Dual-probe scanning probe microscope

Patent metadata

Field	Value
Publication number	US-10197595-B2
Application number	US-201615077599-A
Country	US
Kind code	B2
Filing date	Mar 22, 2016
Priority date	Mar 15, 2013
Publication date	Feb 5, 2019
Grant date	Feb 5, 2019

Abstract

An apparatus and method of positioning a probe of an atomic force microscope (AFM) includes using a dual probe configuration in which two probes are fabricated with a single base, yet operate independently. Feedback control is based on interaction between the reference probe and surface, giving an indication of the location of the surface, with this control being modified based on the difference in tip heights of the two probes to allow the sensing probe to be positioned relative to the sample at a range less than 10 nm.

First claim

What is claimed is:

1. An atomic force microscope (AFM) comprising:
a first probe including a tip having a first height, h 1 ;
a second probe including a tip having a second height, h 2 , wherein a mechanical path between the first probe and a sample and the second probe and the sample is the same, and wherein a linear offset between the tips of the first and second probes is less than 500 nm;
a controller that controls, using a known difference in the heights of the first and second probe tips, an actuator coupled to the first and second probes in response to the deflection of the first probe;
wherein h 1 >h 2 ; and
wherein the first probe has a Tapping Mode AFM resonant frequency, f 1 , that is different than a Tapping Mode AFM resonant frequency, f 2 , of the second probe, wherein f 1 is less than f 2 .

2. The AFM of claim 1 , wherein the first probe and the second probe share a common base.

3. The AFM of claim 1 , wherein the first probe is a reference probe operated in a DC AFM Mode, and the second probe is an imaging probe operated in an AC AFM Mode.

4. The AFM of claim 1 , wherein a difference between the first height and the second height is less than about 20 nm.

5. The AFM of claim 1 , wherein the linear offset is less than 200 nm.

6. An atomic force microscope (AFM) comprising:
a first probe including a tip having a first height, h 1 ;
a second probe including a tip having a second height, h 2 , wherein a mechanical path between the first probe and a sample and the second probe and the sample is the same, and wherein a linear offset “O” between the tips of the first and second probes is less than 200 nm;
a controller that controls, based on a known difference, δ, in the heights of the first and second probe tips, an actuator coupled to the first and second probes in response to the deflection of the first probe;
wherein h 1 >h 2 ; and
wherein the first probe has a first resonance frequency, f 1 , and the second probe has a second resonance frequency, f 2 , and f 1 is less than f 2 .

Assignees

• Bruker Nano Inc

Inventors

• Su Chanmin

Classifications

• B82Y35/00

  Methods or apparatus for measurement or analysis of nanostructures · CPC title

• G01Q10/065 Primary

  Feedback mechanisms, i.e. wherein the signal for driving the probe is modified by a signal coming from the probe itself · CPC title

• G01Q60/32

  AC mode · CPC title

• G01Q70/06

  Probe tip arrays · CPC title

• G01Q60/36

  DC mode · CPC title