Method of operating a PVD apparatus

Patent metadata

Field	Value
Publication number	US-12565698-B2
Application number	US-202217958390-A
Country	US
Kind code	B2
Filing date	Oct 1, 2022
Priority date	Dec 31, 2021
Publication date	Mar 3, 2026
Grant date	Mar 3, 2026

Abstract

A PVD apparatus can be operated in a cleaning mode to remove material from an electrically conductive feature formed on a semiconductor substrate. The semiconductor substrate with the electrically conductive feature formed thereon is positioned on a substrate support in a chamber of the PVD apparatus. A shutter is deployed within the chamber to divide the chamber into a first compartment in which the semiconductor substrate and the substrate support are positioned, and a second compartment in which a target of the PVD apparatus is positioned. A first plasma is generated in the first compartment to remove material from the electrically conductive feature and a second plasma is simultaneously generated in the second compartment to clean the target.

First claim

The invention claimed is:

1 . A method of operating a PVD apparatus in a cleaning mode to remove material from an electrically conductive feature formed on a semiconductor substrate comprising the steps of:
positioning the semiconductor substrate with the electrically conductive feature formed thereon on a substrate support in a chamber of the PVD apparatus, wherein the chamber is grounded; deploying a shutter within the chamber to divide the chamber into a first compartment in which the semiconductor substrate and the substrate support are positioned, and a second compartment in which a target of the PVD apparatus is positioned; and simultaneously maintaining a first plasma in the first compartment to remove material from the electrically conductive feature and a second plasma in the second compartment to clean the target, wherein the first plasma is generated by applying an RF electrical signal to the substrate support and the second plasma is generated by applying a DC electrical signal to the target, and wherein fields in the chamber are only produced by the RF electrical signal to the substrate support and the DC electrical signal to the target.

2 . The method according to claim 1 in which the material which is removed from the electrically conductive feature is an oxide of a material that the electrically conductive feature is formed from.

3 . The method according to claim 2 in which the electrically conductive feature is formed from aluminium and the material which is removed from the electrically conductive feature is aluminium oxide.

4 . The method according to claim 3 in which the electrically conductive feature is a bond pad for the semiconductor substrate.

5 . The method according to claim 1 in which the electrically conductive feature is formed from copper.

6 . The method according to claim 5 in which the material which is removed from the electrically conductive feature is one or more of titanium, tantalum, a nitride of titanium or a nitride of tantalum.

7 . The method according to claim 5 in which the electrically conductive feature is a constituent of a Damascene interconnection.

8 . The method according to claim 1 in which deploying the shutter within the chamber comprises moving the shutter laterally across the chamber from a storage position to a deployment position whereby the chamber is divided into the first and second compartments.

9 . The method according to claim 1 in which the substrate and the shutter are separated by a gap in the range 35 to 60 mm while simultaneously maintaining of the first plasma and the second plasma.

10 . The method according to claim 1 in which the shutter is fabricated from titanium or aluminium.

11 . A method according to claim 1 comprising the further steps of:
retracting the shutter so that the chamber is no longer divided into the first and second compartments; and
operating the PVD apparatus to deposit an electrically conductive deposition material onto the electrically conductive feature by PVD.

12 . The method according to claim 11 in which the substrate support is at a first position while simultaneously maintaining the first plasma and the second plasma and at a second position while operating the PVD apparatus to deposit the electrically conductive deposition material onto the electrically conductive feature by PVD, wherein the second position is closer to the target than the first position.

13 . The method according to claim 11 in which the electrically conductive deposition material deposited onto the electrically conductive feature by PVD is titanium.

14 . The method according to claim 11 in which the deposition of the electrically conductive deposition material onto the electrically conductive feature by PVD is part of an Under Bump Metallization (UBM) process.

15 . A PVD apparatus capable of operating in a cleaning mode comprising:
a chamber comprising a substrate support and a target, wherein the chamber is grounded; a shutter configured to be deployed within the chamber when, in use, a semiconductor substrate with an electrically conductive feature formed thereon is positioned on the substrate support, the shutter being deployed to divide the chamber into a first compartment in which the substrate support is positioned, and a second compartment in which the target is positioned; a first plasma generation device for maintaining a first plasma in the first compartment to remove material from the electrically conductive feature, wherein the first plasma generation device applies an RF electrical signal to the substrate support; a second plasma generation device for maintaining a second plasma in the second compartment to clean the target, wherein the second plasma generation device applies a DC electrical signal to the target; and a controller configured to control the apparatus in use (i) to deploy the shutter and (ii) to simultaneously maintain a first plasma in the first compartment to remove material from the electrically conductive feature and a second plasma in the second compartment to clean the target, and wherein fields in the chamber are only produced by the RF electrical signal to the substrate support and the DC electrical signal to the target.

16 . The PVD apparatus according to claim 15 in which the controller and the substrate support are configured so that the substrate support is at a first position while simultaneously maintaining the first plasma and the second plasma and at a second position while operating the PVD apparatus to deposit an electrically conductive deposition material onto the electrically conductive feature by PVD, wherein the second position is closer to the target than the first position.

17 . The PVD apparatus according to claim 15 further comprising an anode structure that substantially or completely surrounds the target, wherein the second plasma is generated between the target and the anode structure.

18 . The PVD apparatus according to claim 15 in which the shutter is stored in a storage position which is outside of the chamber.

19 . The PVD apparatus according to claim 18 further comprising a device for moving the shutter laterally across the chamber from the storage position to a deployment position in which the shutter is deployed, and retracting the shutter to the storage position.

20 . The PVD apparatus according to claim 15 in which the shutter is electrically grounded at least when it is deployed.

21 . The PVD apparatus according to claim 15 in which the controller is configured to control a position of the substrate support so that the substrate and the shutter are separated by a gap in the range 35 to 60 mm while the first and second plasmas are simultaneously maintained.

Assignees

• Spts Technologies Ltd

Inventors

• Haymore Scott
• Wilby Tony
• Burgess Stephen

Classifications

• H10W72/923

  Bond pads having multiple stacked layers · CPC title

• H10W72/01938

  in gaseous form, e.g. by CVD or PVD · CPC title

• H01J2237/335

  Cleaning · CPC title

• H01J2237/3343

  Problems associated with etching · CPC title

• H01J2237/3322

  Problems associated with coating · CPC title