Imaging optical unit for imaging an object field into an image field, and projection exposure apparatus including such an imaging optical unit

Patent metadata

Field	Value
Publication number	US-10330903-B2
Application number	US-201815966947-A
Country	US
Kind code	B2
Filing date	Apr 30, 2018
Priority date	Nov 9, 2015
Publication date	Jun 25, 2019
Grant date	Jun 25, 2019

Abstract

An imaging optical unit for projection lithography has a plurality of mirrors for guiding imaging light from an object field into an image field. The object field is spanned by a first, larger object field dimension and along a second, smaller object field dimension. The imaging optical unit has at least two GI mirrors and at least one NI mirror. The NI mirror is arranged between two GI mirrors in the imaging light beam path. A used reflection surface of the NI mirror has an aspect ratio between a surface dimension along a first reflection surface coordinate and a surface dimension along a second reflection coordinate parallel to the second object field dimension. The aspect ratio being less than 4.5. An imaging optical unit with reduced production costs emerges.

First claim

What is claimed is:

1. An imaging optical unit, comprising:
a plurality of mirrors configured to guide imaging light from an object field in an object plane into an image field in an image plane along an imaging light beam path,
wherein:
the object field is spanned by a first Cartesian object field coordinate along a first object field dimension;
the object field is spanned by a second Cartesian object field coordinate along a second object field dimension;
the first object field dimension is greater than the second object field dimension;
the plurality of mirrors comprises first, second and third mirrors;
the first mirror is configured so that, during use of the imaging optical unit, the imaging light is incident on the first mirror at an angle of incidence that is greater than 60°;
the second mirror is configured so that, during use of the imaging optical unit, the imaging light is incident on the second mirror at an angle of incidence that is greater than 60°;
the third mirror is configured so that, during use of the imaging optical unit, the imaging light is incident on the third mirror at an angle of incidence that is less than 45°;
the third mirror is between the first and second mirrors in the imaging light beam path;
the third mirror comprises a used reflection surface;
the used reflection surface of the third mirror has a first surface dimension along a first reflection surface coordinate;
the used reflection surface of the third mirror has a second surface dimension along a second reflection surface coordinate parallel to the second object field dimension; and
the ratio of the first surface dimension to the second surface dimension is less than 4.5.

2. The imaging optical unit of claim 1 , further comprising fourth and fifth mirrors,
wherein:
the fourth mirror is configured so that, during use of the imaging optical unit, the imaging light is incident on the fourth mirror at an angle of incidence that is greater than 60°; and
the fifth mirror is configured so that, during use of the imaging optical unit, the imaging light is incident on the fifth mirror at an angle of incidence that is greater than 60°.

3. The imaging optical unit of claim 2 , wherein, for each of the first, second and fourth mirrors:
the mirror has a used reflection surface having a first surface dimension along a first reflection surface coordinate and a second surface dimension along a second reflection surface coordinate parallel to the second object field dimension; and
the aspect ratio of the first surface dimension to the second surface dimension is greater than one.

4. The imaging optical unit of claim 3 , wherein a greatest diameter of a used reflection surface of each of the first, second, fourth and fifth mirrors is less than 400 mm.

5. The imaging optical unit of claim 4 , wherein a greatest diameter of a used reflection surface of each mirror of the plurality of mirrors is less than 850 mm.

6. The imaging optical unit of claim 5 , wherein the used reflection surfaces of the plurality of mirrors is accommodatable in a cuboid having an edge length in a direction of an image field coordinate that is less than 2000 mm, and the direction of the image field coordinate is parallel to the second Cartesian object field coordinate.

7. The imaging optical unit of claim 6 , wherein the imaging optical unit has an image-side numerical aperture of at least 0.5.

8. The imaging optical unit of claim 1 , further comprising fourth and fifth mirrors,
wherein:
the fourth mirror is configured so that, during use of the imaging optical unit, the imaging light is incident on the fourth mirror at an angle of incidence that is greater than 60°;
the fifth mirror is configured so that, during use of the imaging optical unit, the imaging light is incident on the fifth mirror at an angle of incidence that is greater than 60°; and
a greatest diameter of a used reflection surface of each of the first, second, fourth and fifth mirrors is less than 400 mm.

