Extreme ultraviolet photoresist and method

Patent metadata

Field	Value
Publication number	US-10042252-B2
Application number	US-201715412856-A
Country	US
Kind code	B2
Filing date	Jan 23, 2017
Priority date	Nov 30, 2016
Publication date	Aug 7, 2018
Grant date	Aug 7, 2018

Abstract

The present disclosure provides a method for lithography patterning in accordance with some embodiments. The method includes forming a photoresist layer over a substrate, wherein the photoresist layer includes a polymer, a sensitizer, and a photo-acid generator (PAG), wherein the PAG includes a first phenyl ring and a second phenyl ring both chemically bonded to a sulfur, the first and second phenyl rings being further chemically bonded with enhanced sensitivity; performing an exposing process to the photoresist layer; and developing the photoresist layer, thereby forming a patterned photoresist layer.

First claim

What is claimed is:

1. A method for lithography patterning, comprising:
forming a photoresist layer over a substrate, wherein the photoresist layer includes a polymer, a sensitizer that includes a polyhydroxystyrene (PHS) chemical group, and a photo-acid generator (PAG), wherein the PAG includes a first phenyl ring and a second phenyl ring both chemically bonded to a sulfur, the first and second phenyl rings being further chemically bonded with enhanced sensitivity;
performing an exposing process to the photoresist layer; and
developing the photoresist layer, thereby forming a patterned photoresist layer.

2. The method of claim 1 , wherein the first phenyl ring includes a first carbon and a second carbon adjacent to the first carbon and the second phenyl ring includes a third carbon and a fourth carbon adjacent to the third carbon, wherein the first carbon of the first phenyl ring and the third carbon of the second phenyl ring are chemically bonded to the sulfur, and the second carbon of the first phenyl ring and the fourth carbon of the second phenyl ring are chemically bonded.

3. The method of claim 2 , wherein the second carbon of the first phenyl ring and the fourth carbon of the second phenyl ring are directly chemically bonded together.

4. The method of claim 3 , wherein the second carbon of the first phenyl ring and the fourth carbon of the second phenyl ring are chemically bonded to a chemical structure R, wherein the chemical structure R is a chemical group selected from the group consisting of a C1-C20 alkyl group, a cycloalkyl group, a hydroxyl alkyl group, an alkoxy group, an alkoxyl alkyl group, an acetyl group, an acetyl alkyl group, an carboxyl group, an alkyl caboxyl group, an cycloalkyl carboxyl group, a C2˜C30 saturated hydrocarbon ring, a C2˜C30 unsaturated hydrocarbon ring, a C2-C30 heterocyclic group, a 3-D chemical structure.

5. The method of claim 4 , wherein the C2-C30 heterocyclic group has one of a chain structure and a ring structure, wherein the 3-D chemical structure includes an adamantyl group.

6. The method of claim 2 , wherein the PAG further includes a third phenyl ring chemically bonded to the sulfur.

7. The method of claim 2 , wherein the PAG further includes an anion A-, which is one of a sulfonyl hydroxide and a fluoroalky sulfonyl hydroxide.

8. The method of claim 1 , wherein the PAG includes a chemical structure selected from the group consisting of following structures

9. The method of claim 1 , wherein
the performing of the exposing process to the photoresist layer includes exposing a portion of the photoresist layer to an extreme ultraviolet (EUV) radiation;
the sensitizer is sensitive to the EUV radiation and is able to generate an electron in response to the EUV radiation; and
the PAG is able to generate an acid in response to the electron.

10. The method of claim 1 , wherein
the sensitizer includes a phenol group; and
the polymer includes one of an acrylate-based polymer, a poly(norbornene)-co-malaic anhydride (COMA) polymer, and a polyhydroxystyrene (PHS) polymer.

11. The method of claim 1 , wherein the sensitizer includes one of a fluorine-containing chemical, a metal-containing chemical, a phenol-containing chemical, and a combination thereof.

12. The method of claim 1 , wherein the polymer includes a polyhydroxystyrene (PHS) polymer and the sensitizer is bonded to the polymer.

