Method and apparatus of operating a scanning probe microscope

Patent metadata

Field	Value
Publication number	US-10197596-B2
Application number	US-201715806103-A
Country	US
Kind code	B2
Filing date	Nov 7, 2017
Priority date	Nov 13, 2008
Publication date	Feb 5, 2019
Grant date	Feb 5, 2019

Abstract

Methods and apparatuses are provided for automatically controlling and stabilizing aspects of a scanning probe microscope (SPM), such as an atomic force microscope (AFM), using Peak Force Tapping (PFT) Mode. In an embodiment, a controller automatically controls periodic motion of a probe relative to a sample in response to a substantially instantaneous force determined, and automatically controls a gain in a feedback loop. A gain control circuit automatically tunes a gain based on separation distances between a probe and a sample to facilitate stability. Accordingly, instability onset is quickly and accurately determined during scanning, thereby eliminating the need of expert user tuning of gains during operation.

First claim

We claim:

1. A method for determining an occurrence of parachuting of a probe of a scanning probe microscope operating in an oscillating mode, the method comprising:
providing relative motion between a probe and a sample and controlling that motion using a feedback loop that generates a feedback error signal in peak force tapping (PFT) mode;
detecting at least one of a peak force, an adhesion force and a peak-to-peak force on the probe; and
determining one of a group including: a) whether the peak force, the adhesion force or the peak-to-peak force within an oscillation period of the relative motion is less than a threshold value, b) a point at which the feedback error signal is between two threshold values indicating the peak force is about zero, and c) whether the standard deviation and/or spectrum amplitude, at a certain frequency or selected frequencies, of the feedback error signal is less than a threshold value which indicates that the feedback loop is open.

2. The method of claim 1 , further comprising, after determining an occurrence of parachuting, returning the probe to the sample by moving at least one of the probe and the sample.

3. The method of claim 2 , further comprising moving the probe toward the sample when the feedback error signal is negative.

4. The method of claim 1 , further comprising, after determining an occurrence of parachuting, disabling an automatic gain control for maintaining an interaction between the probe and the sample during the period of parachuting.

5. A scanning probe microscope (SPM) comprising:
an actuator that generates relative motion between a probe and a sample; and
a controller configured to control that motion using a feedback loop that generates a feedback error signal in PFT mode,
wherein the controller detects at least one of a peak force, an adhesion force and a peak-to-peak force on the probe, and
wherein the controller determines one of a group including: a) whether the peak force, the adhesion force or the peak-to-peak force within an oscillation period of the relative motion that is less than a threshold value, b) a point at which the feedback error signal is between two threshold values indicating the peak force is about zero, and c) whether the standard deviation and/or spectrum amplitude, at a certain frequency or selected frequencies, of the feedback error signal is less than a threshold value which indicates that the feedback loop is open.

6. The scanning probe microscope of claim 5 , wherein, after determining an occurrence of parachuting, the controller returns the probe to the sample by moving at least one of the probe and the sample.

7. The scanning probe microscope of claim 6 , wherein the controller moves the probe toward the sample when the feedback error signal is negative.

8. The scanning probe microscope of claim 5 , wherein, after determining an occurrence of parachuting, the controller disables an automatic gain control for maintaining an interaction between the probe and the sample during the period of parachuting.

9. A method of operating a scanning probe microscope (SPM), the method comprising:
providing relative motion between a probe and a sample; and
detecting a parachuting probe relative to the sample while controlling the motion in PFT mode.

10. The method of claim 9 , wherein the detecting step includes determining when a feedback error signal is less than a threshold value.

11. The method of claim 10 , wherein the determining step includes using one of a standard deviation and a spectrum amplitude at at least one frequency of the feedback error signal.

12. The method of claim 9 , wherein the detecting step includes determining when at least one of a group including peak force, adhesion force, and a peak-to-peak force within an oscillation period is less than a threshold value.

Assignees

• Bruker Nano Inc

Inventors

• Shi Jian
• Hu Yan
• Hu Shuiqing
• Ma Ji
• Su Chanmin

Classifications

• G01Q60/34

  Tapping mode · CPC title

• G01Q60/30

  Scanning potential microscopy · CPC title

• B82Y35/00

  Methods or apparatus for measurement or analysis of nanostructures · CPC title

• G01Q20/02

  by optical means · CPC title

• G01Q60/32

  AC mode · CPC title