Semiconductor pattern detecting apparatus
US-11017525-B2 · May 25, 2021 · US
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Yang Yu Sin patents
Yang Yu Sin is listed as an inventor on 24 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Yang Yu Sin |
| Total patents | 24 |
| First publication | Apr 30, 2015 |
| Latest publication | May 25, 2021 |
Notable patents
Publications ranked by popularity score, then publication date.
Apparatus for X-ray inspection, and a method for manufacturing a semiconductor device using the same
US-10852259-B2 · Dec 1, 2020 · US
Substrate inspection apparatus, method of calibrating the substrate inspection apparatus, and method of fabricating semiconductor device using the same
US-2020182777-A1 · Jun 11, 2020 · US
Semiconductor pattern detecting apparatus
US-2020184618-A1 · Jun 11, 2020 · US
Method of inspecting semiconductor device
US-10559506-B2 · Feb 11, 2020 · US
Optical measuring method for semiconductor wafer including a plurality of patterns and method of manufacturing semiconductor device using optical measurement
US-10410937-B2 · Sep 10, 2019 · US
Method of inspecting semiconductor device
US-2019198404-A1 · Jun 27, 2019 · US
Apparatus for x-ray inspection, and a method for manufacturing a semiconductor device using the same
US-2019187077-A1 · Jun 20, 2019 · US
Optical measuring method for semiconductor wafer including a plurality of patterns and method of manufacturing semiconductor device using optical measurement
US-2019181062-A1 · Jun 13, 2019 · US
Systems and methods of testing semiconductor devices using simultaneously scanning of a plurality of regions therein and methods of forming semiconductor devices using the same
US-10281410-B2 · May 7, 2019 · US
Recent patents
Latest publications not already listed above.
Apparatus and method for exchanging probe
US-10222414-B2 · Mar 5, 2019 · US
Systems and methods of testing semiconductor devices using simultaneously scanning of a plurality of regions therein and methods of forming semiconductor devices using the same
US-2018356349-A1 · Dec 13, 2018 · US
3D profiling system of semiconductor chip and method for operating the same
US-10068324-B2 · Sep 4, 2018 · US
Semiconductor device inspection apparatus and method of driving the same
US-2018106731-A1 · Apr 19, 2018 · US
Scanning electron microscope system capable of measuring in-cell overlay offset using high-energy electron beam and method thereof
US-9934939-B2 · Apr 3, 2018 · US
Method of inspecting surface and method of manufacturing semiconductor device
US-2018061718-A1 · Mar 1, 2018 · US
Defect inspection method and defect inspection apparatus
US-2018053295-A1 · Feb 22, 2018 · US
Optical transformation module and optical measurement system, and method of manufacturing a semiconductor device using optical transformation module and optical measurement system
US-9897552-B2 · Feb 20, 2018 · US
Apparatus for forming a thin layer and method of forming a thin layer on a substrate using the same
US-9892983-B2 · Feb 13, 2018 · US
3d profiling system of semiconductor chip and method for operating the same
US-2017169558-A1 · Jun 15, 2017 · US
Structure analysis method using a scanning electron microscope
US-2017162363-A1 · Jun 8, 2017 · US
Apparatus and method for exchanging probe
US-2017160341-A1 · Jun 8, 2017 · US
Process management systems using comparison of statistical data to process parameters and process management devices
US-2015248127-A1 · Sep 3, 2015 · US
Scanning electron microscope system capable of measuring in-cell overlay offset using high-energy electron beam and method thereof
US-2015115154-A1 · Apr 30, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Samsung Electronics Co Ltd | 24 |
| Nanofocus Inc | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P74/203 | 14 |
| G01N21/9501 | 9 |
| H01L22/12 | 9 |
| G06T2207/10061 | 7 |
| G06T2207/30148 | 7 |