Imaging optical unit for imaging an object field into an image field

Patent metadata

Field	Value
Publication number	US-11119413-B2
Application number	US-202016821267-A
Country	US
Kind code	B2
Filing date	Mar 17, 2020
Priority date	Sep 25, 2017
Publication date	Sep 14, 2021
Grant date	Sep 14, 2021

Abstract

An imaging optical unit includes a plurality of mirrors to guide imaging light along an imaging beam path. The plurality of mirrors includes a number of mirrors for grazing incidence (GI mirrors), which deflect a chief ray of a central object field point with an angle of incidence of more than 45°. At least two of the GI mirrors are in the imaging beam path as basic GI mirrors so that the deflection effect thereof adds up for the chief ray. At least one further GI mirror is arranged in the imaging beam path as a counter GI mirror so that the deflection effect thereof acts in subtractive fashion for the chief ray in relation to the deflection effect of the basic GI mirrors. This can yield an imaging optical unit having enhanced flexibility in relation to an installation space used for mirror bodies of the mirrors of the imaging optical unit.

First claim

What is claimed is:

1. An imaging optical unit, comprising:
a plurality of mirrors configured to guide imaging light along an imaging beam path from an object field to the image field,
wherein:
the plurality of mirrors comprises first, second, third and fourth grazing incidence (GI) mirrors configured to deflect a chief ray of a central object field point with an angle of incidence of more than 45°;
the first, second and third GI mirrors comprise basic GI mirrors so that the deflection effect thereof add up for the chief ray;
the first, second and third GI mirrors are consecutive mirrors along the imaging beam path; and
the fourth GI mirror comprises a counter GI mirror so that a deflection effect of the fourth GI mirror acts in subtractive fashion for the chief ray relative to the deflection effect of the basic GI mirrors.

2. The imaging optical unit of claim 1 , comprising exactly one counter GI mirror.

3. The imaging optical unit of claim 1 , comprising exactly six basic GI mirrors.

4. The imaging optical unit of claim 1 , wherein the counter GI mirror is the ultimate GI mirror in the imaging beam path upstream of the image field.

5. The imaging optical unit of claim 1 , further comprising at least one further basic GI mirror downstream of the counter GI mirror in the imaging beam path.

6. The imaging optical unit of claim 1 , further comprising at least two further basic GI mirrors downstream of the counter GI mirror in the imaging beam path.

7. The imaging optical unit of claim 1 , the imaging optical unit comprises exactly three basic GI mirrors downstream of the counter GI mirror in the imaging beam path.

8. The imaging optical unit of claim 1 , further comprising a normal incidence (NI) mirror configured to deflect a chief ray of a central object field point with an angle of incidence of less than 45°.

9. The imaging optical unit of claim 1 , further comprising a light pipe, wherein:
a penultimate mirror without a passage opening for the imaging light is in the imaging beam path on a side of the light pipe, which is determined by the imaging beam path between an ultimate mirror in the imaging beam path and the image field; and
the side of the light pipe, on which the penultimate mirror is arranged, faces away from that of the first GI mirror.

10. The imaging optical unit of claim 9 , comprising exactly one counter GI mirror.

11. The imaging optical unit of claim 9 , comprising exactly six basic GI mirrors.

12. The imaging optical unit of claim 1 , comprising exactly one counter GI mirror and exactly six basic GI mirrors.

13. The imaging optical unit of claim 1 , wherein:
the imaging optical unit comprises exactly one counter GI mirror; and
the exactly one counter GI mirror is the ultimate GI mirror in the imaging beam path upstream of the image field.

14. The imaging optical unit of claim 1 , wherein:
the imaging optical unit comprises exactly one counter GI mirror; and
the imaging optical unit further comprises at least one further basic GI mirror downstream of the counter GI mirror in the imaging beam path.

15. The imaging optical unit of claim 1 , wherein:
the imaging optical unit comprises exactly one counter GI mirror; and
the imaging optical unit further comprises at least two further basic GI mirrors downstream of the counter GI mirror in the imaging beam path.

16. The imaging optical unit of claim 1 , comprising exactly one counter GI mirror and exactly three basic GI mirrors downstream of the counter GI mirror in the imaging beam path.

17. An optical system, comprising:
an imaging optical unit according to claim 1 ; and
an illumination optical unit configured to illuminate the object field.

18. An apparatus, comprising:
an imaging optical unit according to claim 1 ;
an EUV light source configured to provide the imaging light; and
an illumination optical unit configured to illuminate the object field.

19. A method of using an apparatus comprising an imaging optical unit and an illumination optical unit, the method comprising:
using the illumination optical unit to illuminate an object field of the imaging optical unit; and
using the imaging optical unit to image the object field into an image field,
wherein the imaging optical unit is an imaging optical unit according to claim 1 .

Assignees

• Zeiss Carl Smt Gmbh

Inventors

• Ruoff Johannes
• Beder Susanne
• Rostalski Hans-Juergen
• Wolf Alexander

Classifications

• G02B17/06

  using mirrors only {, i.e. having only one curved mirror (used in non-imaging applications G02B19/00)} · CPC title

• G03F7/70316

  Details of optical elements, e.g. of Bragg reflectors, extreme ultraviolet [EUV] multilayer or bilayer mirrors or diffractive optical elements · CPC title

• G03F7/70233 Primary

  Optical aspects of catoptric systems, i.e. comprising only reflective elements, e.g. extreme ultraviolet [EUV] projection systems · CPC title

• G02B17/0663

  off-axis or unobscured systems in which not all of the mirrors share a common axis of rotational symmetry, e.g. at least one of the mirrors is warped, tilted or decentered with respect to the other elements · CPC title

• G02B27/0025

  for optical correction, e.g. distorsion, aberration · CPC title