Integrated systems for interfacing with substrate container storage systems

Patent metadata

Field	Value
Publication number	US-9842756-B2
Application number	US-201414537696-A
Country	US
Kind code	B2
Filing date	Nov 10, 2014
Priority date	May 18, 2009
Publication date	Dec 12, 2017
Grant date	Dec 12, 2017

Abstract

A storage system and methods for operating a storage system are disclosed. The storage system includes a plurality of storage shelves, and each of storage shelves has a shelf plate for supporting a container. Each of the storage shelves is coupled to a chain to enable horizontal movement and each is further coupled to a rail to enable guiding to one or more positions. A motor is coupled to a drive sprocket for moving the chain. The rail has some sections that are linear and some sections that are nonlinear. The sections are arranged in a loop. Example configurations of the storage system include one or more of stationary shelves, extended horizontal tracks for a hoist, a conveyor at a level of the storage system, and a manual loading station. The hoist, with an extended horizontal track interfaces with the manual loading station.

First claim

What is claimed is:

1. A storage system comprising:
(a) a frame of the storage system located above a frame of an assembly of a tool;
(b) a base plate connected to the frame of the storage system, the base plate is connected to a rotating mechanism driven by a motor, the base plate is oriented to define a horizontal plane, wherein the base plate is located below the motor;
(c) a plurality of storage shelves coupled to the rotating mechanism for horizontal movement of the storage shelves, each of the storage shelves has a shelf plate with a plurality of shelf features for supporting a container;
wherein the storage shelves move together to one or more positions; and
(d) an active port assembly connected to the frame of the storage system, the active port assembly having a port plate, the port plate having a plurality of port features, the port plate positioned at one of the positions, the active port assembly further including:
(i) a horizontal motion assembly defining an extended position outside of the frame of the storage system and a retracted position inside the frame of the storage system; and
(ii) a vertical motion assembly coupled to the port plate, the vertical motion assembly defining an up position and a down position, the vertical motion assembly being coupled to the horizontal motion assembly;
wherein the down position places the port plate below one of the shelf plates;
wherein the up position places the port plate above the one of the shelf plates.

2. The storage system as recited in claim 1 , further comprising a stationary shelf coupled to the frame of the storage system for supporting the container or another container, the stationary shelf for delivery of a container or another container from an overhead transport vehicle.

3. The storage system as recited in claim 2 , wherein the stationary shelf extends in a direction of a load port of the tool.

4. The storage system as recited in claim 2 , wherein the stationary shelf is non-retractable with respect to the frame of the storage system.

5. The storage system as recited in claim 1 , further comprising a stationary shelf coupled to the frame of the storage system for supporting the container or another container, the stationary shelf used for facilitating pickup of the container or another container by an overhead transport vehicle.

6. The storage system as recited in claim 5 , wherein the stationary shelf extends in a direction of a load port of the tool.

7. The storage system as recited in claim 5 , wherein the stationary shelf is non-retractable with respect to the frame of the storage system.

8. The storage system as recited in claim 1 ,
wherein the frame of the storage system extends along a hoist linear drive, along a portion of the tool, and along a portion of an additional tool,
the frame of the storage system located below the hoist linear drive, the hoist linear drive connected to a transfer hoist for driving the transfer hoist in a linear direction along the hoist linear drive, the transfer hoist used to transfer the container between the tool and the additional tool or between the tool and an overhead transfer vehicle or between the additional tool and the overhead transfer vehicle.

9. The storage system as recited in claim 8 , wherein the additional tool is located beside the tool.

10. The storage system as recited in claim 8 , wherein the transfer hoist is for transferring the container from the tool to the port plate, or from the additional tool to the port plate, or from the port plate to the tool, or from the port plate to the additional tool, or for transferring the container or another container between the tool and the additional tool via the port plate.

11. The storage system as recited in claim 1 , wherein the frame of the storage system is positioned at least partially over the tool and at least partially over an adjacent tool, the frame of the storage system located below a linear drive coupled to a hoist, the hoist sliding over the tool and the adjacent tool so that the container in the storage system is exchanged with either the tool or the adjacent tool or an overhead transfer vehicle.

12. The storage system as recited in claim 1 , wherein the container is to be transferred between the port plate when in the extended position and an overhead transport vehicle, wherein the overhead transport vehicle is attached to an overhead transport rail, wherein the overhead transport rail is attached to a ceiling of a room.

13. The storage system of claim 1 , wherein the extended position facilitates a transfer of the container between the port plate and a transfer hoist, wherein the transfer hoist is coupled to a hoist linear drive for moving in a linear direction along the hoist linear drive, wherein the hoist linear drive is connected to the frame of the storage system, wherein the frame of the storage system is located above a loading station, wherein the loading station is located adjacent to the frame of the tool for receiving the container from the port plate via the transfer hoist or for transferring the container to the port plate via the transfer hoist.

14. A storage system comprising:
(a) a frame of the storage system located above a frame of an assembly of a tool, the tool used for processing a substrate;
(b) a base plate connected to the frame of the storage system, the base plate is located under a rotating mechanism and below a motor, the base plate is oriented to define a horizontal plane; and
(c) a plurality of storage shelves, each of the plurality of storage shelves has a shelf plate for supporting a container, and each of the storage shelves being coupled to the rotating mechanism to enable guiding of the storage shelves to one or more positions in a horizontal motion,
wherein the frame of the storage system includes an inner portion and an outer side, wherein the rotating mechanism and the motor are contained within the inner portion of the frame of the storage system;
(d) an input stationary shelf located above the frame of the tool and attached to the outer side at one end of the frame of the storage system for supporting a container or another container;
(e) an output stationary shelf located above the frame of the tool and attached to the outer side at another end of the frame of the storage system for supporting a container or another container.

15. The storage system of claim 14 , wherein the input stationary shelf is configured for delivery of a container from an overhead transport vehicle or pickup of a container by a hoist coupled to the frame of the storage system, and the output stationary shelf is configured for pickup of a container by the overhead transport vehicle or drop-off of a container by the hoist.

16. The storage system of claim 14 , wherein the outer side includes a length and a width, the input stationary shelf located at a position along the width.

17. The storage system of claim 14 , wherein the outer side includes a length and a width, the input stationary shelf located at a position along the length.

18. The storage system of claim 14 , further comprising a port plate that is coupled to the frame of the storage system, wherein the input stationary shelf facilitates a transfer of a container from an overhead transport vehicle to the input stationary shelf, wherein the overhead transport vehicle extends from an overhead transport rail coupled to a ceiling of a room, wherein the frame of the storage system is coupled to a transfer hoist, wherein the transfer hoist is configured for pickup of a container from the input stati

Assignees

• Brooks Automation Inc

Inventors

• Bonora Anthony C
• Gould Richard H
• Krolak Michael

Classifications

• H10P72/3408

  Docking arrangements · CPC title

• H10P72/3404

  Storage means · CPC title

• H10P72/3222

  Loading to or unloading from a conveyor · CPC title

• H10P72/3221

  Overhead conveying · CPC title

• H10P72/3402 Primary

  Mechanical parts of transfer devices · CPC title