9. The imaging optical unit of claim 1 , further comprising fourth and fifth mirrors,
wherein:
the fourth mirror is configured so that, during use of the imaging optical unit, the imaging light is incident on the fourth mirror at an angle of incidence that is greater than 60°;
the fifth mirror is configured so that, during use of the imaging optical unit, the imaging light is incident on the fifth mirror at an angle of incidence that is greater than 60°; and
a greatest diameter of a used reflection surface of each mirror of the plurality of mirrors is less than 850 mm.

10. The imaging optical unit of claim 1 , further comprising fourth and fifth mirrors,
wherein:
the fourth mirror is configured so that, during use of the imaging optical unit, the imaging light is incident on the fourth mirror at an angle of incidence that is greater than 60°;
the fifth mirror is configured so that, during use of the imaging optical unit, the imaging light is incident on the fifth mirror at an angle of incidence that is greater than 60°;
the used reflection surfaces of the plurality of mirrors is accommodatable in a cuboid having an edge length in a direction of an image field coordinate that is less than 2000 mm; and
the direction of the image field coordinate is parallel to the second Cartesian object field coordinate.

11. The imaging optical unit of claim 1 , further comprising fourth and fifth mirrors,
wherein:
the fourth mirror is configured so that, during use of the imaging optical unit, the imaging light is incident on the fourth mirror at an angle of incidence that is greater than 60°;
the fifth mirror is configured so that, during use of the imaging optical unit, the imaging light is incident on the fifth mirror at an angle of incidence that is greater than 60°; and
the imaging optical unit has an image-side numerical aperture of at least 0.5.

12. The imaging optical unit of claim 1 , wherein:
a greatest diameter of a used reflection surface of each mirror of the plurality of mirrors is less than 850 mm;
the used reflection surfaces of the plurality of mirrors is accommodatable in a cuboid having an edge length in a direction of an image field coordinate that is less than 2000 mm; and
the direction of the image field coordinate is parallel to the second Cartesian object field coordinate.

13. The imaging optical unit of claim 1 , further comprising a fourth mirror,
wherein:
the fourth mirror is configured so that, during use of the imaging optical unit, the imaging light is incident on the fourth mirror at an angle of incidence that is greater than 60°; and
for each of the first, second and fourth mirrors:
the mirror has a used reflection surface having a first surface dimension along a first reflection surface coordinate and a surface dimension along a second reflection surface coordinate parallel to the second object field dimension; and
the aspect ratio of the first surface dimension to the second surface dimension is greater than one.

14. The imaging optical unit of claim 1 , wherein a greatest diameter of a used reflection surface of each of the first and second mirrors is less than 400 mm.

15. The imaging optical unit of claim 1 , wherein a greatest diameter of a used reflection surface of each mirror of the plurality of mirrors is less than 850 mm.

16. The imaging optical unit of claim 1 , wherein the used reflection surfaces of the plurality of mirrors is accommodatable in a cuboid having an edge length in a direction of an image field coordinate that is less than 2000 mm, and the direction of the image field coord

Assignees

• Zeiss Carl Smt Gmbh

Inventors

• Wolf Alexander
• Rostalski Hans-Juergen

Classifications

• G03F7/70233

  Optical aspects of catoptric systems, i.e. comprising only reflective elements, e.g. extreme ultraviolet [EUV] projection systems · CPC title

• G02B17/0663 Primary

  off-axis or unobscured systems in which not all of the mirrors share a common axis of rotational symmetry, e.g. at least one of the mirrors is warped, tilted or decentered with respect to the other elements · CPC title

• G02B17/0642 Primary

  off-axis or unobscured systems in which not all of the mirrors share a common axis of rotational symmetry, e.g. at least one of the mirrors is warped, tilted or decentered with respect to the other elements · CPC title

• G03F7/70316

  Details of optical elements, e.g. of Bragg reflectors, extreme ultraviolet [EUV] multilayer or bilayer mirrors or diffractive optical elements · CPC title