Switchable filters and design structures

Patent metadata

Field	Value
Publication number	US-10164597-B2
Application number	US-201715691272-A
Country	US
Kind code	B2
Filing date	Aug 30, 2017
Priority date	Feb 21, 2012
Publication date	Dec 25, 2018
Grant date	Dec 25, 2018

Abstract

Switchable and/or tunable filters, methods of manufacture and design structures are disclosed herein. The method of forming the filters includes forming at least one piezoelectric filter structure comprising a plurality of electrodes formed to be in contact with at least one piezoelectric substrate. The method further includes forming a micro-electro-mechanical structure (MEMS) comprising a MEMS beam in which, upon actuation, the MEMS beam will turn on the at least one piezoelectric filter structure by interleaving electrodes in contact with the piezoelectric substrate or sandwiching the at least one piezoelectric substrate between the electrodes.

First claim

What is claimed:

1. A method performed in a computer-aided design system for generating a functional design model of a tunable filter structure, the method comprising:
generating a functional representation of at least one filter comprising a plurality of electrodes formed to be in contact with at least one piezoelectric substrate; and
generating a function representation of a beam structure positioned to turn on the at least one filter by moving the MEMS beam such that electrodes become interleaved in contact with the at least one piezoelectric substrate or the at least one piezoelectric substrate becomes sandwiched between the electrodes,
wherein the functional representation of the at least one filter and the beam structure are stored on a non-transitory storage medium or programmable gate array in a data format used for exchange of data of mechanical devices and structures associated with the functional representations.

2. The method of claim 1 , wherein the functional representation of the beam structure is a MEMS beam with the interleaved electrodes formed within an opening thereof, on a same level as the MEMS beam.

3. The method of claim 2 , wherein the functional representation of the beam structure is positioned over the interleaved electrodes formed on an underlying insulator layer.

4. The method of claim 2 , further comprising generating a functional representation of portions of the interleaved electrodes are formed on a same level as the beam structure and an underlying insulator layer.

5. The method of claim 2 , wherein the functional representation of the at least one piezoelectric substrate is provided on the MEMS beam, and portions of the interleaved electrodes are formed on a surface of the at least one piezoelectric substrate and an underlying insulator layer.

6. The method of claim 2 , wherein the functional representation of the at least one filter is a SAW filter.

7. The method of claim 2 , wherein the functional representation of the beam structure is a MEMS beam structure.

8. The method of claim 7 , wherein the MEMS beam structure is one of a cantilever beam and a bridge beam.

9. The method of claim 6 , wherein the functional representation of the piezoelectric layer is formed within an opening of the MEMS beam structure.

10. The method of claim 9 , wherein the functional representation of the plurality of electrodes comprise an interleaved signal electrode and ground electrode formed below the piezoelectric layer on an insulator layer.

11. The method of claim 10 , further comprising generating a functional representation of an actuator is formed on the insulator layer, which faces the MEMS beam structure.

12. The method of claim 9 , wherein the plurality of electrodes comprise a signal electrode on an underside of the piezoelectric layer and a ground electrode on the insulator layer.

13. The method of claim 1 , wherein the non-transitory storage medium or programmable gate array is a tangible readable medium and the computer-aided design system for generating the functional design model embodied on the tangible readable medium is executed on a computing device and displayed on a display device.

14. The method of claim 13 , further comprising manufacturing the tunable filter structure using the functional representation of the at least one filter and the beam structure on the computing device.

15. The method of claim 1 , further comprising manufacturing the tunable filter structure using the functional representation of the at least one filter and the beam structure.

Assignees

• IBM
• Smartsens Tech Cayman Co Ltd

Inventors

• Adkisson James W
• Candra Panglijen
• Dunbar Thomas J
• Jaffe Mark D
• Stamper Anthony K
• Wolf Randy L

Classifications

• H03H2003/027

  the resonators or networks being of the microelectro-mechanical [MEMS] type · CPC title

• H03H3/08

  for the manufacture of resonators or networks using surface acoustic waves · CPC title

• Y10T29/49005

  Acoustic transducer · CPC title

• Y10T29/42

  Piezoelectric device making · CPC title

• H03H2009/155

  using MEMS techniques · CPC title