Deposition apparatus including UV annealing unit and method for fabricating non-volatile memory device by using the deposition apparatus

Patent metadata

Field	Value
Publication number	US-10008410-B2
Application number	US-201715464532-A
Country	US
Kind code	B2
Filing date	Mar 21, 2017
Priority date	Oct 25, 2016
Publication date	Jun 26, 2018
Grant date	Jun 26, 2018

Abstract

A deposition apparatus includes a chamber, a plate in the chamber and configured support a substrate, a deposition unit configured to perform a deposition process in-situ in the chamber, and a UV annealing unit configured to perform a first ultraviolet (UV) and a second ultraviolet (UV) annealing process in-situ in the chamber. The deposition process may include sequentially depositing a first sacrificial layer, a first oxide layer, a second sacrificial layer and a second oxide layer on the substrate. The first UV annealing process may be performed on the first oxide layer after the first oxide layer is deposited. The second UV annealing process may be different from the first UV annealing process and may be performed on the second oxide layer after the second oxide layer is deposited.

First claim

What is claimed is:

1. A deposition apparatus comprising:
a chamber;
a plate in the chamber, the plate being configured to support a substrate;
a deposition unit configured to perform a deposition process that includes sequentially depositing a first sacrificial layer, a first oxide layer, a second sacrificial layer and a second oxide layer on the substrate; and
a UV annealing unit configured to perform a first ultraviolet ray (UV) annealing process on the first oxide layer after the first oxide layer is deposited, and to perform a second UV annealing process different from the first UV annealing process on the second oxide layer after the second oxide layer is deposited, the UV annealing unit being configured to perform the first and second UV annealing processes being performed in-situ in the chamber.

2. The deposition apparatus of claim 1 , wherein
the deposition unit is configured to perform the deposition process to further include: sequentially depositing a third sacrificial layer and a third oxide layer on the first oxide layer, after depositing the first oxide layer and before depositing the second sacrificial layer; and
sequentially depositing a fourth sacrificial layer and a fourth oxide layer on the second oxide layer after depositing the second oxide layer.

3. The deposition apparatus of claim 2 , wherein
the UV annealing unit is configured to perform a third UV annealing process on the third oxide layer after the third oxide layer is deposited,
the UV annealing unit is configured to perform a fourth UV annealing process on the fourth oxide layer after the fourth oxide layer is deposited, and
the UV annealing unit is configured to perform the third and fourth UV annealing processes in situ in the chamber.

4. The deposition apparatus of claim 3 , wherein UV wavelengths of each of the first to fourth UV annealing processes are different from one another.

5. The deposition apparatus of claim 3 , wherein UV intensities of each of the first to fourth UV annealing processes are different from one another.

6. The deposition apparatus of claim 1 , wherein
the deposition unit is configured to perform the deposition process to further include sequentially depositing a third sacrificial layer, a third oxide layer, a fourth sacrificial layer, a fourth oxide layer, a fifth sacrificial layer, a fifth oxide layer, a sixth sacrificial layer and a sixth oxide layer on the second oxide layer, after the depositing the second oxide layer,
the UV annealing unit is configured to perform a third UV annealing process on the fourth oxide layer after the fourth oxide layer is deposited,
the UV annealing unit is configured to perform a fourth UV annealing process on the fifth oxide layer after the fifth oxide layer is deposited, and
the UV annealing unit is configured to perform the third and fourth UV annealing processes in situ in the chamber.

7. The deposition apparatus of claim 6 , wherein UV wavelengths of each of the first to fourth UV annealing processes are different from one another.

8. The deposition apparatus of claim 6 , wherein UV intensities of each of the first to fourth UV annealing processes are different from one another.

9. The deposition apparatus of claim 1 , wherein a wavelength of UV of the first UV annealing process is different from a wavelength of UV of the second UV annealing process.

10. The deposition apparatus of claim 1 , wherein an intensity of UV of the first UV annealing process is different from an intensity of UV of the second UV annealing process.

