Optical module with an anticollision device for module components

Patent metadata

Field	Value
Publication number	US-11054755-B2
Application number	US-201916269942-A
Country	US
Kind code	B2
Filing date	Feb 7, 2019
Priority date	Aug 9, 2016
Publication date	Jul 6, 2021
Grant date	Jul 6, 2021

Abstract

The disclosure relates to an optical module with first and second components, a supporting structure and an anticollision device. The first component is supported by the supporting structure and is arranged adjacent to and at a distance from the second component to form a gap. The supporting structure defines a path of relative movement, on which the first and second components move in relation to one another under the influence of a disturbance, a collision between collision regions of the first and second components occurring if the anticollision device is inactive. The anticollision device includes a first anticollision unit on the first component, which produces a first field, and a second anticollision unit on the second component, which is assigned to the first anticollision unit and produces a second field.

First claim

What is claimed is:

1. An optical module, comprising:
a first component;
a second component;
a supporting structure; and
an anticollision device,
wherein:
the first component is supported by the supporting structure;
the first component is arranged a distance from the second component to define a gap;
the supporting structure is configured to define a path of relative movement of the first component;
the first component is configured to move along the path of relative movement in a direction of approach relative to the second component under an influence of a defined mechanical disturbance;
the optical module is configured so that, when the anticollision device is absent or inactive, a collision between a first collision region of the first component and a second collision region of the second component occurs;
the anticollision device comprises a first anticollision unit on the first component and configured to produce a first field;
the anticollision device comprises a second anticollision unit on the second component, assigned to the first anticollision unit and configured to produce a second field;
the first and second anticollision units are configured so that, as the first component and the second component increasingly approach each other along the path of relative movement, the first field and the second field produce an increasing counter-force on the first component that counteracts the approach;
the first anticollision unit and/or the second anticollision unit comprises a plurality of anticollision elements configured to produce partial fields; and
the anticollision elements are assigned to each other so that, during use, a superimposition of their partial fields produces a field of the anticollision unit with a field line density that decreases more sharply with increasing distance from the anticollision unit along the path of relative movement than a field line density of one of the partial fields.

2. The optical module of claim 1 , wherein the optical module is configured so that, during use, at least one of the following holds:
the field line density of the field of the anticollision unit decreases exponentially with the distance from the anticollision unit;
the field line density of the field of the anticollision unit decreases with the distance from the anticollision unit by a power of from five to 21; and
the superimposition of the partial fields of the anticollision unit produces a real field which, in interaction with a predefined counter-field, produces a predefined counter-force on the first component only at a distance between the first collision region and the second collision region which is smaller than in a theoretical reference state, for which the amounts of the theoretical partial forces that are obtained in the direction of approach from the respective partial field without the superimposition of the partial fields are added together.

3. The optical module of claim 1 , wherein the first anticollision unit comprises N first anticollision elements, the second anticollision unit comprises M second anticollision elements, and at least one of the following holds:
N is equal to M;
N and/or M is an even number;
N equals 2 to 20; and
M equals 2 to 20.

4. The optical module of claim 1 , wherein the optical module is configured so that, during use, at least one of the following holds:
the anticollision elements of at least one of the anticollision units, in their interior, define an inner field direction of the partial field with an inner polarity;
the anticollision elements of the at least one anticollision unit are arranged in a substantially annular arrangement in a plane extending transversely; and
the anticollision elements of the at least one anticollision unit are arranged in a substantially annular arrangement in a plane perpendicular to the inner field direction of one of the anticollision elements.

5. The optical module of claim 4 , wherein the optical module is configured so that, during use, at least one of the following holds:
at least two anticollision elements of the at least one anticollision unit are arranged along a circumferential direction of the annular arrangement so that they have a substantially opposed inner polarity;
the anticollision elements of the at least one anticollision unit, at least section wise along a circumferential direction of the annular arrangement, are arranged with alternating polarity of the inner field direction; and
the inner field directions of at least two anticollision elements of the at least one anticollision unit are substantially parallel.

6. The optical module of claim 1 , wherein the optical module is configured so that, during use:
in a state of rest without any influence of the mechanical disturbance, the first and second collision regions are at an at-rest distance along the direction of approach;
the first and second anticollision units produce a negligible first counter-force on the first component;
for the first and second collision regions, there is a predefined minimum distance along the direction of approach, below which the approach must not go under the effect of the mechanical disturbance and at which the first and second anticollision units produce a second counter-force on the first component; and
for the first and second collision regions, there is an intermediate distance along the direction of approach which is achieved under the effect of the mechanical disturbance, which lies between the at-rest distance and the minimum distance and at which the first and second anticollision units produce a third counter-force on the first component that is not negligible and has a magnitude between the first counter-force and the second counter-force.

7. The optical module of claim 6 , wherein the optical module is configured so that, during use, at least one of the following holds:
the minimum distance is 3% to 20% of the at-rest distance;
the intermediate distance is 20% to 70% of the at-rest distance;
the at-rest distance is 0.2 mm to 1.0 mm;
the minimum distance is 0.015 mm to 0.1 mm; and
the intermediate distance is 0.2 mm to 0.02 mm.

8. The optical module of claim 7 , wherein wherein the optical module is configured so that, during use, at least one of the following holds:
the first counter-force is less than 3% to 20 of the second counter-force;
the third counter-force is less than 20% to 70% of the second counter-force; and
the third counter-force is 350% to 750% of the first counter-force.

9. The optical module of claim 6 , wherein wherein the optical module is configured so that, during use, at least one of the following holds:
the first counter-force is less than 3% to 20 of the second counter-force;
the third counter-force is less than 20% to 70% of the second counter-force; and
the third counter-force is 350% to 750% of the first counter-force.

10. The optical module of claim 1 , wherein wherein the optical module is configured so that, during use:
the path of relative movement, at every point, defines a distance between the first and second collision regions along the direction of approach;
for the first and second components, a minimum distance of the first and second collision regions in the direction of approach is predefined, below which the approach must not go under the effect of the mechanical disturbance; and
the counter-force produced by the first and second anticollision units on the first component, which counteracts the approach caused by the mechanical disturbance, reduces a relative speed between the first and second collision regions along the direction of approach to a value of zero at the latest when the minimum distance is reached.

Assignees

• Zeiss Carl Smt Gmbh

Inventors

• Hartjes Joachim
• Wolf Alexander
• Gruner Toralf

Classifications

• G21K1/06

  using diffraction, refraction or reflection, e.g. monochromators (G21K1/10, G21K7/00 take precedence) · CPC title

• G03F7/702

  Reflective illumination, i.e. reflective optical elements other than folding mirrors, e.g. extreme ultraviolet [EUV] illumination systems · CPC title

• F16F15/03

  using {magnetic or} electromagnetic means (F16F9/53, {F16F15/005} take precedence) · CPC title

• G03F7/70825 Primary

  Mounting of individual elements, e.g. mounts, holders or supports (workpiece or mask holders G03F7/707) · CPC title

• G03F7/70075

  Homogenization of illumination intensity in the mask plane by using an integrator, e.g. fly's eye lens, facet mirror or glass rod, by using a diffusing optical element or by beam deflection · CPC title