Method of electroplating photoresist defined features from copper electroplating baths containing reaction products of pyridyl alkylamines and bisepoxides

Patent metadata

Field	Value
Publication number	US-10104782-B2
Application number	US-201615220460-A
Country	US
Kind code	B2
Filing date	Jul 27, 2016
Priority date	Aug 6, 2015
Publication date	Oct 16, 2018
Grant date	Oct 16, 2018

Abstract

Electroplating methods enable the plating of photoresist defined features which have substantially uniform morphology. The electroplating methods include copper electroplating baths with reaction products of pyridyl alkylamines and bisepoxides to electroplate the photoresist defined features. Such features include pillars, bond pads and line space features.

First claim

What is claimed is:

1. A method for electroplating photoresist defined features comprising:
a) providing a substrate comprising a layer of photoresist, wherein the layer of photoresist comprises a plurality of apertures;
b) providing a copper electroplating bath comprising a source of copper ions, one or more reaction products of one or more pyridyl alkylamines and one or more bisepoxides; an electrolyte; one or more accelerators; and one or more suppressors;
c) immersing the substrate comprising the layer of photoresist with the plurality of apertures in the copper electroplating bath; and
d) electroplating a plurality of copper photoresist defined features in the plurality of apertures, the plurality of photoresist defined features comprise an average % TIR of −5% to +12%.

2. The method of claim 1 , wherein a % WID of the plurality of photoresist defined features is from 5% to 14%.

3. The method of claim 1 , wherein the one or more pyridyl alkylamines has a formula:

wherein R 1 , R 2 , R 3 , R 4 and R 5 are independently chosen from hydrogen, (C 1 -C 6 )alkyl, (C 1 -C 6 )alkyl(C 6 -C 10 )aryl, —NR 6 R 7 and R 8 —NR 6 R 7 with the proviso that at least one of R 1 , R 2 , R 3 , R 4 and R 5 is R 8 —NR 6 R 7 ; R 8 is a (C 1 -C 10 )hydrocarbyl group; R 6 and R 7 are independently chosen from hydrogen, (C 1 -C 6 )alkyl, (C 6 -C 10 )aryl, (C 1 -C 6 )alkyl(C 6 -C 10 )aryl.

4. The method of claim 1 , wherein the one or more bisepoxides has a formula:

wherein R 9 and R 10 are independently chosen from hydrogen and (C 1 -C 4 )alkyl, A=O((CR 11 R 12 ) m O) n or (CH 2 ) y , each R 11 and R 12 is independently chosen from hydrogen, methyl, or hydroxyl, m=1-6, n=1-20 and y=0-6 and when y=0, A is a chemical bond.

5. The method of claim 4 , wherein the bisepoxide has a formula:

wherein R 9 and R 10 are independently chosen from hydrogen and (C 1 -C 4 )alkyl, R 11 and R 12 are chosen from hydrogen, methyl or hydroxyl, m=1-6 and n=1.

6. The method of claim 1 , wherein the one or more reaction products are in amounts of 0.25 ppm to 20 ppm in the copper electroplating bath.

7. The method of claim 1 , wherein the one or more photoresist defined features is chosen from a pillar, bond pad and line space feature.

8. The method of claim 1 , wherein a current density is from 0.25 ASD to 40 ASD.

Assignees

• Rohm & Haas Elect Mat
• Dow Global Technologies Llc

Inventors

• Thorseth Matthew
• Niazimbetova Zuhra
• Qin Yi
• Woertink Julia
• Dziewiszek Joanna
• Reddington Erik
• Lefebvre Mark

Classifications

• H10W72/012

  of bump connectors, dummy bumps or thermal bumps · CPC title

• H10W72/01955

  by using masks · CPC title

• H10W72/01935

  by plating, e.g. electroless plating or electroplating · CPC title

• H10W72/01255

  by using masks · CPC title

• H10W72/01235

  by plating, e.g. electroless plating or electroplating · CPC title