
a sorting unit, comprising:
a sorting system;
a plurality of bins into which substrates are sorted by the sorting system; and

a bin handler having a first end effector for receiving one bin of the plurality of bins, and second end effector for disposing an empty bin in the previous location of the received bin, wherein the bin handler includes a rotating horizontal cross bar and a vertical coupling member extending from the horizontal cross bar, the first end effector and the second end effector coupled to a distal end of the vertical coupling member.

12. The inspection system of claim 11 , wherein the sorting system comprises a rotatable support having a plurality of substrate grippers coupled thereto, the substrate grippers positioned vertically above the plurality of bins.

13. A method of operating a sorting unit, comprising:
sorting a plurality of substrates into a respective bin of a plurality of bins arranged in a circular configuration, based on inspection criteria;
determining that one of the bins of the plurality of bins is in a full or near-full state;
in response to the determination, engaging an empty bin with a first end effector of a bin handler, and moving the bin handler with the empty bin adjacent to the full or near-full bin;
engaging the full or near-full bin with a second end effector of the bin handler; and
replacing the full or near-full bin with the empty bin.

14. The method of claim 13 , further comprising positioning the full or near-full bin on a conveyor.

15. The method of claim 14 , wherein the engaging the empty bin comprises removing the empty bin from the conveyor.

16. The method of claim 13 , further comprising rotating the first end effector and the second end effector prior to engaging the full or near-full bin.

17. A method of operating a sorting unit, comprising:
sorting a plurality of substrates into a respective bin of a plurality of bins based on inspection criteria;
determining that one of the bins of the plurality of bins is in a full or near-full state;
in response to the determination, engaging an empty bin with a first end effector of a bin handler, and moving the bin handler with the empty bin adjacent to the full or near-full bin, wherein the bin handler includes a rotating horizontal cross bar and a vertical coupling member extending from the horizontal cross bar, the first end effector and a second end effector coupled to a distal end of the vertical coupling member;
engaging the full or near-full bin with the second end effector of the bin handler; and
replacing the full or near-full bin with the empty bin.

Assignees

• Applied Materials Inc

Inventors

• Stopper Markus J
• Schlezinger Asaf

Classifications

• H10P72/3402

  Mechanical parts of transfer devices · CPC title

• H10P72/34

  the wafers being stored in a carrier, involving loading and unloading · CPC title

• B07C5/36 Primary

  Sorting apparatus characterised by the means used for distribution {(sorting according to destination B07C3/003, B07C3/02)} · CPC title

• H10P72/3412

  Batch transfer of wafers · CPC title

• H10P72/3218

  Conveying cassettes, containers or carriers · CPC title