13. A method for lithography patterning, comprising:
forming a photoresist layer over a substrate, wherein the photoresist layer includes a polymer that includes a polyhydroxystyrene (PHS) polymer, a sensitizer that is bonded to the polymer, and a photo-acid generator (PAG), wherein the PAG includes a first phenyl ring and a sulfur chemically bonded together, wherein the sulfur is further chemically bonded to a first carbon and a second carbon that are chemically bonded together;
performing an exposing process to the photoresist layer; and
developing the photoresist layer, thereby forming a patterned photoresist layer.

14. The method of claim 13 , wherein the first carbon and the second carbon are chemically bonded together through another carbon.

15. The method of claim 13 , wherein the first carbon and the second carbon are chemically bonded together through a plurality of carbons, wherein the plurality of carbons, the first carbon and the second carbon are configured in a cycloalkane structure.

16. The method of claim 13 , wherein the first carbon is configured in a second phenyl ring and the second carbon is configured in a third phenyl ring.

17. The method of claim 16 , wherein the second phenyl ring further includes a third carbon adjacent to the first carbon and the third phenyl ring further includes a fourth carbon adjacent to the second carbon, wherein the third carbon of the second phenyl ring and the fourth carbon of the third phenyl ring are chemically bonded to a chemical structure R, wherein the chemical structure R is a chemical group selected from the group consisting of a C1-C20 alkyl group having a number of carbons, a cycloalkyl group, a hydroxyl alkyl group, an alkoxy group, an alkoxyl alkyl group, an acetyl group, an acetyl alkyl group, an carboxyl group, an alkyl caboxyl group, an cycloalkyl carboxyl group, a C2˜C30 saturated hydrocarbon ring, a C2˜C30 unsaturated hydrocarbon ring, a C2-C30 heterocyclic group, a 3-D chemical structure.

18. A method for lithography patterning, comprising:
forming a photoresist layer over a substrate, wherein the photoresist layer includes a polyhydroxystyrene (PHS) polymer; a sensitizer that includes a PHS chemical structure and is sensitive to an extreme ultraviolet (EUV) radiation and is able to generate an electron in response to the EUV radiation; and a photo-acid generator (PAG) that is able to generate an acid in response to the electron, wherein the PAG includes a first phenyl ring and a second phenyl ring both chemically bonded to a sulfur, the first and second phenyl rings being further chemically bonded with enhanced sensitivity;
performing an exposing process to the photoresist layer to the EUV radiation; and
developing the photoresist layer, thereby forming a patterned photoresist layer.

19. The method of claim 18 , wherein
the sensitizer includes one of a fluorine-containing chemical, a metal-containing chemical, a phenol-containing chemical, and a combination thereof; and
the polymer includes one of an acrylate-based polymer, and a poly(norbornene)-co-malaic anhydride (COMA) polymer.

20. The method of claim 18 , wherein the first phenyl ring includes a first carbon and a second carbon adjacent to the first carbon and the second phenyl ring includes a third carbon and a fourth carbon adjacent to the third carbon, wherein the first carbon of the first phenyl ring and the third carbon of the second phenyl ring are chemically bonded to the sulfur, and the second carbon of the first phenyl ring and the fourth carbon of the second phenyl ring are chemically bonded to a chemical structure R, wherein the chemical structure R is a chemical group selected from the group consisting of a C1-C20 alkyl group having a number of carbons, a cycloalkyl group, a hydroxyl alkyl group, an alkoxy group, an alkoxyl alkyl group, an acetyl group, an acetyl alkyl group, an carboxyl group, an alkyl caboxyl group, an cycloalkyl carboxyl group, a C2˜C30 saturated hydrocarbon ring, a C2˜C30 unsaturated hydrocarbon ring, a C2-C30 heterocyclic group

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Chen Yen-Hao
• Lai Wei-Han
• Wang Chien-Wei
• Lin Chin-Hsiang

Classifications

• H10P76/2041

  Photolithographic processes · CPC title

• G03F7/0035 Primary

  Multiple processes, e.g. applying a further resist layer on an already in a previously step, processed pattern or textured surface · CPC title

• C07D337/10

  condensed with two six-membered rings · CPC title

• G03F7/0382

  the macromolecular compound being present in a chemically amplified negative photoresist composition · CPC title

• G03F7/0392

  the macromolecular compound being present in a chemically amplified positive photoresist composition · CPC title