Apparatus for treating substrate and method for treating a substrate

Patent metadata

Field	Value
Publication number	US-12504690-B2
Application number	US-202218059675-A
Country	US
Kind code	B2
Filing date	Nov 29, 2022
Priority date	Nov 30, 2021
Publication date	Dec 23, 2025
Grant date	Dec 23, 2025

Abstract

The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a housing having a treating space; a support unit configured to support and rotate a substrate at the treating space; a liquid supply unit configured to supply a liquid to a substrate supported on the support unit; a post-treating unit configured to perform a post-treatment on the substrate supported on the support unit; and a monitoring unit configured to inspect a state of a liquid film formed of the liquid supplied onto the substrate.

First claim

What is claimed is:

1 . A substrate treating apparatus, comprising:
a housing defining a treating space; a support unit in the treating space and configured to support and rotate a substrate; a liquid supply unit configured to perform a liquid treatment on the substrate, the liquid treatment including supplying a liquid to the substrate so that a liquid film is formed on the substrate, the liquid film being of the liquid supplied to the substrate; a post-treating unit configured to perform a post-treatment on the substrate; a monitoring unit configured to inspect a state of the liquid film; and a controller configured to generate a control signal for performing a standby command for stopping a driving of the substrate treating apparatus, wherein the monitoring unit includes a vision member configured to detect a vibration of the liquid film among the state of the liquid film, by detecting a flow of the liquid at a surface of the liquid film, and the controller is further configured to generate a signal of the standby command to the support unit and to the liquid supply unit so that rotation of the support unit and liquid supply of the liquid supply unit are stopped for a set time, in response to the vision member detecting the vibration of the liquid film.

2 . The substrate treating apparatus of claim 1 , wherein the controller is further configured to generate a liquid retention command for supplying the liquid onto the substrate, according to a state of the liquid film detected by the monitoring unit.

3 . The substrate treating apparatus of claim 1 , wherein the vision member is configured to detect whether a boundary surface of the liquid film is generated at the surface of the liquid film, and is further configured to detect a breakage of the liquid film among the state of the liquid film.

4 . The substrate treating apparatus of claim 2 , wherein the liquid supply unit is configured to supply the liquid to a set height from a top surface of the substrate, and
wherein the monitoring unit comprises
a top light sensor positioned at a height corresponding to the set height, and which is configured to detect a thickness of the liquid film among the state of the liquid film; and
a bottom light sensor positioned between the top surface of the substrate supported on the support unit and the set height, and which is configured to detect whether the liquid film is formed among the state of the liquid film, and
wherein the controller is configured to generate a liquid retention command signal to the liquid supply unit so the liquid supply unit supplies the liquid to the substrate so the thickness of the liquid film is formed to the set height, in response to the thickness of the liquid film being detected by the top light sensor as below the set height.

5 . The substrate treating apparatus of claim 2 , wherein the monitoring unit includes a weight measuring member positioned within the support unit, and which is configured to detect a weight of the liquid supplied to the substrate.

6 . The substrate treating apparatus of claim 1 , wherein the post-treating unit is a heating unit configured to heat the substrate supplied with the liquid.

7 . The substrate treating apparatus of claim 6 , wherein the heating unit is an irradiation module configured to irradiate a laser light to the substrate supplied with the liquid.

8 . The substrate treating apparatus of claim 1 , wherein the controller is further configured to generate the signal of the standby command during an etching operation of the substrate treatment apparatus.

9 . The substrate treating apparatus of claim 1 , wherein the controller is further configured to generate the signal of the standby command during the liquid treatment performed by the liquid supply unit.

10 . The substrate treating apparatus of claim 1 , wherein the liquid supplied by the liquid supply unit is an etchant.

11 . The substrate treating apparatus of claim 1 , wherein the controller is further configured execute a progress command to the post-treatment unit, in response to the vibration detected by the vision member not exceeding a certain limit range.

12 . The substrate treating apparatus of claim 1 , wherein the controller is further configured to generate an alarm signal to interlock the substrate treating apparatus, in response to the vibration detected by the vision member exceeding a certain limit range.

13 . The substrate treating apparatus of claim 1 , wherein the vision member is installed on a sidewall of the housing.

14 . A substrate treating apparatus, comprising:
a housing defining a treating space; a support unit in the treating space and configured to support and rotate a substrate; a liquid supply unit configured to perform a liquid treatment on the substrate, the liquid treatment including supplying a liquid to the substrate so that a liquid film is formed on the substrate, the liquid film being of the liquid supplied to the substrate; a post-treating unit configured to perform a post-treatment on the substrate; a monitoring unit configured to inspect a state of the liquid film; and a controller configured to generate a control signal for performing a standby command for stopping a driving of the substrate treating apparatus, wherein the monitoring unit includes a vision member configured to detect a vibration of the liquid film among the state of the liquid film, by detecting a flow of the liquid at a surface of the liquid film, wherein the controller is further configured to generate a signal of the standby command to the support unit and to the liquid supply unit so that rotation of the support unit and liquid supply of the liquid supply unit are stopped for a first set time, in response to the vision member detecting the vibration of the liquid film, and generate a liquid retention command signal to the liquid supply unit so the liquid is supplied by the liquid supply unit to the substrate supported on the support unit during a second set time, in response to the vision member detecting a boundary surface of the liquid film.

15 . A substrate treating apparatus for treating a mask having a plurality of cells, comprising:
a support unit configured to support and rotate the mask having a first pattern within the plurality of cells and having a second pattern, is different from the first pattern, outside a region at which the cells are located; a liquid supply unit configured to supply a liquid to the mask, the mask being supported on the support unit; an irradiation module configured to irradiate a laser light to the second pattern among the first pattern and the second pattern at which the liquid is supplied; a monitoring unit configured to inspect a state of a liquid film of the liquid supplied onto the mask, and a controller, wherein the monitoring unit includes a vision member configured to detect a vibration of the liquid film among the state of the liquid film, by detecting a flow of the liquid at a surface of the liquid film, the controller is configured to generate a standby command for stopping a driving of the substrate treating apparatus, or a liquid retention command for supplying the liquid onto the mask, according to the state of the liquid film detected by the monitoring unit, and the controller is further configured to generate a signal of the standby command to the support unit and the liquid supply unit so a rotation of the support unit and a liquid supply of the liquid supply unit are stopped for a first set time, in response to the vision member detecting the vibration of the liquid film.

Assignees

• Semes Co Ltd

Inventors

• Choi Ki Hoon
• Jung In Ki
• Yang Hyo Won
• Ryu Sang Hyeon
• Park Young Ho
• Kim Tae Hee

Classifications

• H10P72/3302

  Mechanical parts of transfer devices · CPC title

• H10P72/0604

  Process monitoring, e.g. flow or thickness monitoring · CPC title

• H10P72/0436

  mainly by radiation · CPC title

• H10P72/0414

  using mainly spraying means, e.g. nozzles · CPC title

• H10P74/203

  Structural properties, e.g. testing or measuring thicknesses, line widths, warpage, bond strengths or physical defects · CPC title