Exposure head, exposure apparatus and method of operating an exposure head

Patent metadata

Field	Value
Publication number	US-10114289-B2
Application number	US-201515304300-A
Country	US
Kind code	B2
Filing date	Apr 14, 2015
Priority date	Apr 15, 2014
Publication date	Oct 30, 2018
Grant date	Oct 30, 2018

Abstract

The invention is directed at an exposure head for use in an exposure apparatus for illuminating a surface, the exposure head comprising one or more radiative sources for providing one or more beams, an optical scanning unit arranged for receiving the one or more beams and for directing the beams towards the surface for impinging each of the beams on an impingement spot, a rotation actuating unit connected to the optical scanning unit for at least partially rotating the optical scanning unit, wherein the impingement spots of the one or more beams are scanned across the surface by said at least partial rotation of the optical scanning unit, wherein the optical scanning unit comprises a transmissive element including one or more facets for receiving the one or more beams and for outputting the beams after conveying thereof through the transmissive element, for displacing the beams upon said rotation of the transmissive element for enabling the scanning of the impingement spots.

First claim

The invention claimed is:

1. An exposure head for use in an exposure apparatus for illuminating a surface, the exposure head comprising:
a plurality of radiative sources for providing a plurality of beams,
an optical scanning unit arranged for receiving the beams and for directing the beams towards the surface for impinging each of the beams on an impingement spot, and
a rotation actuating unit connected to the optical scanning unit for at least partially rotating the optical scanning unit,

wherein the impingement spots of the beams are scanned across the surface by said at least partial rotation of the optical scanning unit, wherein the optical scanning unit comprises a transmissive element, wherein the transmissive element is a polygon prism, the transmissive element including one or more facets for receiving the beams and for outputting the beams after conveying thereof through the transmissive element, for displacing the beams upon said rotation of the transmissive element for enabling the scanning of the impingement spots, the impingement spots thereby illuminating the surface in a pattern for forming an image.

2. The exposure head according to claim 1 , wherein the facets of the polygon prism are even in number, wherein each two facets on opposing sides of the polygon prism cooperate such that in use a first one of said opposing facets receives at least one of said beams and a second one of said opposing facets outputs said received at least one beam.

3. The exposure head according to claim 2 , wherein the opposing facets are parallel so that the at least one beam is output under a same angle as an angle of incidence of the at least one beam on the receiving first one of said opposing facets.

4. The exposure head according to claim 1 , wherein the plurality of radiative sources include a plurality of laser diodes.

5. The exposure head according to claim 1 , wherein two or more of said plurality of radiative sources are arranged adjacent each other in a direction perpendicular to the notional rotation axis of the at least partial rotation of the transmissive element by the rotation actuating unit, and wherein said two or more of said adjacently arranged plurality of radiative sources include two or more of a plurality of diodes arranged adjacently.

6. The exposure head according to claim 5 , wherein the laser beams of the two or more of said plurality of laser diodes arranged adjacently are directed at substantially a same impingement location on the transmissive element.

7. The exposure head according to claim 5 , wherein the two or more adjacently arranged laser diodes are placed to enable scanning of the laser beams across scan lines that are aligned with each other, and wherein at least one of the placement of the adjacent laser diodes or the size of at least one of the facets of the transmissive element is such that the scan lines of the adjacent laser beams at least partly overlap.

8. The exposure head according to claim 5 , wherein the two or more adjacently arranged laser diodes are arranged to enable scanning of the laser diodes across scan lines that are parallel but not aligned with each other, and wherein at least one of the arrangement of the laser diodes or the size of at least one of the facets of the transmissive element is such that the scan lines of the adjacent laser beams at least partly overlap, for enabling exposure of an image at sub-pixel accuracy by means of intensity manipulation of light from the laser diodes.

9. The exposure head according to claim 5 , wherein a further two or more of said plurality of laser diodes are arranged adjacent each other in a direction parallel with a notional rotation axis of the at least partial rotation of the transmissive element by the rotation actuating unit.