11. The deposition apparatus of claim 1 , wherein the first and second oxide layers comprise a silicon oxide and a material having a dielectric constant lower than a dielectric constant of silicon oxide.

12. The deposition apparatus of claim 1 , wherein the deposition unit is configured to perform the deposition process so thicknesses of each of the first and second sacrificial layers in a thickness direction are greater than thicknesses of each of the first and second oxide layers in the thickness direction.

13. A method of fabricating a non-volatile memory device, the method comprising:
forming a first sacrificial layer on a substrate;
forming a first oxide layer on the first sacrificial layer;
performing a first UV annealing on the first oxide layer;
forming a second sacrificial layer on the first oxide layer;
forming a second oxide layer on the second sacrificial layer;
performing a second UV annealing different from the first UV annealing on the second oxide layer;
forming a channel hole that exposes the substrate by etching a first region of the first and second oxide layers and a first region of the first and second sacrificial layers;
forming a channel pattern in the channel hole;
forming a charge trap layer on the substrate adjacent to the channel pattern;
forming a trench by etching a second region of the first and second oxide layers and a second region of the first and second sacrificial layers, the trench being spaced apart from the channel pattern to expose the substrate; and
forming a gate electrode by removing the first and second sacrificial layers exposed by the trench.

14. The method according to claim 13 , wherein the forming the first and second sacrificial layers, the forming the first and second oxide layers, and the performing the first and second UV annealing are performed in-situ in a single chamber.

15. The method according to claim 13 , further comprising:
forming a third sacrificial layer on the first oxide layer after the performing the first UV annealing and before the forming the second sacrificial layer;
forming a third oxide layer on the third sacrificial layer;
forming a fourth sacrificial layer on the second oxide layer after performing the second UV annealing; and
forming a fourth oxide layer on the fourth sacrificial layer.

16. A deposition apparatus comprising:
a chamber;
a plate in the chamber, the plate being configured to support a substrate;
a deposition unit; and

a UV annealing unit, the deposition unit and the UV annealing unit being configured to perform an in-situ process including a plurality of cycles on the substrate in the chamber,
the plurality of cycles including a first cycle that includes depositing a first sacrificial layer on the substrate, depositing a first oxide layer on the first sacrificial layer, and performing a first annealing process on the substrate after the depositing the first oxide layer,
the plurality of cycles including a second cycle that includes depositing an additional sacrificial layer on the first oxide layer, depositing an additional oxide layer on the additional sacrificial layer, and performing an additional annealing process on the substrate after the depositing the additional oxide layer,
the additional annealing process being different than the first annealing process.

17. The deposition apparatus of claim 16 , wherein the deposition unit includes an inlet for providing gas to the chamber, an outlet for removing gas from the chamber, and an electrode configured to convert gas in the chamber into a plasma.

18. The deposition apparatus of claim 17 , wherein
the UV annealing unit is configured to perform the first annealing process on the first oxide layer during the first cycle,
the deposition unit is configured to form the additional sacrificial layer directly on the first oxide layer during the second cycle such that the additional sacrificial layer is a second sacrificial layer,
the deposition unit is configured to form the additional oxide layer directly

Assignees

• Park Kwang Chul
• Im Ji Woon
• Kim Dai Hong
• Kim Il Woo
• Lim Hyun Seok
• Samsung Electronics Co Ltd

Inventors

• Park Kwang Chul
• Im Ji Woon
• Kim Dai Hong
• Kim Il Woo
• Lim Hyun Seok

Classifications

• H10P50/283

  by chemical means · CPC title

• H10P14/69433

  the material being a silicon nitride not containing oxygen, e.g. SixNy or SixByNz · CPC title

• H10P14/69215

  the material being a silicon oxide, e.g. SiO2 · CPC title

• H10P14/6538

  by exposure to UV light · CPC title

• H10P14/6336

  in the presence of a plasma [PECVD] · CPC title