Switchable filters and design structures
US-9935600-B2 · Apr 3, 2018 · US
Switchable filters and design structures
US2017366153A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2017366153-A1 |
| Application number | US-201715691249-A |
| Country | US |
| Kind code | A1 |
| Filing date | Aug 30, 2017 |
| Priority date | Feb 21, 2012 |
| Publication date | Dec 21, 2017 |
| Grant date | — |
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- Title
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- Abstract
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Abstract
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Switchable and/or tunable filters, methods of manufacture and design structures are disclosed herein. The method of forming the filters includes forming at least one piezoelectric filter structure comprising a plurality of electrodes formed to be in contact with at least one piezoelectric substrate. The method further includes forming a micro-electro-mechanical structure (MEMS) comprising a MEMS beam in which, upon actuation, the MEMS beam will turn on the at least one piezoelectric filter structure by interleaving electrodes in contact with the piezoelectric substrate or sandwiching the at least one piezoelectric substrate between the electrodes.
First claim
Opening claim text (preview).
What is claimed: 1 . A method comprising: determining a frequency of a filter or need to have the filter activated; and turning on one or more filters by actuating a MEMS beam by interleaving electrodes in contact with the piezoelectric substrate or sandwiching the at least one piezoelectric substrate between the electrodes, in response to the determining. 2 . The method of claim 1 , wherein the filter is a SAW filter. 3 . The method of claim 1 , wherein the filter is a BAW filter. 4 . The method of claim 1 , wherein the MEMS beam is one of a cantilever beam and a bridge beam. 5 . The method of claim 1 , wherein the MEMS beam is positioned over the interleaved electrodes formed on an underlying insulator layer.
Assignees
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Classifications
- H03H3/007Primary
for the manufacture of electromechanical resonators or networks · CPC title
Acoustic transducer · CPC title
for the manufacture of piezoelectric or electrostrictive resonators or networks (H03H3/08 takes precedence) · CPC title
using MEMS techniques · CPC title
Circuit design at the analogue level · CPC title
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- What does patent US2017366153A1 cover?
- Switchable and/or tunable filters, methods of manufacture and design structures are disclosed herein. The method of forming the filters includes forming at least one piezoelectric filter structure comprising a plurality of electrodes formed to be in contact with at least one piezoelectric substrate. The method further includes forming a micro-electro-mechanical structure (MEMS) comprising a MEM…
- Who is the assignee on this patent?
- IBM
- What technology area does this patent fall under?
- Primary CPC classification H03H3/007. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Thu Dec 21 2017 00:00:00 GMT+0000 (Coordinated Universal Time) (A1). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 5 related publications on this page (citations in our corpus or others sharing the same primary CPC).