Method of operating a PVD apparatus
US-12565698-B2 · Mar 3, 2026 · US
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Wilby Tony patents
Wilby Tony is listed as an inventor on 17 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Wilby Tony |
| Total patents | 17 |
| First publication | Mar 19, 2020 |
| Latest publication | Mar 3, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Method of treating a shutter of a pvd apparatus
US-2026002249-A1 · Jan 1, 2026 · US
PVD apparatus and method
US-12492465-B2 · Dec 9, 2025 · US
In-situ wafer stress measurement by chromatic confocal sensor scanning with vibration compensation
US-2025354803-A1 · Nov 20, 2025 · US
In-situ wafer stress measurement by chromatic confocal sensor scanning with temperature compensation
US-2025354801-A1 · Nov 20, 2025 · US
Pvd apparatus and method
US-2025207241-A1 · Jun 26, 2025 · US
Method of deposition
US-12207556-B2 · Jan 21, 2025 · US
Method of Operating a PVD Apparatus
US-2024177997-A1 · May 30, 2024 · US
Apparatus and a method of controlling thickness variation in a material layer formed using physical vapour deposition
US-11913109-B2 · Feb 27, 2024 · US
Apparatus and a Method of Controlling Thickness Variation in a Material Layer Formed Using Physical Vapour Deposition
US-2024014018-A1 · Jan 11, 2024 · US
Recent patents
Latest publications not already listed above.
Method of operating a pvd apparatus
US-2023212736-A1 · Jul 6, 2023 · US
PVD Method and Apparatus
US-2023136705-A1 · May 4, 2023 · US
Method of fabricating integrated circuits
US-11361975-B2 · Jun 14, 2022 · US
Deposition Method
US-2022085275-A1 · Mar 17, 2022 · US
Method of Deposition
US-2020365794-A1 · Nov 19, 2020 · US
Method of fabricating integrated circuits
US-2020135490-A1 · Apr 30, 2020 · US
Apparatus and a method of controlling thickness variation in a material layer formed using physical vapour deposition
US-2020090913-A1 · Mar 19, 2020 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Spts Technologies Ltd | 15 |
| Orbotech Ltd | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| C23C14/35 | 11 |
| C23C14/34 | 11 |
| C23C14/345 | 10 |
| C23C14/3407 | 9 |
| C23C14/3485 | 8 |