PECVD process

Patent metadata

Field	Value
Publication number	US-10060032-B2
Application number	US-201715802496-A
Country	US
Kind code	B2
Filing date	Nov 3, 2017
Priority date	Oct 26, 2012
Publication date	Aug 28, 2018
Grant date	Aug 28, 2018

Abstract

A method of processing a substrate according to a PECVD process is described. Temperature profile of the substrate is adjusted to change deposition rate profile across the substrate. Plasma density profile is adjusted to change deposition rate profile across the substrate. Chamber surfaces exposed to the plasma are heated to improve plasma density uniformity and reduce formation of low quality deposits on chamber surfaces. In situ metrology may be used to monitor progress of a deposition process and trigger control actions involving substrate temperature profile, plasma density profile, pressure, temperature, and flow of reactants.

First claim

The invention claimed is:

1. A method, comprising:
disposing a substrate on a substrate support in a chamber;
establishing a temperature profile in the substrate;
controlling a temperature of a face plate of the chamber, wherein the face plate faces the substrate support, and wherein a processing region is between the face plate and the substrate support;
flowing a precursor gas mixture into the chamber;
forming a plasma in the chamber;
adjusting a density profile of the plasma; and
forming a layer of uniform thickness on the substrate.

2. The method of claim 1 , wherein the layer is of uniform composition.

3. The method of claim 1 , wherein controlling the temperature of the face plate promotes temperature uniformity in the processing region.

4. The method of claim 1 , wherein flowing the precursor gas mixture comprises providing the precursor gas mixture to the processing region through the face plate.

5. The method of claim 1 , wherein adjusting the density profile of the plasma comprises biasing an electrode coupled to at least one of:
a side wall of the chamber, and
the substrate support.

6. The method of claim 1 , further comprising:
flowing a second precursor gas mixture into the chamber; and
forming a second layer of uniform thickness to form a stack.

7. The method of claim 6 , wherein a structure of the stack is substantially planar, laminar, and parallel.

8. The method of claim 1 , wherein the uniform thickness varies from an average value by no more than 2%.

9. The method of claim 1 , further comprising sequentially forming multiple layers on the substrate in the chamber.

10. The method of claim 9 , wherein the multiple layers comprise at least 130 layers.

11. The method of claim 1 , further comprising controlling a temperature of at least one side wall of the chamber.

12. A method, comprising:
disposing a substrate on a substrate support in a chamber;
detecting a reflectivity of the substrate;
establishing a temperature profile in the substrate;
controlling a temperature of a face plate of the chamber, wherein the face plate faces the substrate support, and wherein a processing region is between the face plate and the substrate support;
flowing a precursor gas mixture into the chamber at a flow rate;
forming a plasma in the chamber from the precursor gas mixture;
adjusting a density profile of the plasma;
forming a layer on the substrate;
while forming the layer on the substrate, monitoring the reflectivity of the substrate to detect a thickness uniformity of the layer; and
based on the thickness uniformity, adjusting at least one of:
the density profile of the plasma;
the temperature profile in the substrate; and
the flow rate of the precursor gas mixture.

13. The method of claim 12 , further comprising detecting an end point based on the reflectivity of the substrate.

14. The method of claim 12 , wherein detecting the reflectivity comprises:
shining a light on the substrate; and
measuring a spectrum of light reflected by the substrate.

15. The method of claim 12 , wherein controlling the temperature of the face plate promotes temperature uniformity in the processing region.

16. The method of claim 12 , wherein flowing the precursor gas mixture comprises providing the precursor gas mixture to the processing region through the face plate.

17. The method of claim 12 , wherein adjusting the density profile of the plasma comprises biasing an electrode coupled to at least one of:
a side wall of the chamber, and
the substrate support.

18. The method of claim 12 , wherein monitoring the reflectivity of the substrate comprises monitoring a local reflectivity of multiple locations on the substrate to detect a local thickness at each of the multiple locations.

19. The method of claim 18 , wherein the local thicknesses at the multiple locations is compared to determine the thickness uniformity.

20. The method of claim 12 , further comprising sequentially forming multiple layers on the substrate in the chamber.

Assignees

• Applied Materials Inc

Inventors

• Rajagopalan Nagarajan
• Han Xinhai
• Tsiang Michael Wenyoung
• Ogata Masaki
• Jiang Zhijun
• Rocha-Alvarez Juan Carlos
• Nowak Thomas
• Zhou Jianhua
• Sankarakrishnan Ramprakash
• Bansal Amit Kumar
• Lee Jeongmin
• Egan Todd
• Budiarto Edward
• Panasyuk Dmitriy
• Lee Terrance Y
• Chen Jian J
• Ayoub Mohamad A
• Park Heung Lak
• Reilly Patrick
• Shaikh Shahid
• Kim Bok Hoen
• Starik Sergey
• Balasubramanian Ganesh

Classifications

• H10P95/00

  Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass · CPC title

• H10P72/0604

  Process monitoring, e.g. flow or thickness monitoring · CPC title

• H10P72/0602 Primary

  Temperature monitoring · CPC title

• H10P72/76

  using mechanical means, e.g. clamps or pinches · CPC title

• C23C16/46

  characterised by the method used for heating the substrate (C23C16/48, C23C16/50 take precedence) · CPC title