10. The exposure head according to claim 5 , wherein in use the exposure head is moved relative to the illuminated surface in a motion direction, the illuminated surface being a substrate surface, wherein two or more of said plurality of laser diodes are arranged adjacent each other in the motion direction to enable illumination of the surface simultaneously in a same path in said motion direction.

11. The exposure head according to claim 5 , wherein in use the exposure head is moved relative to the illuminated surface in a motion direction, the illuminated surface being a substrate surface, wherein two or more of said plurality of laser diodes are arranged adjacent each other under an angle with the motion direction, to illuminate the substrate surface simultaneously in overlapping or parallel paths in said motion direction.

12. The exposure head according to claim 1 , wherein the transmissive element, at one or more edges between said facets, comprises a reflective coating.

13. The exposure apparatus of claim 1 comprising at least one exposure head according to claim 1 , the exposure apparatus further comprising:
a motion driver for moving the at least one exposure head and a substrate surface relative to each other to describe an exposure trajectory across the substrate surface for exposing the substrate surface, and
an image controller arranged for providing an electric signal to the at least one exposure head dependent on exposure image data, for enabling control of the laser diodes of the at least one exposure head.

14. The exposure apparatus according to claim 13 , wherein the at least one exposure head is an exposure head comprising:
a plurality of radiative sources for providing a plurality of beams,
an optical scanning unit arranged for receiving the beams and for directing the beams towards the surface for impinging each of the beams on an impingement spot, and
a rotation actuating unit connected to the optical scanning unit for at least partially rotating the optical scanning unit,

wherein the impingement spots of the beams are scanned across the surface by said at least partial rotation of the optical scanning unit, wherein the optical scanning unit comprises a transmissive element including one or more facets for receiving the beams and for outputting the beams after conveying thereof through the transmissive element, for displacing the beams upon said rotation of the transmissive element, and for enabling the scanning of the impingement spots, the impingement spots thereby illuminating the surface in a pattern for forming an image, wherein the one or more radiative sources include one or more laser diodes and wherein in use the exposure head is moved relative to the illuminated surface in a motion direction, the illuminated surface being a substrate surface, wherein two or more of said plurality of laser diodes are arranged adjacent each other in the motion direction to enable illumination of the surface simultaneously in a same path in said motion direction, and wherein the motion driver is arranged for adapting the motion velocity of the exposure head such that in time subsequent illumination patterns of said two or more adjacent laser diodes at least partially overlap.

15. The exposure apparatus according to claim 13 , wherein one or more of said at least one exposure head comprises at least two laser diodes, which are arranged adjacent each other in a direction perpendicular to a notional rotation axis of the at least partial rotation of the transmissive element by the rotation actuating unit of said exposure head, wherein the at least two adjacently arranged laser diodes are placed to enable scanning of the laser beams across scan lines that are aligned with each other, and wherein at least one of the placement of the adjacent laser diodes or the size of at least one of

Assignees

• TNO

Inventors

• Jamar Jacobus Hubertus Theodoor
• Maalderink Herman Hendrikus
• Meinders Erwin Rinaldo
• Giesen Peter Theodorus Maria
• Van Zwet Erwin John
• Starmans Henri Jacques Antoine Jean

Classifications

• G03F7/2051 Primary

  Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source (G03F7/70 takes precedence) · CPC title

• G03F7/704 Primary

  Scanned exposure beam, e.g. raster-, rotary- and vector scanning (mask projection exposure involving relative movement of patterned beam and workpiece during imaging G03F7/70358) · CPC title

• G02B26/12

  using multifaceted mirrors · CPC title

• G03F7/70391

  Addressable array sources specially adapted to produce patterns, e.g. addressable LED arrays · CPC title

• G02B26/0875 Primary

  by means of one or more refracting elements · CPC title