UV curing apparatus

Patent metadata

Field	Value
Publication number	US-9433973-B1
Application number	US-201514739893-A
Country	US
Kind code	B1
Filing date	Jun 15, 2015
Priority date	Jun 15, 2015
Publication date	Sep 6, 2016
Grant date	Sep 6, 2016

Abstract

A UV curing apparatus includes a processing chamber, a UV light source disposed above the processing chamber, a window disposed between the processing chamber and the UV light source for allowing a UV light from the UV light source passing through and entering the processing chamber, a sealing ring disposed between the processing chamber and the window for sealing the processing chamber, and a light shading kit disposed between the UV light source and the sealing ring for preventing the sealing ring from being exposed of the UV light. Therefore the sealing ring is not exposed of UV light directly, and the bonding of the rubber sealing ring would not be destroyed.

First claim

What is claimed is:

1. A UV curing apparatus comprising:
a processing chamber;
a UV light source disposed above the processing chamber and comprising a reflector;
a window disposed between the processing chamber and the UV light source for allowing a UV light from the UV light source to pass through and to enter the processing chamber;
a sealing ring disposed between the processing chamber and the window for sealing the processing chamber; and
a light shading kit assembled on the reflector and disposed between the UV light source and the sealing ring for preventing the sealing ring from being exposed to the UV light.

2. The UV curing apparatus of claim 1 , wherein the reflector comprises a plurality of bars connected to each other, and a space is formed between adjacent bars.

3. The UV curing apparatus of claim 2 , wherein the light shading kit covers a portion of the sealing ring to prevent the portion of the sealing ring from being exposed to the UV light passing through the space.

4. The UV curing apparatus of claim 3 , wherein the light shading kit comprises a shading piece, the shading piece comprises:
a top plate that covers the space and the portion of the sealing ring; and
two side plates that extend from two opposite ends of the top plate and that contact the reflector.

5. The UV curing apparatus of claim 4 , wherein the light shading kit comprises a fastener for fastening the side plates to the reflector.

6. The UV curing apparatus of claim 1 , further comprising a supporter disposed on the processing chamber for supporting the window, wherein the sealing ring is sandwiched by the window and the supporter.

7. The UV curing apparatus of claim 6 , wherein the supporter comprises a flange and a sidewall standing on the flange, wherein the window is supported by the flange.

8. The UV curing apparatus of claim 7 , wherein the sealing ring is sandwiched between the flange and the window.

9. The UV curing apparatus of claim 8 , wherein the light shading kit covers an edge portion of the window and the sealing ring.

10. The UV curing apparatus of claim 7 , wherein the light shading kit is made of metal.

11. The UV curing apparatus of claim 1 , wherein the sealing ring is made of rubber.

12. The UV curing apparatus of claim 1 , wherein the window is a quartz window.

13. The UV curing apparatus of claim 1 , wherein the light shading kit is made of aluminum or aluminum alloy.

14. The UV curing apparatus of claim 1 , further comprising a holder disposed in the processing chamber for holding a substrate, wherein the substrate receives the UV light through the window.

15. A UV curing apparatus comprising:
a processing chamber;
a UV light source disposed above the processing chamber, wherein the UV light source comprises a reflector formed by connecting a plurality of bars, and a space is formed between adjacent bars;
a supporter disposed on the processing chamber;
a window supported by the supporter for allowing a UV light from the UV light source passing through and entering the processing chamber;
a sealing ring disposed between the supporter and the window for sealing the processing chamber; and
a light shading kit disposed between the supporter and the UV light source for preventing the UV light from emitting through the space onto the sealing ring.

16. The UV curing apparatus of claim 15 , wherein the light shading kit is fastened on the supporter and covers an edge portion of the window and the sealing ring.

17. The UV curing apparatus of claim 15 , wherein the light shading kit is assembled to the reflector and covers a portion of the sealing ring that would otherwise be exposed to the UV light passing through the space.

18. The UV curing apparatus of claim 15 , wherein the light shading kit is made of metal.

19. The UV curing apparatus of claim 15 , wherein an inner surface of each of the bars is a curved surface.

20. The UV curing apparatus of claim 15 , wherein the bars are connected to each other by weld or screws.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Ni Hsueh-Kuang
• Chen Chi-Jen
• Hong Peng-Cheng

Classifications

• H10P72/0441

  Apparatus for sealing, encapsulating, glassing, decapsulating or the like · CPC title

• H10P72/0436 Primary

  mainly by radiation · CPC title

• C23C16/56

  After-treatment · CPC title

• C23C16/4409

  characterised by sealing means · CPC title

• B05D1/60

  Deposition of organic layers from vapour phase (vapour phase deposition in general C23C14/00, C23C16/00) · CPC title