Pad removal device and method

Patent metadata

Field	Value
Publication number	US-10272661-B2
Application number	US-201715488958-A
Country	US
Kind code	B2
Filing date	Apr 17, 2017
Priority date	Apr 17, 2017
Publication date	Apr 30, 2019
Grant date	Apr 30, 2019

Abstract

A pad removal device includes a pad guide having a first end and a second end along a first direction, an actuator attached to the first end, and a control assembly coupled to the actuator. The control assembly is configured to cause the actuator to move the first end toward the second end along the first direction, and the pad guide is configured to extend in a second direction perpendicular to the first direction by an amount dependent on a distance between the first end and the second end.

First claim

What is claimed is:

1. A pad removal device comprising:
a pad guide having a first end and a second end along a first direction and a central portion between the two ends wherein the central portion is free of any affixing components;
at least one affixing component attached only to a periphery of the pad guide;
an actuator attached to the first end; and
a control assembly coupled to the actuator, the control assembly configured to cause the actuator to move the first end toward the second end along the first direction,
wherein the pad guide is configured to extend in a second direction perpendicular to the first direction by an amount dependent on a distance between the first end and the second end.

2. The pad removal device of claim 1 , wherein the pad guide comprises a clipper at each of the first end and the second end, and each clipper is configured to affix the pad guide to a chemical mechanical planarization (CMP) polishing pad.

3. The pad removal device of claim 1 , wherein the pad guide comprises at least one of a plurality of hinged plate segments or an elastic plate.

4. The pad removal device of claim 1 , wherein the actuator comprises one of a telescoping arm or a moveable stage.

5. The pad removal device of claim 1 , wherein the control assembly comprises one of a screw device or a pneumatic controller.

6. The pad removal device of claim 1 , wherein the control assembly comprises a winding device and the actuator comprises a wire.

7. The pad removal device of claim 1 , wherein the control assembly is configured to control a speed at which the actuator moves the first end toward the second end.

8. The pad removal device of claim 7 , wherein the speed includes a predetermined value and the control assembly comprises a controller configured to cause the actuator to move the first end toward the second end at the predetermined value.

9. The pad removal device of claim 7 , wherein the control assembly comprises a user interface configured to receive a value of the speed.

10. The pad removal device of claim 1 , wherein the control assembly comprises a carrier.

11. The pad removal device of claim 1 , further comprising another actuator, wherein the control assembly is
coupled to the another actuator, and
configured to cause the another actuator to move the second end toward the first end along the first direction.

12. A method of removing a pad, the method comprising:
affixing a first end of a pad guide to a first pad edge location;
affixing a second end of the pad guide to a second pad edge location;
pulling the first end toward the second end using an actuator; and
using the pad guide, in response to the pulling the first end toward the second end, pulling each of the first pad edge location and the second pad edge location in a removal direction away from a pad center region.

13. The method of claim 12 , further comprising pulling the second end toward the first end using another actuator.

14. The method of claim 12 , further comprising, using a controller, controlling a speed at which the actuator pulls the first end toward the second end.

15. The method of claim 14 , wherein controlling the speed comprises increasing the speed as a distance between the first end and the second end decreases.

16. The method of claim 14 , wherein controlling the speed comprises controlling the speed using one of a screw device, a pneumatic controller, or a winding device.

17. The method of claim 12 , wherein:
the pad guide comprises a plurality of plate segments, and
the pulling each of the first pad edge location and the second pad edge location in the removal direction comprises a first segment of the plurality of plate segments rotating about a hinge relative to a second segment of the plurality of plate segments.

18. The method of claim 12 , wherein the pulling the first end toward the second end using the actuator comprises reducing a length of a telescoping arm.

19. The method of claim 12 , further comprising:
affixing a first end of a second pad guide to a third pad edge location;
affixing a second end of the second pad guide to a fourth pad edge location;
pulling the first end of the second pad guide toward the second end of the second pad guide using another actuator; and
using the second pad guide, in response to the pulling the first end of the second pad guide and the second end of the second pad guide toward each other, pulling each of the third pad edge location and the fourth pad edge location in the removal direction.

20. A pad removal device comprising:
a pad guide comprising
a plurality of plate segments joined by a corresponding plurality of hinges; and
a first end and a second end along a first direction;

a first telescoping arm attached to the first end;
a second telescoping arm attached to the second end; and
a control assembly configured to simultaneously reduce a length of the first telescoping arm and a length of the second telescoping arm,
wherein the pad guide is configured to extend in a second direction perpendicular to the first direction by an amount dependent on an amount of the reduction of the length of the first telescoping arm and an amount of the reduction of the length of the second telescoping arm.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Chen Chunhung
• Wang Sheng-Chen

Classifications

• Y10T156/1168

  Gripping and pulling work apart during delaminating · CPC title

• B24B37/34 Primary

  Accessories · CPC title

• Y10T156/1978

  Delaminating bending means · CPC title

• Y10T156/1989

  Corner edge bending delaminating means · CPC title

• B32B2307/538

  Roughness · CPC title