Imaging euv optical unit for imaging an object field into an image field
US-2026016756-A1 · Jan 15, 2026 · US
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Wolf Alexander patents
Wolf Alexander is listed as an inventor on 46 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Wolf Alexander |
| Total patents | 46 |
| First publication | Apr 7, 2015 |
| Latest publication | Jan 15, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Projection exposure apparatus for semiconductor lithography
US-12436361-B2 · Oct 7, 2025 · US
Facet assembly for a facet mirror
US-12339587-B2 · Jun 24, 2025 · US
Detecting and preventing a trapping event
US-12326026-B2 · Jun 10, 2025 · US
Method for isolating extracellular nucleic acids using anion exchange particles
US-2024301396-A1 · Sep 12, 2024 · US
Method for isolating extracellular nucleic acids using anion exchange particles
US-12031125-B2 · Jul 9, 2024 · US
Mirror for a head-up display
US-2024210679-A1 · Jun 27, 2024 · US
Detecting and preventing a trapping event
US-2024110424-A1 · Apr 4, 2024 · US
Method and device for characterizing the surface shape of an optical element
US-11927500-B2 · Mar 12, 2024 · US
Interferometric measurement method and interferometric measurement arrangement
US-11879721-B2 · Jan 23, 2024 · US
Recent patents
Latest publications not already listed above.
Apparatus for generating a virtual image with interference light suppression
US-2023176375-A1 · Jun 8, 2023 · US
Facet assembly for a facet mirror
US-2023026528-A1 · Jan 26, 2023 · US
Interferometric measurement method and interferometric measurement arrangement
US-2022307822-A1 · Sep 29, 2022 · US
Projection exposure apparatus for semiconductor lithography
US-2022299733-A1 · Sep 22, 2022 · US
Method and device for characterizing the surface shape of an optical element
US-2022236139-A1 · Jul 28, 2022 · US
Assembly in an optical system, in particular of a microlithographic projection exposure apparatus
US-2022214627-A1 · Jul 7, 2022 · US
Method for isolating extracellular nucleic acids using anion exchange particles
US-2022010298-A1 · Jan 13, 2022 · US
Projection exposure method and projection exposure apparatus for microlithography
US-11181826-B2 · Nov 23, 2021 · US
Imaging optical unit for imaging an object field into an image field
US-11119413-B2 · Sep 14, 2021 · US
Method for isolating extracellular nucleic acids using anion exchange particles
US-11104896-B2 · Aug 31, 2021 · US
Optical module with an anticollision device for module components
US-11054755-B2 · Jul 6, 2021 · US
Projection exposure method and projection exposure apparatus for microlithography
US-2020371444-A1 · Nov 26, 2020 · US
Projection exposure method and projection exposure apparatus for microlithography
US-10761429-B2 · Sep 1, 2020 · US
Imaging optical unit for imaging an object field into an image field
US-2020218045-A1 · Jul 9, 2020 · US
Projection exposure method and projection exposure apparatus for microlithography
US-2020089127-A1 · Mar 19, 2020 · US
Imaging optical unit for imaging an object field into an image field, and projection exposure apparatus including such an imaging optical unit
US-10330903-B2 · Jun 25, 2019 · US
Optical module with an anticollision device for module components
US-2019171118-A1 · Jun 6, 2019 · US
Optical component for use in a radiation source module of a projection exposure system
US-10288894-B2 · May 14, 2019 · US
Projection exposure apparatus with a highly flexible manipulator
US-10261425-B2 · Apr 16, 2019 · US
Projection lens with a measurement beam path
US-2019107784-A1 · Apr 11, 2019 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Zeiss Carl Smt Gmbh | 32 |
| Qiagen Gmbh | 5 |
| Basf Se | 4 |
| Continental Automotive Tech Gmbh | 2 |
| Mercedes Benz Group Ag | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/702 | 12 |
| G03F7/70266 | 10 |
| G03F7/70308 | 8 |
| G03F7/706 | 6 |
| G03F7/709 | 6 |