Methods for manufacturing doubly bent X-ray focusing device, doubly bent X-ray focusing device assembly, doubly bent X-ray spectroscopic device and doubly bent X-ray spectroscopic device assembly

Patent metadata

Field	Value
Publication number	US-10175185-B2
Application number	US-201715712799-A
Country	US
Kind code	B2
Filing date	Sep 22, 2017
Priority date	Mar 26, 2015
Publication date	Jan 8, 2019
Grant date	Jan 8, 2019

Abstract

A doubly bent X-ray spectroscopic device ( 1 ) according to the present invention includes: a glass plate ( 3 ) which is deformed into a shape having a doubly bent surface by being sandwiched between a doubly curved convex surface ( 21 a ) of a convex forming die ( 21 ) and a doubly curved concave surface ( 22 a ), of a concave forming die ( 22 ), that matches the doubly curved convex surface ( 21 a ), and being heated to a temperature of 400° C. to 600° C.; and a reflection coating ( 5 ) configured to reflect X-rays, which is formed on a concave surface ( 3 a ) of the deformed glass plate ( 3 ).

First claim

What is claimed is:

1. A method for manufacturing a doubly bent X-ray focusing device, comprising the steps of:
preparing a glass plate having a surface roughness not more than 0.5 nm in root-mean-square roughness;
preparing a convex forming die having a doubly curved convex surface;
preparing a concave forming die having a doubly curved concave surface that matches the doubly curved convex surface;
deforming the glass plate into a shape having a doubly bent surface by sandwiching the glass plate between the doubly curved convex surface of the convex forming die and the doubly curved concave surface of the concave forming die, and heating the glass plate to a temperature of 400° C. to 600° C.; and
forming a reflection coating that reflects X-rays, on a concave surface of the deformed glass plate.

2. A method for manufacturing a doubly bent X-ray focusing device assembly, comprising the steps of:
preparing a doubly bent X-ray focusing device manufactured by the manufacturing method as claimed in claim 1 ;
preparing a base to which the doubly bent X-ray focusing device is to be fixed; and
fixing the doubly bent X-ray focusing device to the base.

3. A method for manufacturing a doubly bent X-ray focusing device assembly, comprising the steps of:
preparing a glass plate having a surface roughness not more than 0.5 nm in root-mean-square roughness;
preparing a convex forming die having a doubly curved convex surface;
preparing a concave forming die having a doubly curved concave surface that matches the doubly curved convex surface;
deforming the glass plate into a shape having a doubly bent surface by sandwiching the glass plate between the doubly curved convex surface of the convex forming die and the doubly curved concave surface of the concave forming die, and heating the glass plate to a temperature of 400° C. to 600° C.;
preparing a base to which the deformed glass plate is to be fixed;
fixing the deformed glass plate to the base; and
forming a reflection coating that reflects X-rays, on a concave surface of the glass plate fixed to the base.

4. A method for manufacturing a doubly bent X-ray spectroscopic device, comprising the steps of:
preparing a glass plate having a surface roughness not more than 0.5 nm in root-mean-square roughness;
preparing a convex forming die having a doubly curved convex surface;
preparing a concave forming die having a doubly curved concave surface that matches the doubly curved convex surface;
deforming the glass plate into a shape having a doubly bent surface by sandwiching the glass plate between the doubly curved convex surface of the convex forming die and the doubly curved concave surface of the concave forming die, and heating the glass plate to a temperature of 400° C. to 600° C.; and
forming a synthetic multilayer that monochromates X-rays, on a concave surface of the deformed glass plate.

5. A method for manufacturing a doubly bent X-ray spectroscopic device assembly, comprising the steps of:
preparing a doubly bent X-ray spectroscopic device manufactured by the manufacturing method as claimed in claim 4 ;
preparing a base to which the doubly bent X-ray spectroscopic device is to be fixed; and
fixing the doubly bent X-ray spectroscopic device to the base.

6. A method for manufacturing a doubly bent X-ray spectroscopic device assembly, comprising the steps of:
preparing a glass plate having a surface roughness not more than 0.5 nm in root-mean-square roughness;
preparing a convex forming die having a doubly curved convex surface;
preparing a concave forming die having a doubly curved concave surface that matches the doubly curved convex surface;
deforming the glass plate into a shape having a doubly bent surface by sandwiching the glass plate between the doubly curved convex surface of the convex forming die and the doubly curved concave surface of the concave forming die, and heating the glass plate to a temperature of 400° C. to 600° C.;
preparing a base to which the deformed glass plate is to be fixed;
fixing the deformed glass plate to the base; and
forming a synthetic multilayer that monochromates X-rays, on a concave surface of the glass plate fixed to the base.

Assignees

• Rigaku Denki Co Ltd

Inventors

• Kawahara Naoki

Classifications

• G21K2201/06

  using diffractive, refractive or reflecting elements · CPC title

• G21K2201/064

  having a curved surface · CPC title

• G21K1/06

  using diffraction, refraction or reflection, e.g. monochromators (G21K1/10, G21K7/00 take precedence) · CPC title

• G21K2201/061

  characterised by a multilayer structure · CPC title

• G01N23/2076

  for spectrometry, i.e. using an analysing crystal, e.g. for measuring X-ray fluorescence spectrum of a sample with wavelength-dispersion, i.e. WDXFS · CPC title