Substrate treating apparatus and substrate treating method
US-12591175-B2 · Mar 31, 2026 · US
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Yang Hyo Won patents
Yang Hyo Won is listed as an inventor on 24 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Yang Hyo Won |
| Total patents | 24 |
| First publication | Sep 29, 2022 |
| Latest publication | Mar 31, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Irradiating module, and substrate treating apparatus including the same
US-12517440-B2 · Jan 6, 2026 · US
Apparatus for treating substrate and method for treating a substrate
US-12504690-B2 · Dec 23, 2025 · US
Method and apparatus for treating substrate
US-12494382-B2 · Dec 9, 2025 · US
Apparatus for treating a substrate
US-12460863-B2 · Nov 4, 2025 · US
Apparatus and method for treating substrate
US-12381084-B2 · Aug 5, 2025 · US
Apparatus for correcting photomask and method thereof
US-12366799-B2 · Jul 22, 2025 · US
Substrate processing apparatus
US-12131918-B2 · Oct 29, 2024 · US
Apparatus and method for treating substrate
US-2024170304-A1 · May 23, 2024 · US
Method and apparatus for treating substrate
US-2023402295-A1 · Dec 14, 2023 · US
Recent patents
Latest publications not already listed above.
Apparatus for treating a substrate
US-2023384029-A1 · Nov 30, 2023 · US
Apparatus for correcting photomask and method thereof
US-2023229074-A1 · Jul 20, 2023 · US
Apparatus for treating substrate and method for treating a substrate
US-2023213876-A1 · Jul 6, 2023 · US
Apparatus for treating substrate and method for treating a substrate
US-2023211436-A1 · Jul 6, 2023 · US
Substrate treating apparatus and substrate treating method
US-2023207324-A1 · Jun 29, 2023 · US
Apparatus and method for treating substrate
US-2023205077-A1 · Jun 29, 2023 · US
Irradiating module, and substrate treating apparatus including the same
US-2023205100-A1 · Jun 29, 2023 · US
Substrate treating apparatus and substrate treating method
US-2023205091-A1 · Jun 29, 2023 · US
Apparatus for treating substrate and method for treating a substrate
US-2023185206-A1 · Jun 15, 2023 · US
Apparatus for treating substrate and method for treating a substrate
US-2023168586-A1 · Jun 1, 2023 · US
Irradiating module, and apparatus for treating substrate with the same
US-2023152706-A1 · May 18, 2023 · US
Apparatus and method for treating substrate
US-2023084076-A1 · Mar 16, 2023 · US
Apparatus for treating substrate and method for treating a substrate
US-2023067973-A1 · Mar 2, 2023 · US
Substrate processing apparatus
US-2022305536-A1 · Sep 29, 2022 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Semes Co Ltd | 24 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0414 | 16 |
| G03F1/80 | 15 |
| H10P72/0436 | 13 |
| H10P72/0424 | 13 |
| G03F1/44 | 9 |