Semiconductor devices, a semiconductor diode and a method for forming a semiconductor device

Patent metadata

Field	Value
Publication number	US-10038105-B2
Application number	US-201615229828-A
Country	US
Kind code	B2
Filing date	Aug 5, 2016
Priority date	Aug 6, 2015
Publication date	Jul 31, 2018
Grant date	Jul 31, 2018

Abstract

A semiconductor device includes at least one highly doped region of an electrical device arrangement formed in a semiconductor substrate and a contact structure including an NTC (negative temperature coefficient of resistance) portion arranged adjacent to the at least one highly doped region at a front side surface of the semiconductor substrate. The NTC portion includes a negative temperature coefficient of resistance material.

First claim

What is claimed is:

1. A semiconductor device, comprising:
at least one highly doped region of an electrical device arrangement formed in a semiconductor substrate; and
a contact structure comprising an NTC (negative temperature coefficient of resistance) portion arranged adjacent to the at least one highly doped region at a front side surface of the semiconductor substrate, the NTC portion comprising a negative temperature coefficient of resistance material,
wherein the negative temperature coefficient of resistance material of the NTC portion of the contact structure comprises at least one material selected from the group consisting of a chalcogenide material, a phase change material, germanium, germanium-telluride, a metal oxide, a mixture of metal oxides, a mixture of metal oxides and germanium, and a composite material comprising polymer and metal.

2. The semiconductor device of claim 1 , wherein the at least one highly doped region has an average doping concentration of more than 1×10 18 dopant atoms per cm 3 .

3. The semiconductor device of claim 1 , wherein an electrical resistivity of the negative temperature coefficient of resistance material of the NTC portion of the contact structure changes by at least 50% of its electrical resistivity value at 150° C. in a temperature interval between 170° C. and 250° C.

4. The semiconductor device of claim 1 , wherein a maximal thickness of the NTC portion of the contact structure lies between 0.5 μm and 10 μm.

5. The semiconductor device of claim 1 , wherein the contact structure further comprises a Schottky or ohmic or positive temperature coefficient contact portion arranged laterally adjacent to the NTC portion of the contact structure.

6. The semiconductor device of claim 1 , wherein the electrical device arrangement is a merged pin Schottky diode arrangement, a self-adjusting p-emitter efficiency diode arrangement, an inverse injection dependency of emitter efficiency diode arrangement, a metal oxide semiconductor field effect transistor arrangement, or an insulated gate bipolar transistor arrangement.

7. The semiconductor device of claim 1 , wherein the at least one highly doped region forms at least part of a first device doping region of the electrical device arrangement having a first conductivity type.

8. The semiconductor device of claim 7 , wherein the first device doping region further comprises a lower doped region laterally surrounding the at least one highly doped region of the first device doping region at the front side surface of the semiconductor substrate.

9. The semiconductor device of claim 8 , wherein the lower doped region of the first device doping region has an average doping concentration of less than 1×10 17 dopant atoms per cm 3 .

10. The semiconductor device of claim 8 , wherein the at least one highly doped region of the first device doping region and the lower doped region of the first device doping region have the first conductivity type.

11. The semiconductor device of claim 7 , wherein the electrical device arrangement comprises a second device doping region having a second conductivity type, and wherein at least part of the second device doping region is arranged adjacent to a back side surface of the semiconductor substrate.

12. The semiconductor device of claim 11 , wherein the second device doping region comprises at least one highly doped region and a lower doped portion laterally surrounding at least one highly doped region at the back side surface of the semiconductor substrate.

13. The semiconductor device of claim 12 , wherein the at least one highly doped region of the second device doping region and the lower doped portion of the second device doping region have the second conductivity type.

14. The semiconductor device of claim 12 , wherein the second device doping region comprises at least one highly doped region located at the front side surface of the semiconductor substrate.

15. The semiconductor device of claim 12 , further comprising a back side contact structure comprising an NTC portion arranged adjacent to the at least one first highly doped region of the second device doping region, and wherein the NTC portion of the back side contact structure comprises a negative temperature coefficient of resistance material.

16. A semiconductor diode, comprising:
a first cathode/anode region arranged at a first surface of a semiconductor substrate, wherein the first cathode/anode region comprises a highly doped region;
a second cathode/anode region arranged at a second surface of the semiconductor substrate; and
a contact structure comprising a NTC portion arranged adjacent to the highly doped region of the first cathode/anode region at the first surface of the semiconductor substrate, the NTC portion comprising a negative temperature coefficient of resistance material,
wherein the negative temperature coefficient of resistance material of the NTC portion of the contact structure comprises at least one material selected from the group consisting of a chalcogenide material, a phase change material, germanium, germanium-telluride, a metal oxide, a mixture of metal oxides, a mixture of metal oxides and germanium, and a composite material comprising polymer and metal.

17. A semiconductor device, comprising:
a device doping region of an electrical device arrangement formed in a semiconductor substrate, the device doping region comprising a highly doped region and a lower doped region of the same conductivity type, the lower doped region laterally surrounding the highly doped region; and
a contact structure comprising a NTC portion arranged adjacent to the highly doped region at a surface of the semiconductor substrate, the NTC portion comprising a negative temperature coefficient of resistance material,
wherein the negative temperature coefficient of resistance material of the NTC portion of the contact structure comprises at least one material selected from the group consisting of a chalcogenide material, a phase change material, germanium, germanium-telluride, a metal oxide, a mixture of metal oxides, a mixture of metal oxides and germanium, and a composite material comprising polymer and metal.

18. A method for forming a semiconductor device, the method comprising:
forming at least one highly doped region of an electrical device arrangement in a semiconductor substrate; and
forming at least one NTC portion of a contact structure adjacent to the highly doped region of the electrical device arrangement at a front side surface of the semiconductor substrate, the at least one NTC portion comprising a negative temperature coefficient of resistance material,
wherein the negative temperature coefficient of resistance material of the NTC portion of the contact structure comprises at least one material selected from the group consisting of a chalcogenide material, a phase change material, germanium, germanium-telluride, a metal oxide, a mixture of metal oxides, a mixture of metal oxides and germanium, and a composite material comprising polymer and metal.

Assignees

• Infineon Technologies Ag

Inventors

• Basler Thomas
• Mahler Joachim
• Schulze Hans-Joachim

Classifications

• H01L29/1608

  Electricity · mapped topic

• H01L29/47

  Electricity · mapped topic

• H01L29/08

  Electricity · mapped topic

• H01L29/872

  Electricity · mapped topic

• H01L29/0619

  Electricity · mapped topic