Information processing device, substrate processing device, and information processing method
US-2024302817-A1 · Sep 12, 2024 · US
US8948908B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8948908-B2 |
| Application number | US-201113819561-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 25, 2011 |
| Priority date | Sep 13, 2010 |
| Publication date | Feb 3, 2015 |
| Grant date | Feb 3, 2015 |
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Official abstract text for this publication.
A clean stocker includes: a reticle rotatable rack separately storing reticles and a pod; an empty pod rotatable rack; a manual load port supplying to an operator a pod including a reticle; a pod-with-reticle rotatable rack temporarily storing the pod including the reticle; a detecting unit detecting an instruction sent from the operator; a pod opener for, when a first instruction is detected, obtaining (i) a reticle from the reticle rotatable rack and (ii) an empty pod from the empty pod rotatable rack, and placing the obtained reticle into the empty pod; and a pod transporting apparatus (i) putting on the pod-with-reticle rotatable rack the pod including the reticle, and (ii) when a second instruction is detected, transporting the pod including the reticle from the pod-with-reticle rotatable rack to the manual load port.
Opening claim text (preview).
The invention claimed is: 1. An automated warehouse comprising: a storage rack which separately stores articles and a case for containing at least one of the articles; a load port which supplies to an operator the at least one article contained in the case; a temporary storage rack which temporarily stores the at least one article contained in the case until the at least one article is transported to the load port; a placing apparatus which, when a first instruction from the…
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