Apparatus, system and method for energy spread ion beam
US-12592359-B2 · Mar 31, 2026 · US
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Tieger Daniel patents
Tieger Daniel is listed as an inventor on 17 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Tieger Daniel |
| Total patents | 17 |
| First publication | Feb 27, 2018 |
| Latest publication | Mar 31, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Single-slot tubular cathode
US-D1051838-S · Nov 19, 2024 · US
Apparatus, system and method for energy spread ion beam
US-2024029997-A1 · Jan 25, 2024 · US
Ion source with single-slot tubular cathode
US-11631567-B2 · Apr 18, 2023 · US
Apparatus, system and method for energy spread ion beam
US-11569063-B2 · Jan 31, 2023 · US
Apparatus, system and method for energy spread ion beam
US-2022319806-A1 · Oct 6, 2022 · US
Ion source with single-slot tubular cathode
US-2021383995-A1 · Dec 9, 2021 · US
Ion source with single-slot tubular cathode
US-11127557-B1 · Sep 21, 2021 · US
Ion source with single-slot tubular cathode
US-2021287872-A1 · Sep 16, 2021 · US
Apparatus and techniques for decelerated ion beam with no energy contamination
US-10692697-B2 · Jun 23, 2020 · US
Recent patents
Latest publications not already listed above.
Apparatus and techniques for beam mapping in ion beam system
US-2020027698-A1 · Jan 23, 2020 · US
Apparatus and techniques for beam mapping in ion beam system
US-10431421-B2 · Oct 1, 2019 · US
Apparatus and techniques for beam mapping in ion beam system
US-2019139740-A1 · May 9, 2019 · US
Apparatus and techniques for decelerated ion beam with no energy contamination
US-2019051493-A1 · Feb 14, 2019 · US
Apparatus and techniques for decelerated ion beam with no energy contamination
US-10147584-B2 · Dec 4, 2018 · US
Apparatus and techniques for decelerated ion beam with no energy contamination
US-2018269033-A1 · Sep 20, 2018 · US
Curved post scan electrode
US-9905396-B1 · Feb 27, 2018 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 9 |
| Varian Semiconductor Equipment Ass Inc | 8 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/3171 | 17 |
| H01J37/08 | 13 |
| H01J37/3007 | 8 |
| H01J27/08 | 5 |
| H01J2237/082 | 5 |