Multi-zone gas distribution systems and methods
US-12148597-B2 · Nov 19, 2024 · US
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Tso Alan patents
Tso Alan is listed as an inventor on 13 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Tso Alan |
| Total patents | 13 |
| First publication | Mar 10, 2016 |
| Latest publication | Nov 19, 2024 |
Notable patents
Publications ranked by popularity score, then publication date.
Multi-zone gas distribution systems and methods
US-2023197416-A1 · Jun 22, 2023 · US
Methods and systems to enhance process uniformity
US-11637002-B2 · Apr 25, 2023 · US
Multi-zone gas distribution systems and methods
US-11581165-B2 · Feb 14, 2023 · US
Methods and systems to enhance process uniformity
US-11239061-B2 · Feb 1, 2022 · US
Multi-zone gas distribution systems and methods
US-2021265134-A1 · Aug 26, 2021 · US
Multi-zone gas distribution systems and methods
US-10903054-B2 · Jan 26, 2021 · US
Multi-zone gas distribution systems and methods
US-2019189401-A1 · Jun 20, 2019 · US
Apparatus and method to reduce particle formation on substrates in post selective etch process
US-2018254203-A1 · Sep 6, 2018 · US
Methods and systems to enhance process uniformity
US-2017229291-A1 · Aug 10, 2017 · US
Recent patents
Latest publications not already listed above.
Gas distribution blocker apparatus
US-9714465-B2 · Jul 25, 2017 · US
Methods and systems to enhance process uniformity
US-2016148821-A1 · May 26, 2016 · US
Integrated processing for microcontamination prevention
US-2016068969-A1 · Mar 10, 2016 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 13 |
| Tsuei Lun | 1 |
| Tso Alan | 1 |
| Cho Tom K | 1 |
| Shieh Brian Sy-Yuan | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/32449 | 10 |
| H01J37/32862 | 7 |
| H10P72/0402 | 7 |
| H10P50/283 | 6 |
| H10P14/6336 | 6 |