Linked vacuum processing tools and methods of using the same

Patent metadata

Field	Value
Publication number	US-9147592-B2
Application number	US-201313961538-A
Country	US
Kind code	B2
Filing date	Aug 7, 2013
Priority date	Aug 8, 2012
Publication date	Sep 29, 2015
Grant date	Sep 29, 2015

Abstract

In some embodiments, a linked processing tool system is provided that includes (1) a first processing tool having at least a first transfer chamber configured to couple to a plurality of processing chambers; (2) a second processing tool having at least a second transfer chamber configured to couple to a plurality of processing chambers; (3) a third transfer chamber coupled between the first and second processing tools and configured to transfer substrates between the first and second processing tools; and (4) a single sequencer that controls substrate transfer operations between the first processing tool, the second processing tool and the third transfer chamber of the linked processing tool system. Numerous other aspects are provided.

First claim

The invention claimed is:

1. A linked processing tool system comprising:
a first processing tool having at least a first transfer chamber configured to couple to a plurality of processing chambers;
a second processing tool having at least a second transfer chamber configured to couple to a plurality of processing chambers;
a third transfer chamber coupled between the first and second processing tools and configured to transfer substrates between the first and second processing tools;
a first via coupling the first transfer chamber of the first processing tool directly to the third transfer chamber;
a second via coupling the second transfer chamber of the second processing tool directly to the third transfer chamber;
a third via coupling the first transfer chamber of the first processing tool directly to the second transfer chamber of the second processing tool, the via bypassing the third transfer chamber; and
a single sequencer that controls substrate transfer operations between the first processing tool, the second processing tool and the third transfer chamber of the linked processing tool system.

2. The linked processing tool system of claim 1 wherein the first and second processing tools each include two transfer chambers.

3. The linked processing tool system of claim 1 further comprising a third processing tool wherein the third transfer chamber is a transfer chamber of the third processing tool.

4. The linked processing tool system of claim 1 further comprising at least one of a degas chamber and a pre-clean chamber coupled to the third transfer chamber and wherein the third transfer chamber serves as a buffer chamber between the first and second processing tools.

5. The linked processing tool system of claim 4 wherein the first and second transfer chambers are maintained at a vacuum level of about 10 −6 Torr or less.

6. The linked processing tool system of claim 1 further comprising at least four transfer chambers maintained at a high vacuum level.

7. The linked processing tool system of claim 1 wherein the first, second, and third vias are maintained at a high vacuum level.

8. The linked processing tool system of claim 7 wherein at least one of the vias includes an aligner configured to re-orient a substrate as it travels between the processing tools.

9. The linked processing tool system of claim 1 further comprising a supplemental pump coupled to at least one of the first and second transfer chambers.

10. A linked processing tool system comprising:
a first processing tool having at least a first transfer chamber configured to couple to a plurality of processing chambers;
a second processing tool having at least a second transfer chamber configured to couple to a plurality of processing chambers;
a third transfer chamber that couples to the first and second processing tools in a side-by-side U-shaped configuration;
wherein the first and second processing tools each form a respective parallel side of the U-shaped configuration and have a service aisle there between.

11. The linked processing tool system of claim 10 wherein the first and second processing tools each include two transfer chambers.

12. The linked processing tool system of claim 10 further comprising two additional transfer chambers each coupled to the third transfer chamber and to one of the first and second processing tools.

13. The linked processing tool system of claim 10 further comprising at least one of a degas chamber and a pre-clean chamber coupled to the third transfer chamber.

14. The linked processing tool system of claim 10 further comprising a sequencer that controls substrate transfer operations between the first processing tool, the second processing tool and the third transfer chamber of the linked processing tool system.

15. The linked processing tool system of claim 10 wherein the first and second processing tools and the third transfer chamber are coupled with one or more vias and wherein at least one of the vias includes an aligner configured to re-orient a substrate as it travels between the processing tools.

16. A linked processing tool system comprising:
a first processing tool having a first transfer chamber and a second transfer chamber each configured to couple to a plurality of processing chambers;
a second processing tool having a third transfer chamber and a fourth transfer chamber each configured to couple to a plurality of processing chambers;
a third processing tool having a fifth transfer chamber and a sixth transfer chamber each configured to couple to a plurality of processing chambers;
a first via coupling the second transfer chamber of the first processing tool to the third transfer chamber of the second processing tool;
a second via coupling the second transfer chamber of the first processing tool to the fourth transfer chamber of the second processing tool;
a third via coupling the fifth transfer chamber of the third processing tool to the third transfer chamber of the second processing tool;
a fourth via coupling the fifth transfer chamber of the third processing tool to the fourth transfer chamber of the second processing tool;
wherein the third transfer chamber of the second processing tool serves as a buffer chamber configured to retrieve substrates from a factory interface and transfer the substrates to the second transfer chamber of the first processing tool; and
wherein the first, second and third processing tools are configured so that substrates transferred from the third transfer chamber into the second transfer chamber are isolated from the third transfer chamber and transferred between and processed within processing chambers coupled to the first transfer chamber, second transfer chamber, fourth transfer chamber, fifth transfer chamber and sixth transfer chamber while under vacuum and isolated from the third transfer chamber.

17. The linked processing tool system of claim 16 further comprising at least one of a degas chamber and a pre-clean chamber coupled to the third transfer chamber.

18. The linked processing tool system of claim 16 wherein the first, second, fourth, fifth and sixth transfer chambers are maintained at a high vacuum level.

19. The linked processing tool system of claim 16 wherein at least one of the vias includes an aligner configured to re-orient a substrate as it travels between the processing tools.

20. The linked processing tool system of claim 16 further comprising a sequencer that controls substrate transfer operations between the first, second, third, fourth, fifth, and sixth transfer chambers of the linked processing tool system.

Assignees

• Applied Materials Inc

Inventors

• Englhardt Eric A
• Szudarski Steve
• Cornelius Andrew Scott
• Puri Amitabh
• Rice Michael Robert
• Hudgens Jeffrey C
• Sansoni Steven V
• Decottignies Robert Irwin
• Hruzek Dean C
• Irwin Peter
• Merry Nir

Classifications

• H10P72/0461

  characterised by the presence of two or more transfer chambers · CPC title

• H10P72/0452 Primary

  characterised by the layout of the process chambers · CPC title

• H10P72/33 Primary

  into and out of processing chamber · CPC title

• H01L21/67184

  Electricity · mapped topic

• H01L21/67161

  Electricity · mapped topic