Conductive film coated substrate, multilayer reflective film coated substrate, reflective mask blank, reflective mask, and semiconductor device manufacturing method

Patent metadata

Field	Value
Publication number	US-9746762-B2
Application number	US-201414896411-A
Country	US
Kind code	B2
Filing date	Sep 22, 2014
Priority date	Sep 27, 2013
Publication date	Aug 29, 2017
Grant date	Aug 29, 2017

Abstract

Provided is a conductive film coated substrate, including a conductive film formed thereon. In a relationship between a bearing area (%) and a bearing depth (nm) that are obtained by measuring, with an atomic force microscope, a region of 1 μm×1 μm of a surface of the conductive film, the surface of the conductive film satisfies a relationship that (BA 70 −BA 30 )/(BD 70 −BD 30 ) is 15 or more and 260 or less (%/nm), and a maximum height (Rmax) is 1.3 nm or more and 15 nm or less.

First claim

The invention claimed is:

1. A conductive film coated substrate comprising:
a substrate for a mask blank for use in lithography; and
a conductive film formed on one main surface of the substrate;
wherein:
in a relationship between a bearing area (%) and a bearing depth (nm) that are obtained by measuring, with an atomic force microscope, a region of 1 μm×1 μm of a surface of the conductive film, when a bearing area of 30% is defined as BA 30 , a bearing area of 70% is defined as BA 70 , and bearing depths corresponding to the bearing areas of 30% and 70% are defined as BD 30 and BD 70 , respectively,
the surface of the conductive film satisfies a relationship that (BA 70 −BA 30 )/(BD 70 −BD 30 ) is 15 or more and 260 or less (%/nm), and a maximum height (Rmax) is 1.3 nm or more and 15 nm or less.

2. A conductive film coated substrate according to claim 1 , wherein, in a frequency distribution chart where a relationship between the bearing depth obtained by measuring with the atomic force microscope and a frequency (%) of the obtained bearing depth of the surface of the conductive film is plotted, an absolute value of a bearing depth corresponding to a center of a full width at half maximum, which is determined from an approximated curve drawn through the plotted points or a highest frequency of the plotted points, is smaller than an absolute value of a bearing depth corresponding to ½ of the maximum height (Rmax) of surface roughness of the surface of the conductive film.

3. A conductive film coated substrate according to claim 1 , wherein, in a frequency distribution chart where a relationship between the bearing depth obtained by measuring with the atomic force microscope and a frequency (%) of the obtained bearing depth of the surface of the conductive film is plotted, an absolute value of a bearing depth corresponding to a center of a full width at half maximum, which is determined from an approximated curve drawn through the plotted points or a highest frequency of the plotted points, is equal to or larger than an absolute value of a bearing depth corresponding to ½ of the maximum height (Rmax) of surface roughness of the surface of the conductive film.

4. A multilayer reflective film coated substrate comprising a multilayer reflective film formed by alternately laminating a high refractive index layer and a low refractive index layer, wherein the multi-layer reflection film is formed on a main surface of the conductive film coated substrate according to claim 1 on a side opposite to a side on which the conductive film is formed.

5. A multilayer reflective film coated substrate according to claim 4 , further comprising a protective film formed on the multilayer reflective film.

6. A reflective mask blank comprisingan absorber film formed on the multilayer reflective film of the multilayer reflective film coated substrate according to claim 4 .

7. A reflective mask comprising an absorber pattern provided on the multilayer reflective film, wherein the absorber pattern is formed by patterning the absorber film of the reflective mask blank according to claim 6 .

8. A method of manufacturing a semiconductor device, comprising a step of performing a lithography process with the reflective mask according to claim 7 using an exposure apparatus to form a transfer pattern on a transfer target.

9. A reflective mask blank comprising an absorber film formed on the protective film of the multilayer reflective film coated substrate according to claim 5 .

10. A reflective mask comprising an absorber pattern provided on the protective film, wherein the absorber pattern is formed by patterning the absorber film of the reflective mask blank according to claim 9 .

11. A method of manufacturing a semiconductor device, comprising a step of performing a lithography process with the reflective mask according to claim 10 using an exposure apparatus to form a transfer pattern on a transfer target.

Assignees

• Hoya Corp

Inventors

• Hamamoto Kazuhiro
• Usui Yoichi

Classifications

• G03F1/38

  Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof · CPC title

• G03F7/20

  Exposure; Apparatus therefor (photographic printing apparatus for making copies G03B27/00) · CPC title

• G03F1/24 Primary

  Reflection masks; Preparation thereof · CPC title

• B32B2551/00

  Optical elements · CPC title

• B32B2307/416

  Reflective · CPC title