Footed pressure measuring device

Patent metadata

Field	Value
Publication number	US-10288510-B2
Application number	US-201615579095-A
Country	US
Kind code	B2
Filing date	Jun 1, 2016
Priority date	Jun 3, 2015
Publication date	May 14, 2019
Grant date	May 14, 2019

Abstract

A pressure measuring device comprising a bracket supporting a pressure sensor which defines a first sealed enclosure with a first face of the bracket, with the pressure measuring device comprising a substrate having opposite faces, opposite which a first deformable membrane and a second deformable membrane respectively extend, with the first membrane and the second membrane respectively defining with the substrate a second sealed enclosure and a third sealed membrane, with the pressure sensor comprising a cover in order to define a fourth sealed enclosure connected through a second channel to the first enclosure, with the pressure sensor comprising means for measuring the deformation of the first and the second deformable membranes.

First claim

The invention claimed is:

1. A pressure measuring device comprising a bracket supporting a pressure sensor which defines a first sealed enclosure with a first face of the bracket, with the bracket having a second face from which a mounting foot protrudes, with a first channel extending at least into the foot to open into the first enclosure, with the pressure measuring device comprising a substrate having opposite faces, opposite which a first deformable membrane and a second deformable membrane respectively extend, with the first membrane and the second membrane extending at a distance from the substrate while defining therewith a second sealed enclosure and a third sealed enclosure, with the pressure sensor comprising a cover extending opposite the second membrane in order to define a fourth sealed enclosure connected through a second channel to the first enclosure, with the pressure sensor comprising means for measuring the deformation of the first and the second deformable membranes.

2. The device according to claim 1 , wherein the means for measuring the deformation of the membrane comprise a pair of first electrodes each extending on one face of the substrate and opposite which a second electrode integral with the first deformable membrane and a third electrode integral with the second deformable membrane respectively extend.

3. The device according to claim 1 , wherein the second channel extends through a periphery of the first deformable membrane of the substrate and of the second deformable membrane.

4. The device according to claim 1 , wherein the cover comprises a processing unit for delivering an electric signal according to the distances from the first electrodes to the second and the third electrodes.

5. The device according to claim 1 , wherein the second and third sealed enclosures have a substantially null absolute pressure.

6. The device according to claim 1 , wherein the outer surface of the device comprises a parylene coating.

7. The device according to claim 1 , wherein the outer surface of the device comprises a carbon coating of the DLC type.

8. The device according to claim 1 , wherein the second face of the bracket is so arranged as to cooperate with end stops.

9. The device according to claim 1 , wherein the bracket and the membranes comprise a peripheral annular bulge having a flat junction portion at their upper and lower parts, with the substrate being connected to the membranes by assembling flat portions of the respective periphery thereof and the bracket being connected with the first membrane by assembling the respective periphery thereof.

Assignees

• Safran Electronics & Defense

Inventors

• Riou Jean-Christophe
• Bailly Eric

Classifications

• G01L19/147

  Details about the mounting of the sensor to support or covering means · CPC title

• G01L19/14

  Housings {(G01L19/0007, G01L19/0084, G01L19/0092, G01L19/04, G01L19/06 take precedence)} · CPC title

• G01L19/06

  Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa · CPC title

• G01L9/0048 Primary

  Details about the mounting of the diaphragm to its support or about the diaphragm edges, e.g. notches, round shapes for stress relief · CPC title

• G01L9/0072 Primary

  using variations in capacitance · CPC title