Substrate processing method, substrate processing apparatus, and substrate processing liquid
US-2026060017-A1 · Feb 26, 2026 · US
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Ueda Dai patents
Ueda Dai is listed as an inventor on 23 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Ueda Dai |
| Total patents | 23 |
| First publication | Jul 27, 2017 |
| Latest publication | Feb 26, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Substrate treating method and substrate treating apparatus
US-2025140570-A1 · May 1, 2025 · US
Substrate treating method and substrate treating apparatus
US-2024170297-A1 · May 23, 2024 · US
Substrate processing liquid for etching a metal layer, substrate processing method and substrate processing apparatus
US-11908938-B2 · Feb 20, 2024 · US
Substrate processing method
US-11901173-B2 · Feb 13, 2024 · US
Substrate processing method and substrate processing device
US-11897009-B2 · Feb 13, 2024 · US
Substrate processing method and substrate processing apparatus
US-2022392780-A1 · Dec 8, 2022 · US
Substrate processing method
US-2022076941-A1 · Mar 10, 2022 · US
Substrate processing method and substrate processing apparatus
US-11260431-B2 · Mar 1, 2022 · US
Substrate processing method and substrate processing apparatus
US-11211241-B2 · Dec 28, 2021 · US
Recent patents
Latest publications not already listed above.
Substrate treating method and substrate treating apparatus
US-11133175-B2 · Sep 28, 2021 · US
Substrate processing liquid, substrate processing method and substrate processing apparatus
US-2021288172-A1 · Sep 16, 2021 · US
Substrate processing method and substrate processing device
US-2021016331-A1 · Jan 21, 2021 · US
Substrate processing method and substrate processing apparatus
US-2020384510-A1 · Dec 10, 2020 · US
Substrate processing method and substrate processing apparatus
US-10792712-B2 · Oct 6, 2020 · US
Substrate processing method and substrate processing apparatus
US-2020194281-A1 · Jun 18, 2020 · US
Substrate processing apparatus and substrate processing method
US-10619894-B2 · Apr 14, 2020 · US
Substrate processing method and substrate processing apparatus
US-2019366394-A1 · Dec 5, 2019 · US
Substrate processing method and substrate processing apparatus
US-2019371599-A1 · Dec 5, 2019 · US
Substrate treating method and substrate treating apparatus
US-2019333755-A1 · Oct 31, 2019 · US
Substrate treating apparatus and substrate treating method
US-10153181-B2 · Dec 11, 2018 · US
Substrate treating apparatus and substrate treating method
US-2017345683-A1 · Nov 30, 2017 · US
Substrate processing apparatus and substrate processing method
US-2017213725-A1 · Jul 27, 2017 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Screen Holdings Co Ltd | 23 |
| Merck Patent Gmbh | 6 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0448 | 16 |
| H10P70/20 | 16 |
| H10P72/0414 | 16 |
| H10P72/0411 | 14 |
| H10P72/0406 | 14 |