Piezoelectric microelectromechanical resonator device and corresponding manufacturing process
US-2024154599-A1 · May 9, 2024 · US
the resonators or networks being of the microelectro-mechanical [MEMS] type
the resonators or networks being of the microelectro-mechanical [MEMS] type · Cooperative Patent Classification (CPC)
Electric circuits, power, telecommunications, and semiconductors.
Related technology areas
Mapped technology topics for this CPC code.
| Metric | Value |
|---|---|
| CPC code | H03H2003/027 |
| Official title | {the resonators or networks being of the microelectro-mechanical [MEMS] type} |
| Display label | the resonators or networks being of the microelectro-mechanical [MEMS] type |
| Total patents | 223 |
Filing trend
Year-over-year patent counts classified under this CPC code.
Filing activity over the last five years is stable.
| Year | Patents |
|---|---|
| 2015 | 21 |
| 2016 | 26 |
| 2017 | 35 |
| 2018 | 20 |
| 2019 | 32 |
| 2020 | 20 |
| 2021 | 12 |
| 2022 | 11 |
| 2023 | 21 |
| 2024 | 12 |
| 2025 | 10 |
| 2026 | 3 |
Representative patents
Representative publications under this CPC code from precomputed stats, or recent filings when stats are unavailable.
Method of fabricating acoustic wave device and acoustic wave device
US-2017370791-A1 · Dec 28, 2017 · US
Elastic wave device and method for manufacturing the same
US-2017331449-A1 · Nov 16, 2017 · US
Composite substrate, semiconductor device, and method for manufacturing semiconductor device
US-9812345-B2 · Nov 7, 2017 · US
Guided wave devices with selectively thinned piezoelectric layers
US-2017214381-A1 · Jul 27, 2017 · US
Microelectromechanical resonator
US-9712128-B2 · Jul 18, 2017 · US
Resonant circuit with variable frequency and impedance
US-9705473-B2 · Jul 11, 2017 · US
Temperature-engineered MEMS resonator
US-9705470-B1 · Jul 11, 2017 · US
Single crystal micromechanical resonator
US-9641154-B2 · May 2, 2017 · US
Method of manufacture for single crystal capacitor dielectric for a resonance circuit
US-2017077386-A1 · Mar 16, 2017 · US
Single crystal micromechanical resonator and fabrication methods thereof
US-2017054432-A1 · Feb 23, 2017 · US
Integrated circuit configured with two or more single crystal acoustic resonator devices
US-9571061-B2 · Feb 14, 2017 · US
Acoustic resonator device with single crystal piezo material and capacitor on a bulk substrate
US-9537465-B1 · Jan 3, 2017 · US
Single crystal micromechanical resonator and fabrication methods thereof
US-9525398-B1 · Dec 20, 2016 · US
Nonuniform corrugated diaphragm for mems tuners and actuators
US-2016336922-A1 · Nov 17, 2016 · US
Elastic wave device and method for manufacturing the same
US-2016329876-A1 · Nov 10, 2016 · US
Piezoelectric vibrator and piezoelectric vibrating apparatus
US-2016322953-A1 · Nov 3, 2016 · US
Method of manufacturing elastic wave device
US-9484885-B2 · Nov 1, 2016 · US
Elastic wave device and method for manufacturing the same
US-9431996-B2 · Aug 30, 2016 · US
Integrated circuit configured with two or more single crystal acoustic resonator devices
US-2016248395-A1 · Aug 25, 2016 · US
Frequently asked questions
Answers are generated from the same data shown on this page.
- What is CPC H03H2003/027?
- CPC H03H2003/027 is the Cooperative Patent Classification code for “the resonators or networks being of the microelectro-mechanical [MEMS] type.”
- How many patents are filed under CPC H03H2003/027 (the resonators or networks being of the microelectro-mechanical [MEMS] type)?
- Our database includes 223 publications tagged with this CPC code.
- Is patent activity under CPC H03H2003/027 growing?
- Publication counts under this code: 12 in 2024 vs 10 in 2025 (latest complete years).